Linearity calibration method for capacitive displacement sensor
A capacitive sensor and displacement sensor technology, which is applied in the direction of instruments, electrical devices, and electromagnetic means, can solve the problems that the measurement accuracy of capacitive displacement sensors cannot meet the positioning accuracy requirements of micro-displacement adjustment mechanisms, and achieve the effect of high degree of automation
Active Publication Date: 2015-01-21
BEIJING GUOWANG OPTICAL TECH CO LTD
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[0004] In order to solve the problem that the measurement accuracy of the capacitive displacement sensor cannot meet the positioning accuracy requirements of the micro-displacement adjustment mechanism, the present invention proposes a method for calibrating the capacitive sensor by using high-precision displacement measuring equipment to improve the linearity of the sensor
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[0017] The present invention will be described in further detail below in conjunction with the accompanying drawings and embodiments.
[0018] Such as figure 1 As shown, the linearity calibration system of the capacitive displacement sensor used in the present invention comprises, a kind of linearity calibration method of the capacitive displacement sensor, and this method comprises following equipment: three laser interferometers, three beam splitters, three Mirror frame, reflector, capacitive sensor, piezoelectric ceramic driver (PZT) and calibration structure; The bottom layer of said calibration structure is equipped with piezoelectric ceramic driver and three mirror frames, and three beam splitters are installed on the mirror frame; The two mirrors are respectively connected with the three beam splitters; the upper layer of the calibration structure fixes the axial adjustment element, the capacitive sensor and the three first mirrors; when the laser interferometer emits l...
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The invention belongs to the technical field of displacement measurement and provides a linearity calibration method for a capacitive displacement sensor. The problem that the measurement precision of the capacitive displacement sensor cannot meet the locating precision requirement of a micrometric displacement adjusting mechanism is solved. The calibration method comprises the following steps: installing devices on a calibration structure, adjusting and calibrating a light path of a laser interferometer, calculating a control decoupling matrix, adopting a PID control strategy to make a driver move in the measurement range of the sensor to collect measurement data, and calculating calibration parameters. By means of the linearity calibration method for the capacitive displacement sensor, the linearity of the capacitive displacement sensor is calibrated, and the linearity of the capacitive displacement sensor can be improved by nearly one order of magnitude, so that the precision index of the calibrated capacitive displacement sensor meets the requirement for high locating precision. The calibrating process of the linearity calibration method for the capacitive displacement sensor can be achieved through software, and the advantages of being simple, convenient and high in automation degree are achieved. Meanwhile, the method can also be applied to calibration of the linearity of other non-contact displacement sensors except other than the capacitive displacement sensor.
Description
technical field [0001] The invention relates to the technical field of displacement measurement, and relates to a linearity calibration method of a capacitive displacement sensor. Background technique [0002] The capacitive sensor is used to provide the displacement reference in the micro-displacement adjustment mechanism, so the performance of the capacitive sensor directly determines the closed-loop control accuracy of the micro-displacement mechanism, so the accuracy of the capacitive sensor needs to be calibrated. [0003] According to the measurement error theory, the measurement accuracy is defined as the difference between the measurement value and the true value, and the measurement true value cannot be obtained, so the measurement accuracy cannot be obtained. Therefore, the linearity of the sensor is used to approximate its accuracy level. At present, the linearity of capacitive sensor products of internationally renowned capacitive sensor suppliers (such as Micro...
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IPC IPC(8): G01B7/02
Inventor 葛川李朋志李佩玥隋永新杨怀江
Owner BEIJING GUOWANG OPTICAL TECH CO LTD
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