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31results about How to "Improve leakage performance" patented technology

High-temperature heat treatment device under magnetic field and method thereof for preparing bismuth ferrite film

The invention provides a high-temperature heat treatment device under a magnetic field and a method thereof for preparing a bismuth ferrite film. The device comprises a tube type heating furnace, wherein the tube type heating furnace is arranged between magnet pole heads of a direct current water-cooling magnet, the direct current water-cooling magnet is connected with a direct-current magnet power supply and a circulating water-cooling system, the heating cavity of the tube type heating furnace is communicated with a vacuumizing system and an atmosphere control system; the tube type heating furnace is also connected with a temperature controller; the water-cooling cavity is formed by adopting a double-layer nonmagnetic stainless steel material by the shell of the tube type heating furnace; heating bodies are connected in series by four silicon carbide rods; a high-temperature resistant aluminum oxide heat insulating fiber material is used as a heat insulating material; and a high-temperature aluminum oxide ceramic tube or a quartz glass tube is used as a furnace tube. The device has the characteristics of small volume, high magnetic field utilization ratio and heating efficiency,and the like, can be used for carrying out the synthesis and the heat treatment on materials below 2 Tesla of the magnetic field and under the condition of vacuum or atmosphere. The microstructure and the properties of the bismuth ferrite film prepared by the device are improved.
Owner:HEFEI INSTITUTES OF PHYSICAL SCIENCE - CHINESE ACAD OF SCI +1

Composite doped bismuth ferrite-barium titanate binary lead-free ferroelectric ceramic material, preparation method and application thereof

The invention discloses a composite doped bismuth ferrite-barium titanate binary lead-free ferroelectric ceramic material, a preparation method and application thereof, belongs to the field of lead-free ferroelectric ceramic materials, particularly relates to the composite doped bismuth ferrite-barium titanate binary lead-free ferroelectric ceramic material, the preparation method and applicationthereof, and aims to solve the problem that the BFO ceramic prepared by the conventional solid phase synthesis method has poor ferroelectric performance and serious electric leakage. The chemical general formula of the ceramic material is (1-y)BiFeO<3-y>Ba<1-x>(Li<0.5><+>A<0.5><3+>)<x>TiO3. The ceramic material is obtained by adopting a sintering manner combining SPS rapid low-temperature sintering and solid phase synthesis, the system is a perovskite phase, and has no impurity phase, the prepared ceramic material has excellent electrical properties and relatively high Curie temperature, the preparation process of the material is stable, and the material has a relatively good application prospect. The prepared ceramic material is used as an electronic component in fields of temperature-stable capacitors and high-temperature applications.
Owner:HARBIN UNIV OF SCI & TECH

Transverse high-voltage bipolar junction transistor and manufacturing method thereof

The invention discloses a lateral high-voltage bipolar junction transistor and a manufacturing method thereof; comprising a P-type substrate, an N-type buried layer, a P-type buried layer, an N-type epitaxial layer, a P-type isolation penetration region, and an N-type penetration region , P-type body region, N-type heavily doped region, N-type heavily doped ring region, pre-oxidation layer, field oxygen layer, TEOS metal front dielectric layer, emitter metal, collector metal and base metal; the present invention is based on conventional On the basis of the transverse bipolar junction collective tube, an N-type annular injection is added between the collector and the emitter, and then by optimizing the layout of the first layer of metal, the metal is fully covered on the collector. beyond twice the junction depth of the collector region. Through simulation and actual tape-out results, it can be concluded that the horizontal high-voltage bipolar junction transistor of the present invention can increase BVcbo by more than 40%, increase BVceo by more than 30%, and increase the leakage capacity by an order of magnitude when other parameters have little influence. The invention provides a lateral high-voltage bipolar junction transistor.
Owner:CHONGQING ZHONGKE YUXIN ELECTRONICS

