The present invention relates to the field of MOS
semiconductor technology and discloses a high-temperature resistant VDMOS power
transistor for use in extreme environments and a method for preparing the same. The
transistor comprises a plurality of juxtaposed MOS cells, each of which includes a drain, a
semiconductor epitaxial layer, a gate, and a source. The
semiconductor epitaxial layer includes an N substrate layer, an N drift layer, a lower P+ layer, a P-well layer, and an N-well layer. Side P+
layers are formed on both sides of the MOS
cell and between the source and the lower P+ layer by
ion implantation. The side P+
layers are axially symmetrical with the N-well layer, and the combined cross-sectional profile of the side P+
layers and the N-well layer is in the shape of a "concave" character. The present invention utilizes an axially symmetrical "concave" deep junction structure formed by the side P+ layers and the N-well layer to significantly enhance the
lateral expansion capability of the
depletion region and reduce the parasitic resistance of the P-well layer. This structure blocks the conduction path of the
parasitic bipolar transistor and avoids latch-up at high temperatures.