39 results about "Particle source" patented technology

A multi-beam particle microscope having a quickly replaceable particle source, the microscope comprising a double seal-off and column separation module. Using the double seal-off and column separation module, a replacement module with a particle source can be replaced relatively quickly. Potentially sensitive constituent parts of the particle optics of the multi-beam particle microscope can be protected from contamination.

This invention relates to the field of neutron source technology, and particularly to a controllable isotope neutron source device based on ion migration and a method for generating neutrons. The device includes a casing, inside which are a target material module, a target ion migration system, a safety module, and an alpha particle source term. The target material module provides target nuclide ions. The alpha particle source term includes alpha radioactive nuclide material and target nuclide intercalation material. The safety module is composed of target nuclide intercalation material. The target ion migration system is connected to an external control field. Target nuclide ions migrate through the target ion migration system within the safety module and the alpha particle source term. This invention enables active controllability of the isotope neutron source, significantly improving safety. By ensuring sufficient contact between alpha particles and target nuclides to form a molecular intercalation structure, the (α,n) reaction efficiency is greatly improved. Furthermore, this neutron source can be used in combination with multiple modules according to application requirements, effectively increasing the neutron output flux.

The invention provides a cyclotron electrostatic deflection plate beam loss heat source reconstruction method, and relates to the technical field of particle accelerator thermal analysis and multi-physics field coupling calculation, and the method comprises the steps: 1, configuring beam dynamics simulation parameters, multi-particle tracking is carried out under a three-dimensional field graph containing a central area electromagnetic field, a harmonic coil magnetic field and an electrostatic deflection electric field, and a particle loss list is generated; step 2, transferring the particle loss list into a beam source file of a Monte Carlo radiation transport program, configuring Monte Carlo parameters including a deflection plate material, a boundary, a particle type and an energy spectrum, executing particle transport simulation, and obtaining a three-dimensional energy deposition matrix on an electrostatic deflection plate element; according to the method, high-resolution heat source reconstruction is realized, the peak temperature rise calculation error of the deflection plate can be reduced, a temperature field solving result can be fed back to optimize the particle source, and a reliable basis is provided for thermal structure design and cooling optimization of the electrostatic deflection plate.

The invention relates to a high-current pulse proton accelerator beam synchronous control system and method, belongs to the technical field of particle accelerator control, and solves the problem of high operation risk of a high-current pulse proton accelerator in the prior art. The beam synchronous control system comprises a beam control system, a particle source acceleration power supply system, a particle source extraction power supply system and each high-frequency acceleration cavity system; the beam control system determines a beam mode and a beam pulse width according to a received user beam output instruction, and synchronously sends a boost event code to the particle source acceleration power supply system and a turn-off event code to the particle source extraction power supply system; the particle source acceleration power supply system, the particle source extraction power supply system and each high-frequency acceleration cavity system respectively trigger hard interruption after receiving corresponding event codes, and execute corresponding events in the hard interruption to realize synchronization of beam current and high-frequency feedforward. And the operation risk is reduced.

A charged particle wire device is characterized by comprising: a charged particle source (202) consisting of a single crystal needle (204), a filament (205) connected to the single crystal needle, and an insulator (207) for holding the filament; a plurality of non-evaporating getter materials (201); an extraction electrode (203); and a housing (209) arranged around the axis of the electron wire emitted from the charged particle source; wherein a heater (212) for heating the plurality of non-evaporating getter materials is disposed at the extraction electrode, the plurality of non-evaporating getter materials are arranged side by side in the housing, the housing is connected to the extraction electrode, and an elastic member (250) is disposed between the non-evaporating getter materials and the housing, the elastic member (250) being configured to push the non-evaporating getter materials. This charged particle beam device comprises: a charged particle source 202 composed of a single crystal needle 204, a filament 205 connected to the single crystal needle, and an insulator 207 that holds the filament; a plurality of non-evaporation getter materials 201; a lead-out electrode 203; and a housing 209 disposed so as to surround the axis of an electron beam emitted by the charged particle source, the charged particle beam device being characterized in that a heater 212 for heating the plurality of non-evaporation getter materials is disposed in the lead-out electrode, the plurality of non-evaporation getter materials in the housing are disposed side by side, the housing is connected to the lead-out electrode, and elastic members 250 configured to press the non-evaporation getter materials are disposed between the non-evaporation getter materials and the housing.

