The application discloses a buried P+ SiC JBS structure with improved anti-single-particle performance, which comprises a
cathode metal, an
anode metal, an SiC N+ substrate, an N-type buffer layer, an N-epitaxial layer, a P+ buried layer and a JBS contact P+, the N-type buffer layer and the N-epitaxial layer are arranged above the SiC N+ substrate, the JBS contact P+ is connected above the N-epitaxial layer, wherein the JBS contact P+ is arranged between the
cathode metal and the N-epitaxial layer, the N-type buffer layer is arranged between the N-epitaxial layer and the SiC N+ substrate, the
cathode metal is arranged below the SiC N+ substrate, the
anode metal is arranged above the JBS contact P+, and the P+ buried layer is arranged between the N-epitaxial layer and the JBS contact P+. The SiC JBS structure is improved, the original SiC JBS structure is ensured to have the advantages of low
forward voltage drop and small
reverse leakage current, meanwhile, the collection of holes to the
anode metal and the collection of electrons to the cathode metal can be reduced during single-
particle irradiation, and the excessive leakage and burning are prevented.