342results about "Electrostatic transducer loudspeakers" patented technology

In an example, the present invention provides a micro-speaker device. The device has a movable diaphragm device comprising a thickness of silicon or graphene material which has a first surface and a second surface opposite of the first surface and sensor to track position of the diaphragm. The device has a housing enclosing the movable diaphragm device, the electrode device and an encapsulation device. The electrode device can be part of a CMOS device with electronics integrated on to the device that converts input audio signal in to signal that electrostatically actuates the micro-speaker from one or more surfaces.

The invention discloses an intelligent audio scene adaptation method based on an MEMS loudspeaker, and relates to the technical field of audio scene adaptation. Audio is collected through a microphone array, and features such as frequency domain entropy are fused to construct vectors; a scene is identified by using BiLSTM and a self-attention model, and rapid adaptation is carried out in combination with transfer learning; optimizing loudspeaker parameters based on a coupling model and a genetic algorithm, and compensating temperature influence; the equal-sound curve is dynamically adjusted according to the scene, the audio is enhanced, and cross-scene adaptation, parameter pre-adjustment and multi-loudspeaker collaborative optimization are realized through the technologies of adversarial training, model prediction control and the like. According to the invention, through multi-modal feature fusion and deep learning, the scene recognition accuracy is improved, the loudspeaker parameters are optimized by using the coupling model, and distortion and power consumption are reduced; the audio enhancement parameters are dynamically adjusted, multi-scene adaptation is achieved, the tone quality and the user experience are improved, and the application bottleneck of a traditional MEMS loudspeaker is solved.

MEMS device (10) with a movable displacement element (12) and a drive device (14) for driving the movable displacement element (12), wherein the drive device (14) has at least one drive electrode (16), characterized in that the drive electrode (16) is segmented and at least one functional electrode (18) is provided for measuring the deflection of the displacement element (12).

A MEMS audio device includes a first wafer having a top with a first cavity and a bottom with a vent hole coupled to the first cavity, wherein the bottom having first contacts, a second wafer disposed upon the first wafer having a flexible material layer disposed above the first cavity, a third wafer disposed upon the second wafer having physical contacts coupled to the second wafer, wherein the third wafer includes a second cavity disposed above the flexible material layer, a wiring wafer disposed below the first wafer having a second vent hole coupled to the first cavity, wherein the wiring wafer having second contacts coupled to the first contacts, and wherein the flexible material layer forms a diaphragm for the MEMS audio device.

An electro-acoustic transducer includes a substrate, a MEMS device disposed on the substrate, and a membrane disposed on the MEMS device. The electro-acoustic transducer further includes a pair of internal connection pads that serve as a path for a signal to be supplied to a drive source; and one or more height adjustment pads disposed in a region of an upper surface of the substrate that overlaps with a fixed portion in plan view. A lower surface of the fixed portion is bonded to the upper surface of the substrate, and the internal connection pads and the height adjustment pad are interposed between the substrate and the fixed portion.

Provided is a connector structure that is capable of inhibiting physical damage to a connection portion between a conductive layer and a wiring part, and is also capable of inhibiting electrical damage to the connection portion, and therefore, is suitable for functional fibers. When one surface 1a of a conductive layer 1 forms an XY plane defined by an X axis and a Y axis, a connector structure 10 is formed by connecting wiring part 2 to the one surface 1a in a Z-axis direction. In at least one cross-section that appears when a connection portion 3 is cut along the Z-axis direction, an internal angle θ that is located on the side of the wiring part 2 and that is formed by a virtual straight line L1 drawn by the one surface 1a and a virtual straight line L2 drawn by a surface of the wiring part 2 connected to the one surface 1a is greater than 90 degrees.

