217results about "Electrostatic transducer loudspeakers" patented technology

MEMS device (10) with a movable displacement element (12) and a drive device (14) for driving the movable displacement element (12), wherein the drive device (14) has at least one drive electrode (16), characterized in that the drive electrode (16) is segmented and at least one functional electrode (18) is provided for measuring the deflection of the displacement element (12).

A MEMS audio device includes a first wafer having a top with a first cavity and a bottom with a vent hole coupled to the first cavity, wherein the bottom having first contacts, a second wafer disposed upon the first wafer having a flexible material layer disposed above the first cavity, a third wafer disposed upon the second wafer having physical contacts coupled to the second wafer, wherein the third wafer includes a second cavity disposed above the flexible material layer, a wiring wafer disposed below the first wafer having a second vent hole coupled to the first cavity, wherein the wiring wafer having second contacts coupled to the first contacts, and wherein the flexible material layer forms a diaphragm for the MEMS audio device.

Provided is a connector structure that is capable of inhibiting physical damage to a connection portion between a conductive layer and a wiring part, and is also capable of inhibiting electrical damage to the connection portion, and therefore, is suitable for functional fibers. When one surface 1a of a conductive layer 1 forms an XY plane defined by an X axis and a Y axis, a connector structure 10 is formed by connecting wiring part 2 to the one surface 1a in a Z-axis direction. In at least one cross-section that appears when a connection portion 3 is cut along the Z-axis direction, an internal angle θ that is located on the side of the wiring part 2 and that is formed by a virtual straight line L1 drawn by the one surface 1a and a virtual straight line L2 drawn by a surface of the wiring part 2 connected to the one surface 1a is greater than 90 degrees.

There is a composite material for an acoustic transducer diaphragm comprising: a thermoplastic polymer resin, a graphitic filler, and optionally a coupling agent. The thermoplastic polymer resin is selected from the group consisting of polypropylene, polyethylene, poly(methyl methacrylate), polycarbonate, polyoxymethylene, cyclic olefin copolymer, polyethylene terephthalate, acrylonitrile butadiene styrene, polybutylene terephthalate, polyamide, poly(ADP-ribose) polymerase, polyethylenimine, polyamide-imide, polyether ether ketone, polyolefin, polyester, polycarbonate, polysulfone, polyacetals, polyvinyl acetals, polyketone, polyamides, cyclic olefin copolymer, thermoplastic thermotropic liquid-crystal polymer, polyphenylene sulfide, polyimide and a mixture thereof. The graphitic filler is selected from the group consisting of graphene oxide, reduced graphene oxide, graphite, graphene and carbon nanotubes, and a mixture thereof. The coupling agent or a mixture is selected from the group consisting of titanium organometallics, aluminum organometallics, zirconium organometallics, and silicon organometallics.

A microelectromechanical sensor component. The component includes: a substrate; a movable sensor structure connected to the substrate and having a seismic mass portion and a deflection electrode arranged thereon; and at least one evaluation electrode arranged on the substrate. The deflection electrode is arranged so as to be movable relative to the evaluation electrode. The evaluation electrode is configured for capacitive detection of a deflection of the deflection electrode. The deflection electrode and the evaluation electrode form a comb structure. The deflection electrode has a plurality of deflection electrode fingers extending from a deflection electrode bar in the direction of the evaluation electrode. The evaluation electrode has a plurality of evaluation electrode fingers extending, parallel at least in portions to the deflection electrode fingers, from an evaluation electrode bar in the direction of the deflection electrode.

Provided is an acoustic processing apparatus in which a microelectromechanical systems (MEMS) device is effectively arranged. The acoustic processing apparatus includes an enclosure, a sound duct extending from the enclosure, and a MEMS device housed in the sound duct.

Provided is a speaker, including: a diaphragm structure including first and second diaphragms, the first diaphragm is configured to push air to vibrate to generate initial sound wave, and a signal of which is modulated based on a signal within an audible sound frequency band; and a cover plate structure enclosing with the diaphragm structure to form sound-generating cavity, the cover plate structure has a sound outlet hole connecting the sound-generating cavity with outside, the initial sound wave in the sound-generating cavity is transmitted to the outside through the at least one sound outlet hole to form a sound signal, the second diaphragm and the cover plate structure generate an acoustic environmental impedance used to modulate the initial sound wave to change sound pressure of the sound signal. The speaker can modulate and output a sound signal covering the audible sound frequency band based on the acoustic environmental impedance.