A charged particle beam system includes: a chamber (202); a charged particle source unit that has a charged particle source (210); a supporting member (700) that is provided on a side wall of the chamber and detachably supports the charged particle source unit inside the chamber; and a chamber door (204) that is provided on the side wall of the chamber for access to an interior of the chamber.

The application discloses a kind of solar flare X-ray full-link simulation method and system based on Geant4, belong to space satellite detection and numerical simulation technical field.The method includes: build high-performance hybrid parallel computing platform based on Geant4;Based on the platform, construct layered magnetized solar atmosphere model, configure physical process list and generate high-energy electron particle source;Through light tracing algorithm and self-defined step action module, the transmission, scattering and polarization evolution of X-ray in layered magnetized solar atmosphere are tracked and simulated;Through pixelated imaging and data output module, photon information is mapped to multiple virtual detector imaging planes, and X-ray imaging, energy spectrum and polarization degree data of different observation angles are output.The application solves the problems of existing model and multi-satellite stereoscopic observation data mismatch, Compton scattering details missing, polarization information deficiency and low computing efficiency, and provides an effective tool for analysis and simulation of multi-satellite joint observation data.

A charged particle beam device for observing a sample by periodically irradiating the sample with a pulsed charged particle beam includes a control device configured to control irradiation using the pulsed charged particle beam and detection of a signal of an emitted electron based on an observation condition. The control device calculates an irradiation period, a scanning speed, and a pulse width of the pulsed charged particle beam and a detection timing of the signal of the emitted electron based on a current of the charged particle beam emitted from the particle source and an electrostatic capacity and an electrical resistance of the sample, and sets the observation condition including the current of the charged particle beam, the irradiation period, the scanning speed, and the pulse width of the pulsed charged particle beam, and the detection timing of the signal of the emitted electron.

This invention provides a method for calculating the PKA energy spectrum based on multi-particle source simulation, belonging to the field of satellite space environment analysis technology. The method includes: S1, constructing a semiconductor detector model based on the Monte Carlo method; S2, setting particle sources, which include multiple forms, at least one of which includes two or more types of high-energy particles; S3, performing a real space environment simulation based on the silicon wafer thickness of the semiconductor detector model, calculating the change trend of the primary collision atom energy spectrum caused by irradiation from different forms of particle sources under the same incident structure and the same model. This invention, by using multiple forms of particle sources and comparing the PKA energy spectrum change trends under different particle sources, selects a particle source that better matches the device's mission environment, thus better simulating the influence of comprehensive space radiation environment factors and improving the representativeness of the simulation results for the comprehensive space radiation environment effects.

The invention discloses a method and system for optimizing two-dimensional argon plasma uniformity by introducing a high-energy particle source, and the method comprises the steps: S1, filling a plasma reaction chamber with background gas, and simulating the distribution of neutral particles; s2, initializing the speed and the position of charged particles in the gas in the chamber, enabling the charged particles to be uniformly distributed in the chamber, and determining the intensity, the time sequence, the incident direction and the incident position of high-energy particles emitted by an external particle source; s3, calculation of charged particle density, potential and electric field; s4, calculating the force acting on the charged particles; s5, moving the charged particles; s6, checking and executing collision; and S7, repeating the steps S3 to S6, adjusting the high-energy particle injection time sequence until a steady state is reached, and obtaining the data distribution of the charged particles. Through controllable interaction between an external particle source and plasma or background gas, seed electrons-ions are actively generated in a specific space area or energy distribution is changed, and inherent space non-uniformity of the plasma is compensated.

The present application relates to a kind of multi-head radiotherapy device, belong to radiotherapy technical field, including particle source, beam splitting element, deflection element and multiple independent head, particle source is used to generate charged particle beam pulse, charged particle beam pulse is cut into multiple sub-pulse of different transmission direction by beam splitting element, the transmission direction of sub-pulse is deflected again by deflection element, after deflection sub-pulse is injected into head by transmission beam line, multiple head is located and different, it is irradiated to tumor from different directions, the present application can complete the irradiation of multiple beams to tumor target area simultaneously in very short time, shorten the entire radiotherapy time, at the same time, it can be conformal to target area without rotating head, save time and cost, novel structure.