The invention discloses a directional sound wave loudspeaker control method based on MEMS, and relates to the technical field of stereo loudspeakers. By initializing the MEMS array, the microphone array and the control circuit, stable operation of the system is ensured. The microphone array accurately locates a sound source by using a TDOA or beam forming algorithm, and the control circuit calculates phase and amplitude parameters of the MEMS unit to realize high-precision beam forming. The MEMS acoustic metasurface array transmits directional sound wave beams according to parameter adjustment, a microphone in a target area monitors sound wave quality in real time, and a control circuit dynamically and finely adjusts array setting through a feedback optimization algorithm to adapt to environmental changes. The system has the advantages of high-precision positioning, efficient beam forming, real-time optimization and low power consumption, is suitable for scenes such as smart home and virtual reality, and remarkably improves sound wave directionality and quality stability.

The invention relates to the technical field of semiconductors, in particular to an MEMS micro loudspeaker packaging structure and a preparation method thereof, and the packaging structure comprises a substrate which is provided with a hollow cavity structure, a limiting device and a plurality of vent holes in the bottom; and the MEMS sound production chip is inversely arranged on the substrate, and the edge area of the MEMS sound production chip is bonded with the substrate through the connecting part. According to the packaging structure of the MEMS micro loudspeaker provided by the invention, the MEMS sound production chip is inversely arranged and is in direct contact with the substrate used for packaging, so that the packaging structure has higher impact resistance, the inversely arranged MEMS sound production chip can better dissipate heat, and a double-sound-cavity structure in the packaging structure increases system damping and reduces the quality factor of device resonance; the stability and reliability of the chip can be improved, the design of multiple vent holes is combined with the limiting device, the nonlinear displacement of the MEMS sound production chip under the resonant frequency is effectively inhibited, and the total harmonic distortion is reduced.

There is a composite material for an acoustic transducer diaphragm comprising: a thermoplastic polymer resin, a graphitic filler, and optionally a coupling agent. The thermoplastic polymer resin is selected from the group consisting of polypropylene, polyethylene, poly(methyl methacrylate), polycarbonate, polyoxymethylene, cyclic olefin copolymer, polyethylene terephthalate, acrylonitrile butadiene styrene, polybutylene terephthalate, polyamide, poly(ADP-ribose) polymerase, polyethylenimine, polyamide-imide, polyether ether ketone, polyolefin, polyester, polycarbonate, polysulfone, polyacetals, polyvinyl acetals, polyketone, polyamides, cyclic olefin copolymer, thermoplastic thermotropic liquid-crystal polymer, polyphenylene sulfide, polyimide and a mixture thereof. The graphitic filler is selected from the group consisting of graphene oxide, reduced graphene oxide, graphite, graphene and carbon nanotubes, and a mixture thereof. The coupling agent or a mixture is selected from the group consisting of titanium organometallics, aluminum organometallics, zirconium organometallics, and silicon organometallics.

An electrostatic transducer that enables improvement of detection accuracy or driving precision while allowing flexibility is provided. The electrostatic transducer (1) is provided with: an insulator sheet (11); at least one electrode sheet (12) which is laminated on the insulator sheet (11), constitutes a target region to be used as a detection region or a driving region, is formed of an elastomer comprising a conductive filler, and includes at least one terminal part (12b); and at least one bypass conductor (13) which has an electrical resistivity less than that of the electrode sheet (12), is disposed in contact with the electrode sheet (12) along the surface of a part of the electrode sheet (12), and is electrically connected to the electrode sheet (12) in the area in contact with the electrode sheet (12).

A microelectromechanical sensor component. The component includes: a substrate; a movable sensor structure connected to the substrate and having a seismic mass portion and a deflection electrode arranged thereon; and at least one evaluation electrode arranged on the substrate. The deflection electrode is arranged so as to be movable relative to the evaluation electrode. The evaluation electrode is configured for capacitive detection of a deflection of the deflection electrode. The deflection electrode and the evaluation electrode form a comb structure. The deflection electrode has a plurality of deflection electrode fingers extending from a deflection electrode bar in the direction of the evaluation electrode. The evaluation electrode has a plurality of evaluation electrode fingers extending, parallel at least in portions to the deflection electrode fingers, from an evaluation electrode bar in the direction of the deflection electrode.