To provide an electrostatic speaker capable of maintaining high fidelity sound quality output even in a wide range of sound. [Solution] The electrostatic speaker includes an electrostatic sound generating diaphragm unit consisting of two parallel, spaced-apart electrode plates (1) and a diaphragm (2) between the electrode plates. The surface of the electrode plate facing the diaphragm is coated with a conductive layer, and both sides of the diaphragm are also coated with conductive layers. A voltage is applied to the conductive layers of the electrode plate and the diaphragm. Hollow sound-emitting holes are uniformly formed in the electrode plate, and an insulating buffer layer (3) is filled between the electrode plate and the diaphragm. Even if the applied high-voltage electric field voltage causes the diaphragm to distort due to excessive amplitude, the insulating buffer layer limits the diaphragm's amplitude, preventing distortion. The insulating buffer layer also prevents contact between the diaphragm and the electrode plate and maintains an appropriate minimum distance, preventing destructive discharges caused by too close a distance between the diaphragm and the electrode plate. This prevents the appearance of high-voltage discharge noise and prevents the diaphragm from being damaged by high-voltage discharge.

Operating an electrostatic acoustic device simultaneously as a speaker and as a microphone. The electrostatic acoustic device includes a membrane and an electrode disposed proximate to the membrane. An input varying audio signal is input to the electrostatic acoustic device. The membrane is configured to respond mechanically to a varying electric field responsive to the varying audio signal input. A portion of the input varying audio signal is tapped to produce a reference signal. A signal is detected responsive to motion of the membrane, to convert the signal to an output varying voltage signal. The output varying voltage signal is compared to the reference signal to produce a microphone signal. The microphone signal is responsive to motion of the membrane induced by air pressure variations of ambient sound.

The invention relates to a microelectromechanical component (1) with a housing (2) and a displacer structure (3) arranged in the housing (2), wherein the displacer structure (3) has a coupling element (4) movable within the housing (2) and a plurality of displacer walls (5) extending parallel to each other and perpendicular to the coupling element (4), wherein the displacer walls (5) define laterally adjacent volume chambers (6), wherein a fluid can be conveyed into and displaced from the volume chambers (6) by a relative movement between each pair of adjacent displacer walls (5), wherein at least one first displacer wall (5, 5') is mechanically connected to the movable coupling element (4) and is movable together with the coupling element (4), and wherein the at least one first displacer wall (5, 5') movable together with the coupling element (4) mechanically connected to the housing (2).The invention further relates to a microelectromechanical loudspeaker (12) with such a microelectromechanical component (1).

A microelectromechanical device for interaction with a fluid. A displacer structure, wherein the displacer structure is arranged in a cavity, wherein the displacer structure comprises a movable lamella that is deflectable for interaction with a fluid pressure in a pressure region of a cavity, wherein the lamella has at least one edge region, wherein the edge region of the lamella is movable along at least one boundary surface of the cavity when the lamella is deflected, wherein a flow channel is formed between the boundary surface and the edge region, wherein fluid can flow out of the pressure region via the flow channel, wherein the edge region and / or the boundary surface comprise means that make it more difficult for fluid to flow out of the pressure region via the flow channel.

The invention discloses a piezoelectric MEMS loudspeaker based on a folding ring between movable and fixed parts and application thereof, and belongs to the technical field of loudspeakers, the piezoelectric MEMS loudspeaker comprises a piezoelectric actuating assembly, a fixed assembly and a folding ring; the piezoelectric actuating assembly comprises a piezoelectric actuating composite layer, the piezoelectric actuating composite layer at least comprises a piezoelectric material layer, and the piezoelectric actuating composite layer generates mechanical displacement by applying voltage to drive the piezoelectric actuating assembly to vibrate so as to generate sound pressure; the fixing component can be a single structural component or a component with a plurality of structural components; the fixing assembly can be used for fixedly supporting the fixed supporting part of the piezoelectric actuating assembly, so that the non-fixed supporting part of the piezoelectric actuating assembly can freely move or vibrate; according to the invention, through the innovative design based on the folding ring between the moving part and the fixed part, the low-frequency vibration displacement of the vibrating diaphragm is remarkably improved, the problem that the low-frequency sound pressure of a traditional piezoelectric MEMS loudspeaker is insufficient is effectively solved, and the vibrating diaphragm can push air with a larger volume in a low-frequency band, so that a fuller low-frequency sound effect is obtained.

The present invention relates to a microelectromechanical system (MEMS) (100) comprising a MEMS component (110) with a surface (120) and at least one contact column (1) having a top surface (2) on the surface (120), wherein the top surface (2) comprises a conductive material (4) and is designed and configured to supply the MEMS component (110) with a supply and / or signal voltage (130). The invention further relates to a method for manufacturing such a MEMS (100) with at least one contact column (1) and to the use of the MEMS (100) according to the invention in systems for interacting with fluids.

A display device in which a front electrode serving as a diaphragm in a condenser-type microphone module is disposed on one surface of a display panel, and a rear electrode is disposed under a frame, so that a change in capacitance between the front electrode and the rear electrode caused by the vibration of the front electrode is sensed with high sensitivity. Accordingly, the condenser-type high-sensitivity microphone can be integrated into the display device.

