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High-load micro-mechanism dynamic characteristic testing apparatus

A technology for dynamic characteristics and testing devices, which is applied in measurement devices, testing/calibration of speed/acceleration/shock measuring equipment, speed/acceleration/shock measurement, etc., and can solve problems such as high working environment requirements and dynamic performance of difficult-to-micro components , to achieve the effect of strong environmental adaptability and high test accuracy

Inactive Publication Date: 2005-12-21
DALIAN UNIV OF TECH
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Problems solved by technology

[0003] The purpose of the present invention is to overcome the shortcomings that the existing MEMS dynamic testing system can only test the dynamic performance of micro-components under normal conditions, the requirements for the working environment are high, and it is difficult to test the dynamic performance of micro-components under high-load conditions. Device for dynamic performance testing under load conditions

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  • High-load micro-mechanism dynamic characteristic testing apparatus

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Embodiment Construction

[0009] The specific implementation of the present invention is described in detail in conjunction with the accompanying drawings. The present invention is a high-load micro-component dynamic characteristic testing device. Under the action of external inertial load, the natural frequency of a typical micro-component—micro-cantilever beam changes, thereby affecting the micro-component. Dynamic properties of components. In order to test the change of the dynamic characteristics of the micro-components in the micro-mechanical accelerometer under high-load conditions, the high-speed turntable 1 is rotated, and the inertial centrifugal force is generated during the rotation to form a high-g acceleration environment. The micro-component 6 is installed on the rotating arm of the high-speed turntable In the above, different centripetal accelerations are generated by adjusting the rotation speed of the high-speed turntable 1 to simulate various acceleration environments with high g value...

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Abstract

A device for testing dynamical property of high load microcomponent is composed of high speed rotary table , microcomponent driving and clamping , test device of optical vibration and optical fibre rotary connector . It features setting rotary arm at one end of said table and making another end be shaft shape , setting vacuum chamber on rotary arm of said table and optical rotary connector in said shaft sleeve and setting foam for isolating vibration , anti-shock mass , piezoelectric activator , micro-component , optical fibre probe and its clamp device in vacuum chamber.

Description

technical field [0001] The invention relates to a high-load micro-component dynamic characteristic testing device, which belongs to the field of dynamic testing devices in micro-electromechanical systems. Background technique [0002] Micro Electro Mechanical System (MEMS for short) often uses micro-machined accelerometers manufactured by micro-processing technology. This micro-machined accelerometer is widely used in the aerospace field, automotive airbags, and precise control of missiles and intelligent shells. , and its measurement range is from a few micrograms to hundreds of thousands of grams. High g value (g is the unit of gravity acceleration) micromachined accelerometers usually work in the environment of thousands of g or even tens of thousands of g. Under such high load working conditions, the sensitivity of the micromachined accelerometer has a crucial impact on the equipment used , and theoretical analysis shows that the dynamic characteristics of the micro-ine...

Claims

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Application Information

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IPC IPC(8): G01P21/00
Inventor 王晓东王涛王立鼎尹东
Owner DALIAN UNIV OF TECH
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