The invention discloses a
simulation analysis method for single-particle electric leakage of a
wide bandgap semiconductor device, and the method comprises the steps: constructing a geometric model of a to-be-simulated power device, calculating the
vacancy defect density of the power device, carrying out the two-
dimensional modeling and grid division, building an
electrical model of the power device, and fitting an electrical curve of the power device; then, a collision
ionization model after high-
energy particle incidence is introduced, mobility and electric leakage degradation parameters are optimized, and an electric leakage degradation model corresponding to the power device is established; and finally, carrying out damage
mechanism analysis, extracting the change of microscopic physical parameters of the power device along with time by changing influence parameters in the
radiation process, and carrying out reinforcement and optimization on the power device. According to the method, the physical processes of different
particle radiation devices can be accurately simulated, different microscopic physical parameters in the electric leakage process of the
wide bandgap semiconductor device are extracted, and a technical basis is provided for
radiation effect
mechanism analysis and reliability evaluation of the
wide bandgap semiconductor device by establishing different electric leakage models.