In an example, the present invention provides a micro-speaker device. The device has a movable diaphragm device comprising a thickness of silicon or graphene material which has a first surface and a second surface opposite of the first surface and sensor to track position of the diaphragm. The device has a housing enclosing the movable diaphragm device, the electrode device and an encapsulation device. The electrode device can be part of a CMOS device with electronics integrated on to the device that converts input audio signal in to signal that electrostatically actuates the micro-speaker from one or more surfaces.

The embodiment of the invention discloses an MEMS loudspeaker and a preparation method thereof. The MEMS loudspeaker comprises a vibrating diaphragm layer and a supporting structure layer which are stacked in the thickness direction, the vibrating diaphragm layer comprises a vibrating diaphragm area; the vibrating diaphragm layer of the vibrating diaphragm area comprises a plurality of piezoelectric film layers which are stacked in the thickness direction; the diaphragm area comprises a separation slit; the supporting structure layer comprises a cavity, and the vibrating diaphragm area is located in the projection area range of the cavity in the thickness direction. According to the embodiment of the invention, the driving efficiency is improved through the multi-layer piezoelectric film layer structure, and the working stress distribution is optimized through the separation slits, so that the emission performance and the signal consistency of the device are jointly improved.

The invention preferably relates to a process for producing a MEMS transducer comprising a membrane and a carrier, wherein the membrane has a meandering structure comprising vertical and horizontal sections. This comprises initially providing a shaping component which is coated with a membrane layer system. The membrane layer system comprises at least one actuator ply comprising an actuator material. Structuring the membrane layer system provides membranes that may be attached to a carrier. The shaping component can be completely removed. The invention preferably further relates to a MEMS transducer producible by the process.

A piezoelectric MEMS loudspeaker. The application discloses a MEMS structure, comprising: a substrate comprising an inner ring body and an outer ring body connected by a connecting rod, having a first cavity between the inner ring body and the outer ring body, and having a second cavity in the inner ring body; a piezoelectric composite vibration layer formed above the substrate, comprising an edge portion formed above the outer ring body and a center portion formed above the inner ring body, having a partition gap between the edge portion and the center portion. In summary, the piezoelectric MEMS loudspeaker provided by the application comprises an edge portion and a center portion, wherein the edge portion is used to generate a high-frequency sound pressure level, and the center portion is used to generate a low-frequency sound pressure level. The combination of the edge portion and the center portion makes the piezoelectric MEMS loudspeaker have a relatively flat sound pressure level frequency response curve with a wider range, thereby improving the auditory effect in the entire frequency band.

The utility model discloses an MEMS loudspeaker with a low-pressure sealing back cavity, the MEMS loudspeaker comprises a support substrate and a diaphragm, and the support substrate is provided with a cavity; the vibrating diaphragm covers the supporting substrate in a sealing mode so that a cavity formed in the supporting substrate can form a low-pressure sealing cavity, the low-pressure sealing cavity has the pressure intensity lower than the standard atmospheric pressure, and an electrically-driven electrode and / or a functional material are / is arranged on the vibrating diaphragm. According to the MEMS loudspeaker with the low-pressure sealing back cavity, the low-pressure sealing cavity is constructed after the vibrating diaphragm covers the cavity on the supporting substrate in a sealing manner, and the pressure in the low-pressure sealing cavity is reduced to be lower than the atmospheric pressure, so that the influence of air damping on the movement of the vibrating diaphragm of the loudspeaker is reduced, and the reliability of the loudspeaker is improved. The reduction of the air damping means that the diaphragm can vibrate more freely, the response speed is higher, the distortion is lower, and the performance in a high frequency band is more excellent, compared with a traditional scheme, an additional back cavity is not needed, and the overall size of the loudspeaker is reduced.

MEMS apparatus (10) having a movable displacement element (12) and a drive device (14) for driving the movable displacement element (12), the drive device (14) having at least one drive electrode (16), characterized in that the drive electrode (16) is segmented and at least one functional electrode (18) is provided for measuring the deflection of the displacement element (12).

Provided is a curable organopolysiloxane composition that yields an organopolysiloxane cured product having viscoelastic properties (particularly, reversion characteristics after deformation due to external stress) that are particularly suitable for use as a dielectric layer or a transducer, and a method of use thereof. A curable organopolysiloxane composition for transducers, contains: (a) a chain organopolysiloxane or mixture thereof having a weight-average molecular weight (Mw(a)) of less than 8.0×104; (b1) a crosslinking agent; (b2) a chain length extender; and (c) a hydrosilylation reaction catalyst. The molar quantity of Si—H (Hb1, Hb2) in component (b1) and component (b2) and the molar quantity of curable reactive groups (Vi) in component (a), satisfy the following relationship: px1={Hb1 / Hb2} / {(Hb1+Hb2) / Vi}; where the value obtained by dividing Mw(a) by the value of px1, i.e., Mw(a) / px1, is in a range of 1,000 to 8,000.