The invention discloses a Geant4-based solar flare X-ray full-link simulation method and system, and belongs to the technical field of space satellite detection and numerical simulation. The method comprises the following steps: building a Geant4-based high-performance hybrid parallel computing platform; a layered magnetization solar atmosphere model is constructed based on the platform, a physical process list is configured, and a high-energy electron particle source is generated; through a ray tracing algorithm and a user-defined stepping action module, tracking simulation is carried out on transmission, scattering and polarization evolution of X-rays in the layered magnetized solar atmosphere; and through a pixelated imaging and data output module, the photon information is mapped to imaging planes of a plurality of virtual detectors, and X-ray imaging pictures, energy spectrums and polarization degree data of different observation visual angles are output. The problems that an existing model is not matched with multi-satellite stereoscopic observation data, Compton scattering details are missing, polarization information is insufficient and calculation efficiency is low are solved, and an effective tool is provided for analysis and simulation of multi-satellite combined observation data.

The invention provides an air exhaust limiter structure for a star imitator device and the star imitator device, and relates to the field of magnetic confinement plasma devices.The air exhaust limiter structure comprises a limiter component which is arranged in a vacuum chamber and is close to a plasma boundary position; the getter pump module is arranged on the side, back to the plasma, of the limiter component, communicates with the limiter area through an air exhaust channel and is used for conducting non-flow type adsorption capture on neutral gas entering from the boundary of the plasma; according to the scheme, the getter pump module is integrated nearby the limiter component in a compact and modular mode, local air exhaust close to a particle source is achieved, the structure does not depend on a liquid helium or liquid nitrogen pipeline, a cold shield and other low-temperature systems as main air exhaust means, operation and maintenance are simplified, the long-term steady-state operation requirement of a star imitator device is met, and the structure is simple. The method has potential engineering adaptability in tritium-related application scenarios and in the presence of neutron irradiation devices.

This invention provides a charged particle source, which comprises an emitter and means fo generating a magnetic field distribution. The magnetic field distribution is minimum, about zero, or preferred zero at the tip of the emitter, and along the optical axis is maximum away from the tip immediately. In a preferred embodiment, the magnetic field distribution is provided by dual magnetic lens which provides an anti-symmetric magnetic field at the tip, such that magnetic field at the tip is zero.

Systems and methods of observing a sample using a charged-particle beam apparatus in voltage contrast mode are disclosed. The charged-particle beam apparatus comprises a charged-particle source, an optical source, a charged-particle detector configured to detect charged particles, and a controller having circuitry configured to apply a first signal to cause the optical source to generate the optical pulse, apply a second signal to the charged-particle detector to detect the second plurality of charged particles, and adjust a time delay between the first and the second signals. In some embodiments, the controller having circuitry may be further configured to acquire a plurality of images of a structure, to determine an electrical characteristic of the structure based on the rate of gray level variation of the plurality of images of the structure, and to simulate, using a model, a physical characteristic of the structure based on the determined electrical characteristic.

An example particle accelerator includes a particle source to provide particles to a magnetic cavity; circuitry to provide a radio frequency (RF) voltage to the magnetic cavity to accelerate particles from the ionized plasma in orbits in the magnetic cavity, where the RF voltage has a slope that is less when the particles are injected into the magnetic cavity than when the particles are accelerated in the magnetic cavity; and an extraction channel to receive the particles from the magnetic cavity for output as a particle beam from the particle accelerator.

