The invention relates to a method and a device for testing continuous
thermoregulation high-vacuum low-temperature micro
nanoindentation, belonging to the field of precise scientific instruments. An X-direction precision regulating module is used for regulating the position of a press-in point; a Z-direction precise press-in driving module is used for pressing in precisely, and a displacement
signal and force
signal precision detection module is used for detecting a displacement
signal and a force signal precisely; a variable temperature object support and a
cryostat are connected so as to achieve contact
thermoregulation of a sample. The device is integrated with a customerized vacuum box so as to achieve micro
nanoindentation testing of a sample when the temperature is continuously changed at 77K-500K under the vacuum environment; the problems of precise temperature variation, heat insulation, precise detection and the like in low-temperature micro
nanoindentation testing are solved; the blank of the
indentation testing technique of a traditional micro nanoindentation in a low-temperature environment when the environment temperature is changed is filled up. According to the device, the structure is simple, the process is convenient, the size is small, the response is rapid, the positioning is accurate, the temperature can be changed and controlled precisely, the displacement load signal can be detected precisely, and the micro precision press-in function can be achieved.