Motion control method and device for stick-slip inertial piezoelectric actuator
A piezoelectric driver, stick-slip technology, applied in piezoelectric effect/electrostrictive or magnetostrictive motors, generators/motors, electrical components, etc. The effect of improving drive accuracy
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[0046] The specific implementation manners of the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.
[0047] figure 1 It is a schematic structural diagram of a motion control system of a stick-slip inertial piezoelectric driver provided by an embodiment of the present application. The system includes a stick-slip inertial drive platform 110, which includes a stick-slip inertial piezoelectric driver 111 and a moving block 112 driven by the stick-slip inertial piezoelectric driver 111; A signal generating device 120 connected to the piezoelectric driver 110 ; a displacement sensor 113 provided on the moving block 112 ; and a host computer 130 connected to the displacement sensor 113 .
[0048] The signal generating device 120 is used for sending a driving signal to the sti...
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