Semi-frequency driving and loop closing method for micro mechanic sensor
A technology of micro-mechanical sensors and closed-loop methods, applied in the direction of generators/motors, electrostatic generators/motors, electrical components, etc., can solve the problems of increased plate noise, affecting device accuracy, and large noise force, and achieve improved drive Accuracy, noise reduction, and the effect of eliminating electrical coupling
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[0025] The principle and specific implementation of the present invention will be described in detail below in conjunction with the accompanying drawings.
[0026] The principle of the technical solution of the present invention is that a pair of AC voltages with a difference of 90° and no DC bias are applied to the left and right stators of the differential comb drive, and the frequency thereof is the driving force required by the differential comb drive half of the frequency, due to the square relationship between the driving voltage and the driving force, a driving force with a DC component and a frequency multiplied AC component will be generated on the driving plate. At this time, using the principle of differential drive, two differential drive poles The DC components on the board are cancelled, and the remaining AC components are synthesized into the driving force of the required frequency due to the opposite sign, which can drive the mover to vibrate at the frequency of...
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