The application provides a super-junction
MOSFET device structure and a preparation method thereof. By forming split-gate trenches and forming P-type shunt regions between the split-gate trenches, and combining independent contact holes of the source region and the shunt region with a
metal layer structure, the overlapping area of the gate and the drain is effectively reduced to reduce the Miller
capacitance and the gate-drain charge, thereby reducing the switching loss. The
JFET effect area below the traditional planar gate and the parasitic resistance introduced by the
JFET effect area are eliminated, the conduction resistance characteristics are significantly improved, and the split-gate trenches can play a role in lateral depletion to optimize the
electric field distribution of the P-type shunt region, so that the P-type shunt region becomes a breakdown weak point. In the large-current off process, the P-type shunt region provides an additional low-impedance
discharge path for the hole current, suppresses the
current density flowing through the P-type base region, effectively prevents the opening of the
parasitic bipolar transistor, avoids
thermal runaway failure, and significantly improves the off ability and long-term reliability of the device under severe conditions of large current and
high voltage.