Silicon-controlled rectifier and manufacturing method thereof

The invention provides a silicon-controlled rectifier and a manufacturing method thereof. The silicon-controlled rectifier comprises a semiconductor substrate, a first N well, a P well, a second N well, first/second high-concentration P-type doping, first/second high-concentration N-type doping and third high-concentration P-type doping, wherein the first N well, the P well and the second N well are adjacent in sequence; the first/second high-concentration P-type doping and the first/second high-concentration N-type doping are located on the upper part of the first/second N well; the third high-concentration P-type doping is located at the upper part of the P well; a first/second grid electrode is arranged above the first/second N well between the first/second high-concentration N-type doping and the third high-concentration P-type doping; and the first/second high-concentration P-type doping, the first/second high-concentration N-type doping and the first/second grid electrode are connected to form a first/second device pole. Accordingly, the first/second device pole is connected with the input and output end of the positive/negative high voltage, PNPN channels without a conduction condition are formed, a bidirectional anti-static protection function suitable for the positive/negative high voltage at the same time is achieved in an applied circuit, and good electric leakage performance is achieved.
Owner:SHANGHAI HUALI MICROELECTRONICS CORP

Power device structure with ESD and preparation method thereof

The invention provides a power device structure with an ESD and a preparation method thereof. The device comprises an N-type substrate, an N-type epitaxial layer, a first groove, a second groove, a P-type body region, a P-type active region, an N-type active region, a dielectric layer and a metal electrode, wherein the first groove and the second groove are distributed in the N-type epitaxial layer at intervals, a gate oxide layer and polycrystalline silicon ESD are arranged in the first groove, and a P-type doped region is formed in the polycrystalline silicon ESD; a gate oxide layer and a polycrystalline silicon gate are arranged in the second groove; the P-type body region is located in the N-type epitaxial layer between the grooves; the dielectric layer covers the first groove, the second groove and the P-type body region; the hole leading-out region is positioned in the dielectric layer and is electrically contacted with a P-type doped region and a P-type active region of the polycrystalline silicon ESD and an N-type active region in a P-type body region between the first groove and the second groove; and the metal electrode is located on the dielectric layer. The area of the ESD structure can be effectively reduced, the process planarization is facilitated, the device preparation cost is reduced, and the ESD leakage performance is improved.
Owner:SHANGHAI NATLINEAR ELECTRONICS CO LTD +1

Method for improving surface roughness of shielding gate

The invention provides a method for improving the surface roughness of a shielding gate. The method comprises the steps of providing a substrate, and forming a graphical hard mask on the substrate; taking the graphical hard mask as a mask, and etching the substrate to form a first trench; forming a gate dielectric layer in the first trench, and obtaining a second trench; filling the second trenchwith polycrystalline silicon, and covering the gate dielectric layer and the residual hard mask; executing a grinding process, and stopping grinding on the surface of the hard mask to flatten the surface of the polycrystalline silicon; performing dry etching on the polycrystalline silicon for the first time, and removing the polycrystalline silicon above the second trench; and carrying out seconddry etching on the polycrystalline silicon subjected to the first dry etching to form a shielding gate, wherein the surface of the shielding gate is flat. The problem that the surface of the formed shielding gate is rough can be solved, so that a process window of a dielectric layer formed between the shielding gate and the control gate is increased, and the electric leakage performance between the control gate and the shielding gate is improved.
Owner:SHANGHAI HUAHONG GRACE SEMICON MFG CORP

High-temperature heat treatment device under magnetic field and method thereof for preparing bismuth ferrite film

The invention provides a high-temperature heat treatment device under a magnetic field and a method thereof for preparing a bismuth ferrite film. The device comprises a tube type heating furnace, wherein the tube type heating furnace is arranged between magnet pole heads of a direct current water-cooling magnet, the direct current water-cooling magnet is connected with a direct-current magnet power supply and a circulating water-cooling system, the heating cavity of the tube type heating furnace is communicated with a vacuumizing system and an atmosphere control system; the tube type heating furnace is also connected with a temperature controller; the water-cooling cavity is formed by adopting a double-layer nonmagnetic stainless steel material by the shell of the tube type heating furnace; heating bodies are connected in series by four silicon carbide rods; a high-temperature resistant aluminum oxide heat insulating fiber material is used as a heat insulating material; and a high-temperature aluminum oxide ceramic tube or a quartz glass tube is used as a furnace tube. The device has the characteristics of small volume, high magnetic field utilization ratio and heating efficiency,and the like, can be used for carrying out the synthesis and the heat treatment on materials below 2 Tesla of the magnetic field and under the condition of vacuum or atmosphere. The microstructure and the properties of the bismuth ferrite film prepared by the device are improved.
Owner:HEFEI INSTITUTES OF PHYSICAL SCIENCE - CHINESE ACAD OF SCI +1

