Electrochemical machining process for array micro type hole

An electrochemical machining and micro-electrode technology, applied in electrochemical machining equipment, electric machining equipment, machining electrodes, etc., can solve the problem of poor shape accuracy and surface finish of laser machining, unsuitable for batch production of array micro-holes, EDM machining Low efficiency and other problems, to achieve the effect of good shape consistency, reduced stray corrosion effect, and low cost

Inactive Publication Date: 2005-11-23
TSINGHUA UNIV
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  • Abstract
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  • Application Information

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Problems solved by technology

[0003] The use of precision machining technology to manufacture arrays of micro-sized holes has disadvantages such as difficulty in guaranteeing machining accuracy, low machining efficiency, and difficult machining of complex shapes.
In special processing, electron beam and ion beam processing need to be carried out under vacuum conditions, the processing equipment is expensive, and there are limitations in practical application; the shape accuracy and surface finish of laser processing are usually poor; the processing efficiency of EDM is low , and the processing accuracy is affected by ele

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  • Electrochemical machining process for array micro type hole
  • Electrochemical machining process for array micro type hole
  • Electrochemical machining process for array micro type hole

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Embodiment Construction

[0034] The present invention provides an electrochemical machining process for array micro-holes based on a micro-electrochemical process such as figure 1 or figure 2 shown. Firstly, the micro-array electrode 1 is designed and manufactured, and then the workpiece 2 is electrolytically processed by the micro-array electrode 1 to obtain the required micro-array hole.

[0035] The following examples are provided in conjunction with the summary of the present invention.

[0036] 1. Electrochemical processing of micro-holes with small aspect ratio arrays, such as figure 1 shown.

[0037] According to the shape and size of the required array micro-holes, the array micro-electrodes 1 are designed and manufactured; the gaps of the electrodes are filled with insulating gel, and the end faces are ground flat. Then, the workpiece 2 is electrolytically etched using the electrode array.

[0038] There are two methods for preparing the array micro-electrodes used in the electrochemica...

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Abstract

This invention discloses an electrochemical process method for processing array micropore of metal alloy material, combining photolithagraphic process, electric casting technique and precise electrospark wire-electrode cutting technique, which comprises the following steps: a) applying wire-electrode cutting or photolithographic electric casting technology to make array micropore; b) electrochemical expelling machining the metal alloy material; when processing array micropore with small form ratio, the space between said array micropore is filled with insulation paste; when processing micropore with big form ratio, there is no insulation paste filled, but the electrode side wall is covered with insulating film. The insulation process decreases the disadvantage of stray electric field in electrochemical machining.

Description

technical field [0001] The invention belongs to the field of micro-machining, and in particular relates to an electrochemical machining process for array micro-holes of metal alloy materials with electrolytic machining as the core, cross-integrated technologies such as photolithography, precision electric discharge wire cutting machining and electroforming technology. Background technique [0002] Array micro-holes of metal alloy materials have a wide range of applications in many fields. For example, printer inkjet hole array, screen structure, spinneret and MEMS (micro electromechanical system) micro-jet, micro-pump and other fine structures. At present, the processing methods of array micro-holes involve precision machining, special processing and micro-processing. [0003] The use of precision machining technology to manufacture arrays of micro-sized holes has disadvantages such as difficulty in guaranteeing machining accuracy, low machining efficiency, and difficulty i...

Claims

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Application Information

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IPC IPC(8): B23H3/00
Inventor 李勇龚姗姗陈旭鹏彭良强
Owner TSINGHUA UNIV
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