Calibration device for plate condenser displacement sensor

Abstract

The invention discloses a calibration device for a plate condenser displacement sensor, and belongs to the technical field of sensor calibration. The calibration device aims to overcome the shortcomings that the calibration stroke of a calibration device in the prior art is small, continuous real-time calibration can not be achieved, and the sensor calibration precision is low. Light emitted by a laser interferometer enters a spectroscope after passing through a micrometric displacement adjustment mechanism, and the spectroscope is installed on the micrometric displacement adjustment mechanism. A reference reflector is connected with the spectroscope and located on the same straight line as the optical axis of the single-axis laser interferometer. A measurement reflector is installed at the left end of a guide mechanism of the micrometric displacement adjustment mechanism, and a light-passing hole of the measurement reflector is adjusted to be located on the same straight line as a light-passing hole of the spectroscope. A sensor surface to be measured is arranged at the front end of the guide mechanism. The plate condenser displacement sensor is installed in the middle of a sensor support, and the two ends of the sensor support are installed on bosses on the two sides of the micrometric displacement adjustment mechanism respectively. A driver push rod is installed at the left end of a driver and pushes the guide mechanism of the micrometric displacement adjustment mechanism.

Description

technical field [0001] The invention relates to a calibration device for a flat plate capacitance displacement sensor, which belongs to the technical field of sensor calibration. Background technique [0002] The lithography projection objective lens is the key equipment in the ultra-large / very large-scale integrated circuit manufacturing process. In recent years, with the continuous reduction of the line width of the integrated circuit, the resolution of the lithography projection objective lens has gradually improved. The continuous improvement of the overall performance of optical equipment requires that the projection objective lens has a higher numerical aperture (NA) and smaller system wave aberration. However, there are errors in the detection of the optical components of the objective lens and the integration of the system assembly. In order to achieve the ideal compensation effect, the position of the optical components needs to be detected during the micro-displace...

AI Technical Summary

Problems solved by technology

[0005] In order to overcome the shortcomings of the prior art that the calibration stroke of the calibration device is small; continuous real-time calibration cannot be performed; and the calibration accuracy of the sensor is limited, the present invention provides a calibration device for a flat capacitive displacement sensor, which can simulate real-time use in thousands of environments. The first-class clean room calibrates the flat capacitive displacement sensor, and obtains the sensor's resolution, linearity and repeated measurement accuracy indicators

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