Swing arm profiler based on capacitive displacement sensor and alignment method thereof

Abstract

The invention provides a swing arm profiler based on a capacitive displacement sensor and an alignment method thereof, which belongs to the field of optical element surface shape detection. The problem that the swing arm profiler cannot meet the need of high-precision detection in the prior art is solved. According to the invention, a measuring arm and an air flotation turntable are fixedly connected; the probe of the capacitive displacement sensor is arranged on one end of the measuring arm through a probe chucking device; a counterweight is arranged on the other end; a signal acquisition card acquires the angle signal of the air flotation turntable; and a control unit controls the capacitive displacement sensor and the signal acquisition card to acquire a signal at the same time. According to the invention, the high-precision capacitive displacement sensor is used; the action distance is zero; high-precision swing arm profile detection is realized; compared with a traditional swing arm profiler, the swing arm profiler has the advantages of higher measurement precision and better stability; the invention further provides the alignment method of the swing arm profiler based on the capacitive displacement sensor; and the dangerous problem that the swing arm profiler collides with an element when the swing arm profiler is aligned and measured is effectively solved.

Description

technical field [0001] The invention belongs to the field of surface shape detection of optical elements, and in particular relates to a swing arm profiler based on a capacitive displacement sensor and an assembly method thereof. Background technique [0002] In recent years, silicon carbide materials have been widely used in the manufacture of space optical components due to their superior material properties, such as high specific stiffness, small thermal expansion coefficient, and good dimensional stability; however, compared with traditional glass materials, silicon carbide materials The hardness is higher and the processing efficiency is lower. The processing of large-aperture optical components is generally divided into three stages: milling, grinding, and polishing; in the milling stage, the milling machine removes the material from the blank, and in the grinding and polishing stages, the surface shape is gradually formed. Since the material removal efficiency in the...

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Problems solved by technology

[0004] The purpose of the present invention is to propose a swing arm profiler based on a capacitive displacement sensor and its assembly method, so as to solve the problem that the swing arm profiler in the prior art cannot meet the detection requirements of higher precision

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