Electrochemical machining process for array micro type hole

Abstract

This invention discloses an electrochemical process method for processing array micropore of metal alloy material, combining photolithagraphic process, electric casting technique and precise electrospark wire-electrode cutting technique, which comprises the following steps: a) applying wire-electrode cutting or photolithographic electric casting technology to make array micropore; b) electrochemical expelling machining the metal alloy material; when processing array micropore with small form ratio, the space between said array micropore is filled with insulation paste; when processing micropore with big form ratio, there is no insulation paste filled, but the electrode side wall is covered with insulating film. The insulation process decreases the disadvantage of stray electric field in electrochemical machining.

Description

technical field [0001] The invention belongs to the field of micro-machining, and in particular relates to an electrochemical machining process for array micro-holes of metal alloy materials with electrolytic machining as the core, cross-integrated technologies such as photolithography, precision electric discharge wire cutting machining and electroforming technology. Background technique [0002] Array micro-holes of metal alloy materials have a wide range of applications in many fields. For example, printer inkjet hole array, screen structure, spinneret and MEMS (micro electromechanical system) micro-jet, micro-pump and other fine structures. At present, the processing methods of array micro-holes involve precision machining, special processing and micro-processing. [0003] The use of precision machining technology to manufacture arrays of micro-sized holes has disadvantages such as difficulty in guaranteeing machining accuracy, low machining efficiency, and difficulty i...

AI Technical Summary

Problems solved by technology

[0003] The use of precision machining technology to manufacture arrays of micro-sized holes has disadvantages such as difficulty in guaranteeing machining accuracy, low machining efficiency, and difficult machining of complex shapes.

In special processing, electron beam and ion beam processing need to be carried out under vacuum conditions, the processing equipment is expensive, and there are limitations in practical application; the shape accuracy and surface finish of laser processing are usually poor; the processing efficiency of EDM is low , and the processing accuracy is affected by electrode loss, which is not suitable for batch production of micro-hole arrays; electrochemical machining has the possibility of achieving precision and micro-processing in terms of processing mechanism, but the traditional electrochemical processing technology includes photolithography and electrolytic processing. , due to the divergence of the electric field and the stray corrosion of the electrode sidewall, etc., the dimensional accuracy is not easy to control precisely during the electrolytic etching process, and the key process problems to be solved in the application of microfabrication

Images