The invention discloses a fixed end beam-cantilever beam type piezoelectric MEMS loudspeaker and a preparation method and application thereof. The piezoelectric MEMS loudspeaker comprises a substrate, an upper electrode, a piezoelectric layer, a lower electrode and a vibrating membrane, the upper electrode, the piezoelectric layer and the lower electrode are sequentially arranged on the substrate, and the vibrating membrane and an etching gap surrounding the vibrating membrane are formed on the upper electrode, the piezoelectric layer and the lower electrode in an etching mode; the vibration displacement of the fixed end beam-cantilever beam type piezoelectric MEMS loudspeaker is very large, and is mainly attributed to the superposition of the vibration displacement of the fixed end beam and the vibration displacement of the cantilever beam.

The invention provides a diaphragm capable of improving the bonding strength with other components and an electro-acoustic conversion device capable of improving the assembly precision of MEMS equipment and peripheral components. This electro-acoustic conversion device is provided with a substrate, a MEMS device disposed on the substrate, and a diaphragm disposed on the MEMS device, the MEMS device having a frame-shaped fixed part, a movable part, a torsion beam and a drive beam connecting the fixed part and the movable part at positions closer to the lower surfaces than the upper surfaces of the fixed part and the movable part, and a drive source disposed on the lower surface of the drive beam. A pair of pads for internal connection and pads for height alignment, which serve as paths for signals supplied to the drive source, are disposed in a region of the upper surface of the substrate that overlaps the fixed portion in the planar direction, and the lower surface of the fixed portion is bonded to the upper surface of the substrate with the pads for internal connection and the pads for height alignment interposed therebetween. This diaphragm is provided with a frame part, a central part, and a connecting part that connects the inner edge of the frame part and the outer edge of the central part. The upper surface and the lower surface of the frame part are provided with a concave-convex structure.

Provided is an acoustic processing apparatus in which a microelectromechanical systems (MEMS) device is effectively arranged. The acoustic processing apparatus includes an enclosure, a sound duct extending from the enclosure, and a MEMS device housed in the sound duct.

Provided is a speaker, including: a diaphragm structure including first and second diaphragms, the first diaphragm is configured to push air to vibrate to generate initial sound wave, and a signal of which is modulated based on a signal within an audible sound frequency band; and a cover plate structure enclosing with the diaphragm structure to form sound-generating cavity, the cover plate structure has a sound outlet hole connecting the sound-generating cavity with outside, the initial sound wave in the sound-generating cavity is transmitted to the outside through the at least one sound outlet hole to form a sound signal, the second diaphragm and the cover plate structure generate an acoustic environmental impedance used to modulate the initial sound wave to change sound pressure of the sound signal. The speaker can modulate and output a sound signal covering the audible sound frequency band based on the acoustic environmental impedance.

In an embodiment a MEMS structure includes a back-plate structure, a support structure having a cavity, a membrane structure between the back-plate structure and the support structure, a first clamping structure having a first structured oxide layer between the support structure and the membrane structure, wherein an inner edge of the first clamping structure is laterally offset from an edge of the cavity, and wherein an offset of the first clamping structure forms a gap between the support structure and the membrane structure, and a second clamping structure having a second structured oxide layer and a first structured taper layer between the back-plate structure and the membrane structure, wherein the second structured oxide layer is arranged between the back-plate structure and the first structured taper layer, wherein an inner edge of the second structured oxide layer laterally extends over the cavity, and wherein the first structured taper layer is arranged between the second structured oxide layer.

