Single-chip integrated eight-beam-arm triaxial accelerometer

An axial acceleration, monolithic integration technology, applied in multi-dimensional acceleration measurement, acceleration measurement using inertial force, microstructure device composed of deformable elements, etc. problems such as large coupling between shafts, to achieve the effects of small size, small coupling between shafts, and simplified packaging structure

Inactive Publication Date: 2012-05-02
ZHONGBEI UNIV
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Problems solved by technology

[0004] The purpose of the present invention is to solve the problems of low sensitivity of the existing three-axis accelerometer, large inter-axis coupling, complex packaging structure, and low yield caused by processing technology, and on the basis of the above-mentioned "three-axis piezoresistive mic...

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  • Single-chip integrated eight-beam-arm triaxial accelerometer
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Embodiment Construction

[0033] The present invention will be further described below in conjunction with accompanying drawing:

[0034] Such as Figure 1 to Figure 5 , a monolithic integrated eight-beam arm three-axis accelerometer, including a mass block frame 1, a central support block 3 suspended at the center of the mass block frame 1 through 2 elastic beam arms, and four sides of the center support block 3 The two elastic beam arms 2 are respectively fixed to the mass block frame 1, the lower bottom surface of the central fixed support block 3 exceeds the lower bottom surface of the mass block frame 1, and the lower bottom surface of the central fixed support block 3 is bonded with a glass substrate through electrostatic bonding technology. seat 4; twelve strain varistors R1, R2, R3, R4, R5, R6, R7, R8, R9, R10, R11, R12, wherein, the first strain varistor R1 and the second strain varistor R2 are respectively located on two elastic beam arms 2 on the same straight line in the X direction, and t...

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Abstract

The invention relates to an acceleration sensor in the field of sensors of a micro electro mechanical system (MEMS), in particular to a single-chip integrated eight-beam-arm triaxial accelerometer, and solves the problems of low sensitivity, high degree of inter-axial coupling, complicated packaging structure, inconvenience for installation test and poor high-temperature resistance of the conventional accelerometer. The single-chip integrated eight-beam-arm triaxial accelerometer comprises eight elastic beam arms, a central clamped block and mass block frames, wherein the surrounding mass block frames are respectively fixed with the central clamped block through the elastic beam arms; a lower bottom surface of the central clamped block is bonded with a glass bottom cover through an electrostatic coupling technology; twelve piezoresistors having equal resistance are symmetrically distributed at both ends of the eight elastic beam arms; and the piezoresistors are connected to respectively form three Wheatstone bridges for respectively testing three axial accelerations. The single-chip integrated eight-beam-arm triaxial accelerometer is high in sensitivity, simple in packaging structure, high in reliability, low in cost, easy to integrally process, and wide in application range.

Description

technical field [0001] The invention relates to an acceleration sensor in the field of MEMS sensors, in particular to a single-chip integrated eight-beam-arm three-axis accelerometer. Background technique [0002] As an inertial device, the accelerometer can be used in aerospace, biological, chemical and medical analysis, automatic control and vibration testing and other fields. With the rise of the MEMS industry, accelerometers are developing in the direction of miniaturization, integration, high reliability, and high sensitivity, and have broad military and civilian prospects. A traditional three-axis accelerometer assembles three uniaxial accelerometers to form a three-dimensional accelerometer, but such a structure reduces the mechanization accuracy and miniaturization of the accelerometer. The current three-axis accelerometer is also tried to be made by MEMS technology. For example, the Chinese patent No. 200710061738 discloses a "three-axis piezoresistive micro-accele...

Claims

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Application Information

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IPC IPC(8): G01P15/18B81B3/00G01P15/12
Inventor 张文栋何常德薛晨阳熊继军刘俊张国军杜春晖宛克敬葛晓洋苗静廉德钦于佳琪张永平
Owner ZHONGBEI UNIV
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