Method and device for testing continuous thermoregulation high-vacuum low-temperature micro nanoindentation

Abstract

The invention relates to a method and a device for testing continuous thermoregulation high-vacuum low-temperature micro nanoindentation, belonging to the field of precise scientific instruments. An X-direction precision regulating module is used for regulating the position of a press-in point; a Z-direction precise press-in driving module is used for pressing in precisely, and a displacement signal and force signal precision detection module is used for detecting a displacement signal and a force signal precisely; a variable temperature object support and a cryostat are connected so as to achieve contact thermoregulation of a sample. The device is integrated with a customerized vacuum box so as to achieve micro nanoindentation testing of a sample when the temperature is continuously changed at 77K-500K under the vacuum environment; the problems of precise temperature variation, heat insulation, precise detection and the like in low-temperature micro nanoindentation testing are solved; the blank of the indentation testing technique of a traditional micro nanoindentation in a low-temperature environment when the environment temperature is changed is filled up. According to the device, the structure is simple, the process is convenient, the size is small, the response is rapid, the positioning is accurate, the temperature can be changed and controlled precisely, the displacement load signal can be detected precisely, and the micro precision press-in function can be achieved.

Description

technical field [0001] The invention relates to the field of precision scientific instruments, in particular to a continuous temperature-regulating high-vacuum and low-temperature micro-nano indentation testing method and device. It can be used to study the mechanical properties of materials at low temperature and the change law of mechanical properties of materials with temperature. Background technique [0002] In recent years, with the continuous improvement of the synthesis and preparation process of new materials, their feature sizes have become smaller and smaller. When using traditional standard tests to measure their mechanical parameters, a series of problems such as clamping and alignment will appear. To this end, the researchers proposed a nanoindentation test method for reference to the traditional hardness test. [0003] As early as 1961, Stillwell and Tabor proposed a method for measuring mechanical properties by pressing elastic recovery. In 1992, based ...

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Problems solved by technology

[0005] The purpose of the present invention is to provide a continuous temperature-adjustable high-vacuum low-temperature micro-nano indentation testing method and device to solve the problems of preci

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