Permanent magnet low frequency single-degree-of-freedom vibration isolation mechanism based on negative stiffness theory

Abstract

The invention discloses an annular permanent magnet low frequency vibration isolation mechanism based on a negative stiffness theory. The mechanism comprises an upper rubber sheet, an inner annular permanent magnet fixing mandrel, an upper rubber sheet upper pressing ring, an upper rubber sheet outer pressing ring, an outer annular permanent magnet, a lower rubber sheet, a lower rubber sheet inner pressing sheet, a lower rubber sheet outer pressing ring, an outer annular permanent magnet fixing sleeve and an inner annular permanent magnet, wherein the inner annular permanent magnet is magnetized axially; the outer annular permanent magnet is radially magnetized; a positive stiffness system consists of the inner annular permanent magnet and the outer annular permanent magnet; a negative stiffness system consists of the upper rubber sheet and the lower rubber sheet; and the positive stiffness system and the negative stiffness system are used in parallel to form the low frequency vibration isolation mechanism. Three or four single-degree-of-freedom vibration isolation mechanisms are used in parallel to realize three-degree-of-freedom low frequency vibration isolation. When the vibration isolation mechanism has the largest magnetic force, the stiffness of the vibration isolation mechanism approximates to zero. Without an outside air source, the vibration isolation mechanism has a prospect of being used in vacuum, has the characteristics of simple structure and low cost, is easy to process, and can be applied to the fields of optics, acoustics, biologics, semiconductor manufacturing, precise measurement and the like.

Description

technical field [0001] The invention relates to a low-frequency vibration isolation mechanism, in particular to a ring-shaped permanent magnet low-frequency vibration isolation mechanism based on the principle of negative stiffness, which is mainly used for ultra-low frequency of small and medium-sized instruments and equipment in the fields of optics, acoustics, semiconductor manufacturing, precision measurement and ultra-precision vibration isolation. Background technique [0002] In the field of ultra-precision, precision and ultra-precision machining have increasingly stringent environmental requirements, because vibration interference inside and outside mechanical equipment is one of the important factors that reduce machining accuracy and surface quality. The quality of ultra-precision machining is not only related to the amplitude of vibration interference, but also related to the frequency of vibration interference. The vibration frequency that has an adverse effect ...

AI Technical Summary

Problems solved by technology

Since Platus proposed the principle of negative stiffness, in recent years, various vibration isolators have been developed by applying the principle of negative stiffness at home and abroad. Although the vibration isolation performance has been improved, their bearing capacity is small, and the stiffness needs to be adjusted according to the load when used. tuning

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