Multi-freedom degree capatitance displacement sensor

A technology of displacement sensor and degree of freedom, which is applied in the direction of using electric/magnetic devices to transmit sensing components, instruments, and electric devices. cost reduction effect

Inactive Publication Date: 2005-08-10
HEFEI UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0011] It is not difficult to see that in the above measurement method, the detected quantity is only one-dimensional. If it is applied to a multi-degree-of-freedom micro-motion table, multiple capacitive sensors are required, which is not only very expensive in terms of cost, but also in terms of volume. Difficult to miniaturize and unable to measure the true motion of the table

Method used

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  • Multi-freedom degree capatitance displacement sensor

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Embodiment Construction

[0027] see image 3 , the present embodiment is made up of moving pole plate 7, A fixed pole plate 8 and B fixed pole plate 9, and the moving pole plate 7 is located in the center, which is a double-sided pole plate; A fixed pole plate 8 and B fixed pole plate 9 are respectively located Both sides of the pole plate 7, and on the side relative to the moving pole plate 7, are single-sided pole plates; surface constitutes a capacitor.

[0028] Referring to Fig. 4, in the present embodiment, each electrode surface of the moving plate 7, the fixed plate A, and the fixed plate B 9 are four plate electrodes independently arranged, wherein,

[0029] As shown in Figure 4 (a), the four plate electrodes in the A fixed plate 8 are marked as 8a, 8b, 8c and 8d respectively;

[0030] As shown in Figure 4(b), the four plate electrodes in the moving plate 7 are marked as 7a, 7b, 7c and 7d respectively;

[0031] As shown in FIG. 4( c ), the four plate electrodes in the B fixed plate 9 are ma...

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Abstract

The present invention relates to a multi-freedom capacitance motion transducer. It is formed from movable plate and fixed plate, the movable plate is positioned in the centre, and is double-face plate; two fixed plates are respectively positioned at two sides of the movable plate, and one side relative to movable plate is single-face plate. It is characterized by that every electrode surface of the movable plate and two fixed plates is equipped with independently arranged four plate electrodes, all the plate electrodes are identical in form and size. Said invention also provides their position distributed mode. Said invention can be used in multi-freedom micrometion working table, and can obtain multi-freedom micromotion information.

Description

Technical field: [0001] The present invention relates to measuring devices, more particularly capacitive displacement sensors. Background technique: [0002] With the continuous development of science and technology, the demand for high-precision displacement measurement and non-contact measurement is increasing, and the application of capacitance micrometry technology is also becoming wider and wider. With the shortcomings of distributed capacitance and nonlinearity in capacitive sensors being overcome, high-precision, high-stability capacitive micrometer products have come out one after another. The high-precision capacitance micrometer can achieve extremely high resolution and has good frequency response characteristics, so it has become one of the main detection sensors for feedback control of high-precision micro-motion platforms in recent years. [0003] At present, the existing capacitive displacement sensors mainly fall into the following two categories: [0004] 1...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B7/02G01D5/24
Inventor 余晓芬俞建卫王永红黄其圣杜向阳
Owner HEFEI UNIV OF TECH
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