Semi-frequency driving and loop closing method for micro mechanic sensor

A technology of micro-mechanical sensors and closed-loop methods, applied in the direction of generators/motors, electrostatic generators/motors, electrical components, etc., can solve the problems of increased plate noise, affecting device accuracy, and large noise force, and achieve improved drive Accuracy, noise reduction, and the effect of eliminating electrical coupling

Inactive Publication Date: 2004-04-21
TSINGHUA UNIV
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Problems solved by technology

[0002] At present, the electrostatic actuator commonly used in the field of micromechanics is composed of two parts: the moving plate and the differential drive plate. The drive structure mainly includes two types: parallel plate structure and comb structure. The driving voltage formed by the superposition of DC bias and AC voltage, the driving force generated by this method has the same frequency as the AC component in the driving voltage, so the same frequency component in the driving voltage will be coupled into the detection circuit through space capacitance; On the one hand, when the driving frequency is not too high, the 1 / f noise in the driving voltage will directly act on the driving plate to generate a large noise force, which will increase the vibration noise of the plate and deteriorate the driving effect, especially When the electrostatic differential drive method is used to realize the force balance closed loop, the noise effect on the driving force will directly affect the force balance effect, thereby directly affecting the accuracy of the device

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  • Semi-frequency driving and loop closing method for micro mechanic sensor
  • Semi-frequency driving and loop closing method for micro mechanic sensor
  • Semi-frequency driving and loop closing method for micro mechanic sensor

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[0025] The principle and specific implementation of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0026] The principle of the technical solution of the present invention is that a pair of AC voltages with a difference of 90° and no DC bias are applied to the left and right stators of the differential comb drive, and the frequency thereof is the driving force required by the differential comb drive half of the frequency, due to the square relationship between the driving voltage and the driving force, a driving force with a DC component and a frequency multiplied AC component will be generated on the driving plate. At this time, using the principle of differential drive, two differential drive poles The DC components on the board are cancelled, and the remaining AC components are synthesized into the driving force of the required frequency due to the opposite sign, which can drive the mover to vibrate at the frequency of...

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Abstract

The half-band driving and closed loop method for micro mechanism sensor. For overcoming the effects of electrical coupling and 1 / f noise, this invention opens the half-band driving method for micro mechanism sensor, the feature is: at the two drive pole of static differential diver, adds two way pure alternating voltage to dive it, and the above statement two way voltage have 90íÒdiscrepancy, its frequency is the half of the mover vibration frequency. This method can eliminate the electrical coupling from the driving voltage to the sensor, can reduce effects of 1 / f noise introduce from driving voltage, and for this method utilizes approximate way in small scale to eliminate the effects of non-linear from voltage to electrical static force, implements closed loop control.

Description

technical field [0001] The invention relates to a drive for an electrostatic micro-mechanical differential driver and a closed-loop method thereof, belonging to the technical field of control of micro-mechanical sensors. Background technique [0002] At present, the electrostatic actuator commonly used in the field of micromechanics is composed of two parts: the moving plate and the differential drive plate. The drive structure mainly includes two types: parallel plate structure and comb structure. The driving voltage formed by the superposition of DC bias and AC voltage, the driving force generated by this method has the same frequency as the AC component in the driving voltage, so the same frequency component in the driving voltage will be coupled into the detection circuit through space capacitance; On the one hand, when the driving frequency is not too high, the 1 / f noise in the driving voltage will directly act on the driving plate to generate a large noise force, which...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H02N1/00
Inventor 周斌高钟毓张嵘陈志勇
Owner TSINGHUA UNIV
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