Single-chip integrated eight-beam-arm triaxial accelerometer

Abstract

The invention relates to an acceleration sensor in the field of sensors of a micro electro mechanical system (MEMS), in particular to a single-chip integrated eight-beam-arm triaxial accelerometer, and solves the problems of low sensitivity, high degree of inter-axial coupling, complicated packaging structure, inconvenience for installation test and poor high-temperature resistance of the conventional accelerometer. The single-chip integrated eight-beam-arm triaxial accelerometer comprises eight elastic beam arms, a central clamped block and mass block frames, wherein the surrounding mass block frames are respectively fixed with the central clamped block through the elastic beam arms; a lower bottom surface of the central clamped block is bonded with a glass bottom cover through an electrostatic coupling technology; twelve piezoresistors having equal resistance are symmetrically distributed at both ends of the eight elastic beam arms; and the piezoresistors are connected to respectively form three Wheatstone bridges for respectively testing three axial accelerations. The single-chip integrated eight-beam-arm triaxial accelerometer is high in sensitivity, simple in packaging structure, high in reliability, low in cost, easy to integrally process, and wide in application range.

Description

technical field

[0001] The invention relates to an acceleration sensor in the field of MEMS sensors, in particular to a single-chip integrated eight-beam-arm three-axis accelerometer. Background technique

[0002] As an inertial device, the accelerometer can be used in aerospace, biological, chemical and medical analysis, automatic control and vibration testing and other fields. With the rise of the MEMS industry, accelerometers are developing in the direction of miniaturization, integration, high reliability, and high sensitivity, and have broad military and civilian prospects. A traditional three-axis accelerometer assembles three uniaxial accelerometers to form a three-dimensional accelerometer, but such a structure reduces the mechanization accuracy and miniaturization of the accelerometer. The current three-axis accelerometer is also tried to be made by MEMS technology. For example, the Chinese patent No. 200710061738 discloses a "three-axis piezoresistive micro-accele...

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