The utility model discloses an on-line closed sampling device for a High-K precursor material, which relates to the technical field of
semiconductor materials, and comprises a main sampling pipeline, and further comprises a main sampling pipeline, a sampling
bottle, a material collecting device, a material collecting device and a material collecting device, the
nitrogen pipeline is connected with the main sampling pipeline through a
nitrogen branch pipe; the vacuum pipeline is connected with the main sampling pipeline through a vacuum
branch pipe; the plurality of valves are sequentially arranged according to numbers and are configured to realize vacuumizing,
nitrogen replacement, material filling and sampling operations through the switch combination; according to the device disclosed by the utility model, a negative pressure sampling mode is combined with nitrogen replacement, so that air and
moisture in a sampling container and a pipeline can be quickly removed before sampling, a sampling environment is ensured to meet the water-free and
oxygen-free requirements, and a high-K precursor material is effectively prevented from going bad or causing safety accidents due to contact with the
moisture and
oxygen in the air.