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Device and method for manufacturing large-length-diameter-ratio nanoscale shafts

A technology for preparing devices with a large aspect ratio, which is applied in the direction of manufacturing tools, metal processing equipment, electrochemical processing equipment, etc., and can solve the problems of limited repeatability, inability to prepare nanoscale shafts with large aspect ratio, and high price of platinum wire

Inactive Publication Date: 2013-08-21
NANJING UNIV OF AERONAUTICS & ASTRONAUTICS
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The existing method uses relatively simple equipment, which can only process nano-scale needle tips (points), and cannot prepare nano-scale shafts with large aspect ratios.
In addition, the price of platinum wire used in the cathode ring is relatively high, which is not conducive to cost reduction
At present, the research on the method of electrochemical etching of liquid film is still in its infancy, and there is still a lack of systematic research and devices and fixtures specifically for this process, which limits the repeatability of this process and further research on its laws. Research

Method used

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  • Device and method for manufacturing large-length-diameter-ratio nanoscale shafts
  • Device and method for manufacturing large-length-diameter-ratio nanoscale shafts
  • Device and method for manufacturing large-length-diameter-ratio nanoscale shafts

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Embodiment Construction

[0019] according to figure 1 As shown, the nano-scale slender axis liquid film method electrochemical etching processing device of the present invention, such as figure 1 As shown, the device includes an active vibration isolation platform 13, an X-Y axis moving platform 1, a Z axis precision displacement platform 2, a computer 14, a PCI motion control card 5, a rotating main shaft 3, an electric device 6, a positioning part 8, and a DC power supply 15 , cathode horizontal ring 7. It is characterized in that the process described above, the anode tungsten wire clamped on the rotating spindle 3 obtains the required linear reciprocating motion in the Z-axis direction through the Z-axis linear precision moving platform 2 . The cathode horizontal circular ring 7 is fixed in the positioning member 8 through the cathode clamp 11 and the cathode clamp fixing screw 10, so as to ensure that the circular surface is in the horizontal direction. It should be noted that before the ring i...

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Abstract

The invention relates to a device and method for manufacturing large-length-diameter-ratio nanoscale shafts and belongs to the field of precise micro electrochemical machining. The device comprises a locating piece (8) installed on an X-Y-axis mobile platform (1), a cathode fixture (11) fixed on the locating piece (8), and a cathode horizontal ring (7) clamped by the cathode fixture (11), and further comprises a rotary main shaft fixture (4) installed on a Z-axis precise displacement platform (2), an electricity leading device (6) fixed on the rotary main shaft fixture (4), and a rotary main shaft (3) fixed on the rotary main shaft fixture (4). The positive electrode and the negative electrode of a power supply (15) are connected with the electricity leading device (6) and the cathode fixture (11) respectively. With the method and device, the nanoscale thin and long shafts with large length-diameter ratios can be machined, and the method and device has the advantages of being strong in repeatability, high in success rate, low in cost and the like.

Description

technical field [0001] The invention relates to a device and method for preparing a nanoscale shaft with a large length-to-diameter ratio, belonging to the field of precision micro-electrochemical processing. Background technique [0002] With the development of various precision and microtechnologies and microelectromechanical systems (MEMS), the preparation methods of micron-scale and nanoscale elongated shafts are becoming increasingly important. Micron-scale and nano-scale shafts with large aspect ratio can be widely used in various cutting-edge technologies such as micro-processing technology, micro-measurement technology, aerospace technology and biomedicine. At present, the main preparation methods of micron-scale slender shafts with large aspect ratio are single crystal diamond microturning technology, wire electrode grinding technology (WEDG), immersion electrochemical machining (ECM) method, single pulse electric discharge machining (OPED) and Focused ion beam (FI...

Claims

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Application Information

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IPC IPC(8): B23H3/00
Inventor 曾永彬王玉峰曲宁松朱荻
Owner NANJING UNIV OF AERONAUTICS & ASTRONAUTICS
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