Continuous temperature-adjustable high-vacuum low-temperature micro-nano indentation test method and device

Abstract

The invention relates to a continuous temperature-regulating high-vacuum low-temperature micro-nano indentation testing method and device, belonging to the field of precision scientific instruments. The X-direction precision adjustment module is used to adjust the position of the press-in point. The precision press-in is realized through the Z-direction precision press-in drive module, and the press-in displacement signal and force signal are precisely detected by the displacement signal and force signal precision detection module; variable temperature load The object platform is connected with a low temperature thermostat to realize the contact temperature regulation of the sample. Integrated with a customized vacuum box, it can realize the micro-nano indentation test when the sample temperature changes continuously from 77K to 500K in a vacuum environment, which solves the problems of precise temperature change, heat insulation, and precise detection in the low-temperature micro-nano indentation test, and fills the gap There is a gap in the indentation test technology of changing the ambient temperature of the traditional micro-nano indenter in a low-temperature environment. The structure is simple, the processing is convenient, the volume is small, the response is fast, and the positioning is precise. It can realize precise temperature control, precise detection of displacement load signals, and microscopic precision pressing.

Description

technical field [0001] The invention relates to the field of precision scientific instruments, in particular to a continuous temperature-regulating high-vacuum and low-temperature micro-nano indentation testing method and device. It can be used to study the mechanical properties of materials at low temperature and the change law of mechanical properties of materials with temperature. Background technique [0002] In recent years, with the continuous improvement of the synthesis and preparation process of new materials, their feature sizes have become smaller and smaller. When using traditional standard tests to measure their mechanical parameters, a series of problems such as clamping and alignment will appear. To this end, the researchers proposed a nanoindentation test method for reference to the traditional hardness test. [0003] As early as 1961, Stillwell and Tabor proposed a method for measuring mechanical properties by pressing elastic recovery. In 1992, based on t...

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Problems solved by technology

[0005] The purpose of the present invention is to provide a continuous temperature-adjustable high-vacuum low-temperature micro-nano indentation testing method and device to solve the problems of precise variable temperature control, precise detection of displacement load signals, and microscopic precision indentation existing in the existing low-temperature indentation technology. And other issues

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