Partial-compensation aspherical reflector surface shape detection method

Abstract

The invention relates to a partial-compensation aspherical reflector surface shape detection method, which comprises the following steps of demarcating partial-compensation elements to obtain demarcated phase distribution Wb; using the demarcated phase distribution Wb, sphere theory wavefront Wq and aspherical theory wavefront Wf to obtain phase distribution Wy of digital virtual sample plates; measuring an aspherical reflector surface to be measured to obtain phase distribution Wa; and reducing the phase distribution Wy from the measured phase distribution Wa to achieve surface shape error distribution Wm of the aspherical surface. The partial-compensation aspherical reflector surface shape detection method can accurately measure optical aspherical surface shapes by using a single partial-compensation element, thereby reducing design difficulty of a compensator, simplifying structure of the compensator and being clear in physical definition, simple in data processing and arithmetical operation, simple and practical in experimental operation, low in detection cost and short in test time.

Description

technical field [0001] The invention relates to a method for detecting the surface shape of an optical aspheric reflector. Background technique [0002] The measurement of aspheric surface shape has always been a difficult point and hot spot in optical inspection. For quadric surfaces, the aberration-free point method can be used to measure aspheric surfaces. The aberration-free point method is a classic and reliable method for testing quadric surfaces. The advantage is that the theoretical error of the design is zero, but the disadvantage is that a large-diameter Hindle sphere or a large-diameter auxiliary plane is required, especially when testing a convex aspheric surface, the diameter of the auxiliary mirror is often several times that of the mirror to be tested, which causes material damage. and technical difficulty. In addition, when using this method to detect the reflective system, the center of the aspheric surface cannot be detected. [0003] At present, the use ...

AI Technical Summary

Problems solved by technology

However, for the design of a large deviation and high steepness concave aspheric compensator, generally several lenses are needed to completely correct the spherical aberration; the design of a convex aspheric compensator is much more complicated than that of a concave aspheric compensator. The aspheric compensator must be composed of at least two lenses, and sometimes the compensator itself may contain aspheric elements, and to achieve high-precision detection of the aspheric surface, another set of compensators must be designed for it, so processing and assembly posed a lot of difficulties

The design, processing and assembly of optical compensators are complex and difficult, and the compensation effect of the compensator cannot be measured separately

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