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319 results about "Diamond substrate" patented technology

First is surface roughness, as the diamond bond to the tool substrate is a mechanical bond. The second factor is chemical compatibility. Cobalt, which is used as the binder for tungsten carbide, is a deterrent to diamond growth.

Diamond substrate-based gallium nitride high-electron-mobility transistor and preparation method thereof

The invention discloses a diamond substrate-based gallium nitride high-electron-mobility transistor and a preparation method thereof. The method comprises the following steps of firstly cleaning a silicon carbide-based gallium nitride wafer and the surface of a temporary slide; coating the front surface of the temporary slide with an adhesive material as a bonding material and putting the adhesive material on a hot plate for baking; oppositely bonding the silicon carbide-based gallium nitride wafer and the front surface of the temporary slide; carrying out thinning polishing and etching on a silicon carbide substrate of the silicon carbide-based gallium nitride wafer to remove the residual silicon carbide substrate; cleaning the surface of a gallium nitride epitaxial layer employing the temporary slide as a support; growing a layer of dielectric on the outer surface of the gallium nitride epitaxial layer employing the temporary slide as the support; carrying out epitaxial growth of a polycrystalline diamond substrate on the gallium nitride epitaxial layer employing the temporary slide as the support and automatically separating a diamond-based gallium nitride wafer from the temporary slide; and preparing the high-electron-mobility transistor on the diamond-based gallium nitride wafer. The limitation that original epitaxial growth is very difficult is broken, and epitaxial growth of diamond on gallium nitride can be relatively well controlled.
Owner:NO 55 INST CHINA ELECTRONIC SCI & TECHNOLOGYGROUP CO LTD

Two-dimensional expansion method for CVD monocrystal diamond

The invention relates to a manufacturing method for a monocrystal diamond material, especially to a two-dimensional expansion method for CVD monocrystal diamond. The two-dimensional expansion method is characterized by comprising the following steps: a, placing a seed crystal of monocrystal diamond into a substrate support with a hole in the center so as to allow the seed crystal of monocrystal diamond to be exposed, wherein the substrate support is made of metal molybdenum; b, putting the substrate support with the seed crystal of monocrystal diamond into a deposition chamber and carrying out vacuum-pumping on the deposition chamber; c, generating plasma by using a microwave plasma chemical vapor deposition method, i.e., introducing hydrogen and methane into the deposition chamber, adjusting gas flow, microwave power and air pressure and allowing gas in the deposition chamber to absorb microwave energy and excite and generate plasma, thereby allowing monocrystal diamond to grow on a top surface and four side surfaces at the same time and realizing two-dimensional expansion of monocrystal diamond; and d, carrying out peeling so as to obtain large-size monocrystal diamond. The method realizes two-dimensional growth of monocrystal diamond on a monocrystal diamond substrate via the microwave plasma chemical vapor deposition method, so the size of monocrystal diamond is enlarged.
Owner:WUHAN INSTITUTE OF TECHNOLOGY

Diamond-base double-layer insulated gate dielectric field effect transistor and a preparation method thereof

The invention discloses a diamond-base double-layer insulated gate dielectric field effect transistor (FET) and a preparation method thereof. The FET comprises a diamond substrate, a monocrystalline diamond epitaxial film, a conductive channel, a source electrode, a drain electrode, a first insulated gate dielectric layer, a second insulated gate dielectric layer, and a gate electrode. The diamond substrate is equipped with a layer of amonocrystalline diamond epitaxial film. The monocrystalline diamond epitaxial film is provided with the source electrode and the drain electrode. The conductive channel is formed in the monocrystalline diamond epitaxial film between the source electrode and the drain electrode. The first insulated gate dielectric layer covers the conductive channel between the source electrode and the drain electrode, and a part of the source electrode and the drain electrode. The second insulated gate dielectric layer is arranged on the first insulated gate dielectric layer. The gate electrode is arranged on the second insulated gate dielectric layer. The double-layer insulated gate dielectric structure effectively improves the DC and microwave characteristics of the FET.
Owner:XI AN JIAOTONG UNIV

Method of using square-recess embedded substrate support to inhibit growth of polycrystalline diamond

ActiveCN107059120AInhibits edge growthSuppressed edge polycrystallinePolycrystalline material growthFrom chemically reactive gasesAlcoholCooling effect
The invention discloses a method of using a square-recess embedded substrate support to inhibit the growth of polycrystalline diamond; the method comprises: manufacturing a substrate support, and making two concentric square recesses in the center of the surface of the substrate support; grinding and polishing the surface of the substrate support and the insides of the recesses; ultrasonically washing with absolute ethyl alcohol, and washing with plasma; ultrasonically washing a monocrystalline diamond substrate with acetate, placing in a substrate support recess, and fitting a growth device; washing a substrate with plasma in the growth device; adding methane to growth monocrystalline diamond. As graphite deposits between the substrate and the substrate support, the lateral sides of the substrate come in contact with the substrate support, substrate edge cooling effect is improved, and temperature uniformity of the whole monocrystalline diamond substrate is optimized, with polycrystalline growth at the edge of the substrate greatly avoided. Experiments discover that it is possible to effectively inhibit the edge polycrystal during the growth of monocrystalline diamond by using the square-recess embedded substrate support, and monocrystalline diamond samples with non-reduced size can be acquired.
Owner:CHINA ELECTRONICS TECH GRP NO 46 RES INST
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