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Resistor-type pressure sensor and making method thereof

A resistive pressure and sensor technology, applied in the electronic field, can solve the problems of enhancing the pressure range of high sensitivity of the pressure sensor and the small pressure range of the elastic sensitive layer, and achieve the effects of enhancing the sensitivity, reducing the cost and lowering the price.

Active Publication Date: 2015-11-04
SHANGHAI JIAO TONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to provide a resistive pressure sensor and its preparation method, which solves the problem of small pressure range of high sensitivity of the elastic sensitive layer in the resistive pressure sensor, thereby enhancing the pressure range of high sensitivity of the pressure sensor

Method used

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  • Resistor-type pressure sensor and making method thereof

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preparation example Construction

[0034] The preparation method of the resistive pressure sensor of the present invention comprises the following steps:

[0035] 1) ultrasonically cleaning the substrate 1 with ethanol solution, acetone solution and deionized water, drying after cleaning, and treating the surface of the substrate with oxygen plasma or ultraviolet light / ozone;

[0036] 2) Prepare the electrode 2 on the substrate 1 by means of vacuum evaporation, magnetron sputtering, spin coating, spray coating, doctor blade coating or gravure printing;

[0037] 3) Weigh the thermosetting elastic material, foaming material and conductive material respectively, mix and stir them evenly, wherein the mixing ratio of the thermosetting elastic material and foaming material is between 10:1-10:3 , the mixing ratio of the thermosetting elastic material and the conductive material is between 20:1-5:2;

[0038] 4) Place the PET film on a flat bottom plate, set gaskets of the same height on both sides of the PET film, and...

Embodiment 1

[0045] Complete the preparation of the resistive pressure sensor through the following specific steps:

[0046] (1) Utilize ethanol solution, acetone solution and deionized water to carry out ultrasonic cleaning on the ethylene terephthalate (PET) substrate, dry after cleaning, and use oxygen plasma or ultraviolet light / ozone to treat the substrate surface;

[0047] (2) Prepare silver nanowire electrodes on the substrate 1 by spin coating;

[0048] (3) Get thermosetting elastic material polydimethylsiloxane (PDMS), powdery foaming material ammonium bicarbonate and carbon black, mix the three and stir evenly, described polydimethylsiloxane, The mass ratio of ammonium bicarbonate and carbon black is 10:1:0.5;

[0049] (4) The PET film is placed on a flat base plate, and gaskets of consistent height are arranged on both sides of the PET film, and the uniformly mixed cured elastic material, foaming material and conductive material are poured on the PET film;

[0050] (5) Cover a...

Embodiment 2

[0055] Complete the preparation of the resistive pressure sensor through the following specific steps:

[0056] (1) Utilize ethanol solution, acetone solution and deionized water to clean the flexible transparent substrate 1 of polyethylene naphthalate (PEN), blow dry with dry nitrogen after cleaning, and adopt oxygen plasma or ultraviolet light / Ozone treated substrate surface

[0057] (2) preparing a single-walled carbon nanotube electrode on the substrate 1 by spin coating;

[0058] (3) Get thermosetting elastic material platinum catalyzed silica gel (Ecoflex), powdery foaming material sodium bicarbonate and graphene, mix the three and stir evenly, described polydimethylsiloxane, ammonium bicarbonate and The mass ratio of graphene is 5:1:0.5;

[0059] (4) The PET film is placed on a flat base plate, and gaskets of consistent height are arranged on both sides of the PET film, and the uniformly mixed cured elastic material, foaming material and conductive material are poure...

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Abstract

The invention discloses a resistor-type pressure sensor and a making method thereof. The resistor-type pressure sensor is composed of a sensitive layer and two substrates containing electrodes. The sensitive layer is disposed between the two electrode layers. The sensor is characterized in that the sensitive layer is a conducting porous elastic film. Since the sensitive layer of the sensor provided by the invention adopts the conducting porous elastic film, when the film is pressed, the deformation of the film increases, the contact resistance of the conducting material in the film is reduced, the sensitivity of the pressure sensor to pressure is enhanced and the pressure sensing range of the pressure sensor is enlarged. The film is made of material at a low cost, and processing technique is simple, so that the cost of the pressure sensor is reduced.

Description

technical field [0001] The invention relates to an electronic device, in particular to a resistive pressure sensor based on a conductive porous elastic film as a sensitive layer and a preparation method thereof, belonging to the field of electronic technology. Background technique [0002] Resistive pressure sensors are sensors that convert measured pressure changes into resistance changes. The resistive pressure sensor includes a substrate with electrodes and an elastic conductive film, and the elastic missile film is located between two layers of electrodes. Elastic missile films typically use a mix of elastic and conductive materials, making them both conductive and capable of deforming under pressure. When the elastic missile film is pressed by the user, the contact between the conductive materials in the film or the contact surface between the film and the electrode increases, so that the current between the film and the electrode increases, thereby changing the resist...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L1/20
Inventor 郭小军陈苏杰卓本刚黄钰坤
Owner SHANGHAI JIAO TONG UNIV
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