This application relates to the field of
semiconductor memory device technology, and discloses a 3D memory device and its fabrication process. The 3D memory device includes a substrate, a multilayer stacked structure, a contact lead-out structure, a via, a
resistive switching functional layer, and a top
electrode. The multilayer stacked structure includes multiple alternating
layers of two-dimensional conductive material and multiple
layers of insulating
dielectric material arranged in a vertical direction. The two-dimensional conductive material
layers serve as interlayer contact electrodes or
memory cell electrodes. The via penetrates at least a portion of the multilayer stacked structure and exposes the edge regions of the two-dimensional conductive material layers. The
resistive switching functional layer is disposed on the inner wall and / or inside the via and contacts the edge regions of the two-dimensional conductive material layers. The top
electrode is electrically connected to the
resistive switching functional layer. This structure utilizes the two-dimensional conductive material layers to reduce the vertical thickness of the interlayer electrodes and forms multiple
resistive switching memory cells on the sidewalls of the vias, thereby increasing the storage density of the 3D memory device.