To provide an electrostatic speaker capable of maintaining high fidelity sound quality output even in a wide range of sound. [Solution] The electrostatic speaker includes an electrostatic sound generating diaphragm unit consisting of two parallel, spaced-apart electrode plates (1) and a diaphragm (2) between the electrode plates. The surface of the electrode plate facing the diaphragm is coated with a conductive layer, and both sides of the diaphragm are also coated with conductive layers. A voltage is applied to the conductive layers of the electrode plate and the diaphragm. Hollow sound-emitting holes are uniformly formed in the electrode plate, and an insulating buffer layer (3) is filled between the electrode plate and the diaphragm. Even if the applied high-voltage electric field voltage causes the diaphragm to distort due to excessive amplitude, the insulating buffer layer limits the diaphragm's amplitude, preventing distortion. The insulating buffer layer also prevents contact between the diaphragm and the electrode plate and maintains an appropriate minimum distance, preventing destructive discharges caused by too close a distance between the diaphragm and the electrode plate. This prevents the appearance of high-voltage discharge noise and prevents the diaphragm from being damaged by high-voltage discharge.

Operating an electrostatic acoustic device simultaneously as a speaker and as a microphone. The electrostatic acoustic device includes a membrane and an electrode disposed proximate to the membrane. An input varying audio signal is input to the electrostatic acoustic device. The membrane is configured to respond mechanically to a varying electric field responsive to the varying audio signal input. A portion of the input varying audio signal is tapped to produce a reference signal. A signal is detected responsive to motion of the membrane, to convert the signal to an output varying voltage signal. The output varying voltage signal is compared to the reference signal to produce a microphone signal. The microphone signal is responsive to motion of the membrane induced by air pressure variations of ambient sound.

An air-pulse generating device includes a film structure. The film structure is actuated such that the air-pulse generating device produces a plurality of air pulses. A horn-shaped outlet is formed within the air-pulse generating device, and the plurality of air pulses is propagated via the horn-shaped outlet.

The invention relates to a microelectromechanical component (1) with a housing (2) and a displacer structure (3) arranged in the housing (2), wherein the displacer structure (3) has a coupling element (4) movable within the housing (2) and a plurality of displacer walls (5) extending parallel to each other and perpendicular to the coupling element (4), wherein the displacer walls (5) define laterally adjacent volume chambers (6), wherein a fluid can be conveyed into and displaced from the volume chambers (6) by a relative movement between each pair of adjacent displacer walls (5), wherein at least one first displacer wall (5, 5') is mechanically connected to the movable coupling element (4) and is movable together with the coupling element (4), and wherein the at least one first displacer wall (5, 5') movable together with the coupling element (4) mechanically connected to the housing (2).The invention further relates to a microelectromechanical loudspeaker (12) with such a microelectromechanical component (1).

A microelectromechanical device for interaction with a fluid. A displacer structure, wherein the displacer structure is arranged in a cavity, wherein the displacer structure comprises a movable lamella that is deflectable for interaction with a fluid pressure in a pressure region of a cavity, wherein the lamella has at least one edge region, wherein the edge region of the lamella is movable along at least one boundary surface of the cavity when the lamella is deflected, wherein a flow channel is formed between the boundary surface and the edge region, wherein fluid can flow out of the pressure region via the flow channel, wherein the edge region and / or the boundary surface comprise means that make it more difficult for fluid to flow out of the pressure region via the flow channel.

The invention discloses a piezoelectric MEMS loudspeaker based on a folding ring between movable and fixed parts and application thereof, and belongs to the technical field of loudspeakers, the piezoelectric MEMS loudspeaker comprises a piezoelectric actuating assembly, a fixed assembly and a folding ring; the piezoelectric actuating assembly comprises a piezoelectric actuating composite layer, the piezoelectric actuating composite layer at least comprises a piezoelectric material layer, and the piezoelectric actuating composite layer generates mechanical displacement by applying voltage to drive the piezoelectric actuating assembly to vibrate so as to generate sound pressure; the fixing component can be a single structural component or a component with a plurality of structural components; the fixing assembly can be used for fixedly supporting the fixed supporting part of the piezoelectric actuating assembly, so that the non-fixed supporting part of the piezoelectric actuating assembly can freely move or vibrate; according to the invention, through the innovative design based on the folding ring between the moving part and the fixed part, the low-frequency vibration displacement of the vibrating diaphragm is remarkably improved, the problem that the low-frequency sound pressure of a traditional piezoelectric MEMS loudspeaker is insufficient is effectively solved, and the vibrating diaphragm can push air with a larger volume in a low-frequency band, so that a fuller low-frequency sound effect is obtained.

