The invention discloses a vacuum valve particle test
system and method, and the method comprises the following test steps: 1, instrument self-cleaning: connecting a filter with a dust
particle counter, and enabling test gas to pass through the filter and the dust
particle counter for self-cleaning; 2, assembling
system components, and assembling a gas source, a
mass flow controller, a first pipeline, a filter, a second pipeline, a valve positioning tool, a third pipeline, a fourth pipeline and a valve driving piece to be tested; 3,
system purging: installing the to-be-tested valve on a valve positioning tool, opening the to-be-tested valve by a to-be-tested valve driving piece, and purging the system by the entering test gas; step 4, static test: connecting a dust
particle counter to a fourth pipeline, and feeding test gas from a gas source; 5,
dynamic testing is carried out, and 300 times of
dynamic testing is carried out; 6, observing, recording and storing numerical values, and observing the numerical values on the dust particle counter; the technical problem that a vacuum valve needs to be subjected to particle testing is solved.