The invention provides a
wide bandgap semiconductor trench IGBT device structure and a manufacturing method thereof, and belongs to the technical field of
semiconductor devices. The IGBT device comprises a collector
electrode, a collector region, a buffer layer, an epitaxial layer and an emitter
electrode located on the epitaxial layer, wherein the collector
electrode, the collector region, the buffer layer and the epitaxial layer are stacked in sequence. A buried layer and a well region are arranged in the epitaxial layer; and at least one
trench gate structure penetrating through the well region is also arranged. The bottom of the
trench gate structure is provided with a second doped region in direct contact with the
trench gate structure, and the top of the trench gate structure is covered with an interlayer
dielectric layer. The two sides of the trench gate structure are provided with emitter trenches surrounded by the first doped region. The first doped region is in direct contact with the buried layer. An emitter
dielectric layer is deposited along the wall of the emitter trench, and the emitter
dielectric layer is filled with a
semiconductor material. A conductive layer is disposed in a portion of the buried layer below the trench gate structure. The collector region, the buried layer, the well region, the first doped region and the second doped region have the same
doping type, and are different from the buffer layer, the epitaxial layer and the conductive layer in
doping type.