The invention provides a
resistive random access memory and a manufacturing method thereof, and relates to the technical field of resistive
random access memories. The method comprises the following steps: firstly, providing a substrate structure which comprises a vertical through hole and an interlayer
dielectric layer above the through hole, then
etching the substrate structure, and forming an inverted trapezoidal groove in a vertical through hole area; depositing a lower
electrode based on the bottom of the inverted trapezoidal groove; sequentially depositing a resistive layer, a
barrier layer and an
oxygen exchange layer based on the surface of the lower
electrode, and depositing a
metal film; wherein the resistive layer, the
barrier layer, the
oxygen exchange layer and the
metal films are all located in the groove, and the thickness of the
metal film located at the bottom is larger than that of the metal film located on the side wall; performing high-temperature annealing to enable the metal film to form uniform
metal nanoparticles; and finally depositing an upper
electrode based on the surface of the
oxygen exchange layer. The method has the advantages that accurate induction of the
nucleation position of the
conductive filament is achieved, and the precision and reliability of the device are improved.