The present invention relates to a microelectromechanical system (MEMS) (100) comprising a MEMS component (110) with a surface (120) and at least one contact column (1) having a top surface (2) on the surface (120), wherein the top surface (2) comprises a conductive material (4) and is designed and configured to supply the MEMS component (110) with a supply and / or signal voltage (130). The invention further relates to a method for manufacturing such a MEMS (100) with at least one contact column (1) and to the use of the MEMS (100) according to the invention in systems for interacting with fluids.

The present invention specifically relates to a method for preparing a piezoelectric MEMS smart speaker, including: using a theoretical formula for film vibration frequency to preliminarily calculate the film vibration frequency according to a target frequency range; using finite element analysis software to perform simulation and predict the resonance frequency of each vibration membrane to determine the material of each layer; selecting a piezoelectric material; selecting a substrate material; sputtering a first electrode material on the substrate, and etching to form a required electrode pattern; depositing a piezoelectric layer material to ensure uniform thickness; sputtering a second electrode material on the piezoelectric layer, and etching to form a required electrode pattern; testing the actual performance frequency of the speaker; adjusting the thickness or shape of the piezoelectric layer according to the test results; and also including using a dynamic algorithm to adjust the thickness or shape of the piezoelectric layer; re-depositing the piezoelectric layer and adjusting it; until the resonance frequencies of all vibration membranes are within the target range.

A display device in which a front electrode serving as a diaphragm in a condenser-type microphone module is disposed on one surface of a display panel, and a rear electrode is disposed under a frame, so that a change in capacitance between the front electrode and the rear electrode caused by the vibration of the front electrode is sensed with high sensitivity. Accordingly, the condenser-type high-sensitivity microphone can be integrated into the display device.

A drive circuit includes an amplifier configured to amplify an input signal, and supply the amplified input signal as a drive signal to a piezoelectric element of a MEMS (Miro-Electro-Mechanical Systems) speaker driven by a piezoelectric element; and an offset generator configured to generate an offset such that a minimum absolute value of a voltage of the drive signal is greater than or equal to a positive predetermined voltage.

In an example, the present invention provides a micro-speaker device. The device has a movable diaphragm device comprising a thickness of silicon or graphene material which has a first surface and a second surface opposite of the first surface and sensor to track position of the diaphragm. The device has a housing enclosing the movable diaphragm device, the electrode device and an encapsulation device. The electrode device can be part of a CMOS device with electronics integrated on to the device that converts input audio signal in to signal that electrostatically actuates the micro-speaker from one or more surfaces.

The embodiment of the invention discloses an MEMS loudspeaker and a preparation method thereof. The MEMS loudspeaker comprises a vibrating diaphragm layer and a supporting structure layer which are stacked in the thickness direction, the vibrating diaphragm layer comprises a vibrating diaphragm area; the vibrating diaphragm layer of the vibrating diaphragm area comprises a plurality of piezoelectric film layers which are stacked in the thickness direction; the diaphragm area comprises a separation slit; the supporting structure layer comprises a cavity, and the vibrating diaphragm area is located in the projection area range of the cavity in the thickness direction. According to the embodiment of the invention, the driving efficiency is improved through the multi-layer piezoelectric film layer structure, and the working stress distribution is optimized through the separation slits, so that the emission performance and the signal consistency of the device are jointly improved.

The invention preferably relates to a process for producing a MEMS transducer comprising a membrane and a carrier, wherein the membrane has a meandering structure comprising vertical and horizontal sections. This comprises initially providing a shaping component which is coated with a membrane layer system. The membrane layer system comprises at least one actuator ply comprising an actuator material. Structuring the membrane layer system provides membranes that may be attached to a carrier. The shaping component can be completely removed. The invention preferably further relates to a MEMS transducer producible by the process.