Power device structure with esd and preparation method thereof

The invention provides a power device structure with ESD and a preparation method thereof. The device includes an N-type substrate, an N-type epitaxial layer, a first groove, a second groove, a P-type body region, a P-type active region, an N-type active region, a dielectric layer and a metal electrode, the first groove and the The second trenches are distributed at intervals in the N-type epitaxial layer. The first trench includes a gate oxide layer and a polysilicon ESD, and a P-type doped region is formed in the polysilicon ESD; the second trench includes a gate oxide layer and a polysilicon gate. The P-type body region is located in the N-type epitaxial layer between the trenches; the dielectric layer covers the first trench, the second trench and the P-type body region; the hole lead-out region is located in the dielectric layer and is connected to the polysilicon ESD The P-type doping region, the P-type active region, and the N-type active region in the P-type body region between the first trench and the second trench are in electrical contact; the metal electrode is located on the dielectric layer. The invention can effectively reduce the area of ​​the ESD structure, is beneficial to process planarization and reduces device manufacturing cost, and helps to improve ESD leakage performance.
Owner:SHANGHAI NATLINEAR ELECTRONICS CO LTD +1

Manufacturing method of array substrate, array substrate and display device

The invention provides a manufacturing method of an array substrate, an array substrate and a display device. The manufacturing method of the array substrate includes the step of arranging a grid metal layer on the substrate and the step of arranging a source drain metal layer on the substrate, the grid metal layer comprises a grid electrode of a thin film transistor and a first pole plate of a storage capacitor, and the source drain metal layer comprises a source electrode and a drain electrode of the thin film transistor and a second pole plate of the storage capacitor; between the step of arranging the grid metal layer and the step of arranging the source drain metal layer, the manufacturing method of the array substrate further includes the steps that at least one non-channel contact interface grid insulating layer is arranged on the substrate, the part, corresponding to the grid electrode and / or the first pole plate, of the non-channel contact interface grid insulating layer is graphed and wholly or partially thinned; a channel contact interface grid insulating layer which is not graphed is arranged on the substrate, and a channel layer of the thin film transistor is arranged on the channel contact interface grid insulating layer. The electrical properties and the storage capacitance of the thin film transistor are improved, and stray capacitance is reduced.
Owner:BOE TECH GRP CO LTD

Transverse high-voltage power bipolar junction transistor and manufacturing method thereof

The invention discloses a lateral high-voltage power bipolar junction transistor and a manufacturing method thereof; specifically, on the basis of a conventional lateral power bipolar junction collective transistor, a N-type annular implantation, and by optimizing the layout of all metals in the first layer, the first metal layer of the collector is completely covered on the collector area, and the size exceeds twice the junction depth of the collector area, while the emitter metal passes through hole and the second metal lead out. Theoretical analysis When the device is in the reverse withstand voltage working state, the edge of the collector junction is covered by the metal field plate, so that the curvature effect of the edge surface junction is greatly reduced when the depletion region diffuses, and the withstand voltage increases sharply, while the N-ring Adding can greatly reduce the leakage current between the collector and emitter of the device. Through the simulation and actual tape-out results, it can be concluded that the horizontal high-voltage power bipolar junction transistor of the present invention can increase BVcbo by more than 40%, BVceo by more than 40%, and the leakage capacity by an order of magnitude under the condition that other parameters have little influence.
Owner:CHONGQING ZHONGKE YUXIN ELECTRONICS
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