The application provides a forming method of a
conductive channel of a
resistive random access memory (RRAM), comprising the following steps: firstly, connecting a RRAM element to a drain of a
field effect transistor; and secondly, applying a forming
voltage to a gate, the drain and a source of the
field effect transistor until a
conductive channel of the RRAM element is formed, wherein the forming
voltage of the gate and the drain is a
pulse voltage with opposite peak variation trends, the forming
voltage of the source is constant, and the
field effect transistor works in a saturation region. The application also provides a RRAM unit and a RRAM for implementing the forming method of the
conductive channel of the RRAM, comprising a RRAM element and a
field effect transistor, and the RRAM element is connected to the drain of the
field effect transistor. By using the special pulse form of the
gate voltage and the drain voltage and the superimposed
current limiting resistor and other optimization means, the problems of uncontrollable current, excessive
electric field, large device damage, low yield and MOS transistor failure in the prior art can be solved.