Micro-electromechanical system (MEMS) triaxial accelerometer and manufacturing method thereof

An axial acceleration and acceleration technology, which is applied in multi-dimensional acceleration measurement, acceleration measurement using inertial force, and fabrication of microstructure devices, etc. The problem of large error, etc., can solve the problem of poor verticality of the three-axis angle, improve the detection sensitivity, and reduce the thermo-mechanical noise.
CN102798734AActive Publication Date: 2012-11-28SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
Publication Date
2012-11-28

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Abstract

The invention provides a micro-electromechanical system (MEMS) triaxial accelerometer and a manufacturing method thereof. The MEMS triaxial accelerometer comprises a sensitive device layer, an upper cover board layer and a lower supporting body layer, wherein clearances are reserved between the sensitive device layer and the upper cover board layer as well as between the sensitive device layer and the lower supporting body layer; the sensitive device layer comprises a supporting frame body, an elastic beam, three independent sensitive mass blocks, movable comb teeth, fixed comb teeth and an electrode; the three independent sensitive mass blocks in the sensitive device layer are used for detecting acceleration signals of three axes X, Y and Z respectively; an acceleration sensor in each direction is hung in the supporting frame body through the corresponding sensitive mass block by the elastic beam which is only sensitive to the detection direction; a plurality of pairs of movable comb teeth are formed on each sensitive mass block by using a body silicon processing technology; a plurality of pairs of fixed comb teeth are correspondingly formed on the supporting frame body to form a pair of differential capacitors serving as sensitive capacitors; and the differential comb tooth capacitors in different directions generate a differential capacitance change in response to the acceleration signals in the corresponding directions.
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Description

technical field

[0001] The present invention relates to the field of sensing technology and microelectronic machinery (MEMS) technology. Specifically, the present invention relates to a comb-teeth MEMS three-axis accelerometer, and more specifically to a single-chip variable-area three-axis comb-teeth accelerometer. Sensors and methods of making them. Background technique

[0002] Accelerometer is a kind of inertial device, which is widely used in various fields such as automobile, medical treatment, consumer electronics and industry. The three-axis accelerometer after the introduction of MEMS technology has the advantages of small size, light weight, low cross-sensitivity, and mass production. MEMS accelerometers play a huge role in our production and life. At present, they are mainly used in motion perception, action recognition, attitude control, vibration detection, security alarm, etc. Based on accelerometers, more detection functions can be realized and more for a wi...

Claims

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