The invention discloses an asymmetric
coupling rigidity disturbance type MEMS
modal localization
accelerometer and a detection method. The
accelerometer comprises an upper
signal conversion layer and a lower glass substrate layer. The upper
signal conversion layer comprises a sensitive
mass block, a supporting structure and asymmetrical coupled
resonator pairs which are symmetrically distributed. According to the asymmetric
coupling resonator pair, a first type
resonator and a second type resonator form a weak
coupling system through
electrostatic coupling, the first type resonator is fixed to a glass substrate layer through anchor points, the second type resonator is fixed to a sensitive
mass block, and the first type resonator and the second type resonator meet the
mass and rigidity asymmetric relation. When being subjected to the acceleration effect, the sensitive mass block generates micro displacement, changes the static coupling rigidity and triggers the
modal localization effect, so that the
amplitude ratio of the two resonators is changed, and acceleration measurement is realized by detecting the
amplitude ratio change. By adopting the asymmetric structure, the sensitivity of the
accelerometer is doubled compared with that of a
symmetric structure, and meanwhile, the accelerometer has good
linearity and anti-interference capability.