The application discloses a MEMS loudspeaker device, system and preparation method driven by electrostatic and piezoelectric mixed driving, relates to the technical field of loudspeakers, and aims at solving the problems of high driving voltage, easy occurrence of suction effect and insufficient low-frequency response caused by single electrostatic driving mode of the prior art, and the problem of poor high-frequency response caused by single piezoelectric driving. The MEMS loudspeaker device comprises, from bottom to top, a substrate, an electrostatic driving unit formed on the substrate, at least a fixed electrode and a movable diaphragm of the electrostatic driving unit, and a piezoelectric driving unit integrated on the movable diaphragm. The piezoelectric driving unit receives a preset direct-current bias voltage of a preset size to control the movable diaphragm to generate a preset static displacement in the direction of the fixed electrode, and the piezoelectric driving unit processes middle-low frequency signals in input wide-band audio signals; the electrostatic driving unit processes high frequency signals in the wide-band audio signals. The application is used for improving loudspeaker quality of the loudspeaker and reducing power consumption.

A distortion of a sound wave caused by an unbalanced vibration of a diaphragm can be suppressed in an electrostatic electroacoustic transducer. The present invention is a signal processing circuit 12 for an electrostatic electroacoustic transducer configured to correct signals input to a single driven electrostatic electroacoustic transducer 15 including a diaphragm 151 and a fixed electrode 152 disposed to face the diaphragm. The signal processing circuit includes a correction value determiner 122 configured to determine a correction value v1 of a level based on a level of the input signals s1 from the sound source, and a level corrector 124 configured to correct the level of the input signals based on the correction value. The level corrector is configured to correct the level of an input signal among the input signals based on the correction value. The input signal corresponds to a signal for displacing the diaphragm to a first direction side on which a fixed electrode is not disposed with respect to a predetermined position.

Aspects of the present disclosure relate to an electrostatic speaker system (225), a vehicle audio system (200) including the electrostatic speaker system (225), and a vehicle (300) including the vehicle audio system (200). An electrostatic speaker system (225) includes a voltage conversion module (245) and an electrostatic transducer (230). The voltage conversion module (245) is configured to: receive a low voltage "speaker level" signal (220) from a vehicle audio source (205); and converts the received low voltage loudspeaker level signal (220) into a high voltage audio signal (220a). The electrostatic transducer (230) is configured to receive a high voltage audio signal (from the voltage conversion module) and to convert the high voltage audio signal (220a) into sound waves for output by the electrostatic speaker system (225). The voltage conversion module (245) comprises at least one audio transformer (250) configured to boost a voltage of the low voltage loudspeaker level signal (220) to a predefined voltage level for the high voltage audio signal (220a).

One or more embodiments of this specification relate to a vibration assembly comprising: a mass element; an elastic element including a reinforcing region and a first pre-processed region; wherein the reinforcing region is used to support the mass element, and the first pre-processed region provides the mass element with a first displacement along the vibration direction of the mass element.

An MEMS having a layered structure includes a cavity disposed in the layered structure and fluidically coupled to an external environment of the layered structure through at least one opening in the layered structure. The MEMS includes an interaction structure movably disposed in a first MEMS plane and in the cavity along a plane direction and configured to interact with a fluid in the cavity, wherein movement of the interaction structure is causally related to movement of the fluid through the at least one opening. The MEMS further includes an active structure disposed in a second MEMS perpendicular to the plane direction, the active structure mechanically coupled to the insulation structure and configured such that an electrical signal at an electrical contact of the active structure is causally related to a deformation of the active structure, wherein the deformation of the active structure is causally related to movement of the fluid.

Provided is a flexible electrostatic electroacoustic transducer having a pair of opposing conductive layers and a dielectric layer arranged between the pair of opposing conductive layers. The electrostatic electroacoustic transducer further includes a flexible buffer layer arranged on a surface of one or both of the pair of opposing conductive layers opposite from the dielectric layer, and a flexible sealing layer arranged on the surface of the buffer layer opposite from the conductive layer.

In an example, the present invention provides a micro-speaker device. The device has a movable diaphragm device comprising a thickness of silicon or graphene material which has a first surface and a second surface opposite of the first surface. The device has a housing enclosing the movable diaphragm device, the electrode device and an encapsulation device. The electrode device can be part of a CMOS device with electronics integrated on to the device. The device has a vented enclosure opposite of the movable diaphragm to allow air to move in and out of the one or more vent openings to generate a sound pressure signal. The diaphragm can be electrostatically actuated from one or more surfaces that include the electrode device and the encapsulation device.