A substrate processing apparatus includes a chamber for processing a substrate, a fluid supply portion for supplying a fluid to the chamber, a fluid supply line connecting the fluid supply portion and the chamber and conveying the fluid to the chamber, a plurality of hardware terminals for receiving the fluid from the fluid supply line, a fluid discharge line connecting the fluid supply portion and the chamber, a detection system for detecting the fluid discharge line, and a first sampling line for sampling the fluid from the fluid discharge line. The plurality of hardware ends are arranged on the fluid supply pipeline, the fluid discharge pipeline is used for discharging treated fluid in the cavity, the first sampling pipeline is in on-off connection with the fluid discharge pipeline and outlets of the plurality of hardware ends, and the detection system is used for detecting particle parameters of the fluid in the first sampling pipeline. When the detection system detects that the particle parameters of the fluid in the fluid discharge pipeline do not conform to the specification through the first sampling pipeline, the detection system detects whether the particle parameters of the fluid from the outlets of the corresponding hardware ends conform to the specification through the first sampling pipeline. According to the invention, particle parameters can be detected and particle sources can be checked.

A column for analyzing and / or processing a sample, for example a mask for a lithography apparatus, comprising a particle source configured to emit a particle beam in a first direction onto the sample, a detector device configured to detect particles moving in a second direction opposite to the first direction, and a positioning device configured to position the detector device in a plane oriented perpendicular to the first direction.

A multibeam particle microscope with a rapidly replaceable particle source is disclosed. For this purpose, the multibeam particle microscope includes a specific double-sealing and tube separation module. This double-sealing and tube separation module allows for faster replacement of the interchangeable module with the particle source and, in some cases, protects the potentially sensitive particle optics components of the multibeam particle microscope from contamination.

An aerosol transport simulation method for a nuclear facility pipeline system comprises the following steps: carrying out initial flow field modeling and calculation based on an Euler framework, tracking particle motion by using a particle deposition module under a Lagrange framework, generating particle deposition distribution, updating flow field boundary conditions, and calculating the particle deposition distribution. The method comprises the following steps: simulating an actual dynamic working condition by disturbing airflow, calling a particle resuspension module to judge particle behaviors, integrating resuspension particles and disturbing airflow injection particles, and generating a mixed particle source item; recursively calling a particle deposition module to process a mixed particle source item; when new disturbance airflow injection exists, the disturbance airflow flow field is reset to particle tracking calculation again, and finally a simulation result is counted and output. According to the invention, through a recursive feedback mechanism and considering the probabilistic resuspension behavior, multiple cyclic processes of deposition-resuspension-redeposition of the aerosol are captured, and the whole process and high precision simulation of the migration behavior of the aerosol are realized.

Systems and methods of observing a sample using a charged-particle beam apparatus in voltage contrast mode are disclosed. The charged-particle beam apparatus comprises a charged-particle source, an optical source, a charged-particle detector configured to detect charged particles, and a controller having circuitry configured to apply a first signal to cause the optical source to generate the optical pulse, apply a second signal to the charged-particle detector to detect the second plurality of charged particles, and adjust a time delay between the first and the second signals. In some embodiments, the controller having circuitry may be further configured to acquire a plurality of images of a structure, to determine an electrical characteristic of the structure based on the rate of gray level variation of the plurality of images of the structure, and to simulate, using a model, a physical characteristic of the structure based on the determined electrical characteristic.

This invention discloses a method and apparatus for assessing the impact of spacecraft plumes on in-situ atmospheric detection payloads in orbit. The method includes: Step S1, constructing a continuous flow field model within the spacecraft's thruster nozzle and a designated near-field region at the exit, and solving for macroscopic flow field data; Step S2, reconstructing cross-basin heterogeneous data based on the macroscopic flow field data, converting it into microscopic particle source data; Step S3, establishing a particle transport model adapted to the spacecraft's geometry and tracking rarefied flow particles; Step S4, calculating the quantitative assessment results of payload contamination effects based on the tracking results of rarefied flow particles. This invention significantly improves the physical realism and computational accuracy of vacuum plume diffusion simulation, achieves low-distortion mapping of heterogeneous simulation data during cross-scale transmission, greatly improves the design iteration efficiency during spacecraft development, and constructs a parameterized end-to-end process.

The application provides a cyclotron electrostatic deflection plate beam loss heat source reconstruction method, and relates to the technical field of particle accelerator heat analysis and multi-physical field coupling calculation, and the method comprises the following steps: step 1, configuring beam dynamics simulation parameters, performing multi-particle tracking under a three-dimensional field diagram containing a central area electromagnetic field, a harmonic coil magnetic field and an electrostatic deflection electric field, and generating a particle loss list; step 2, converting the particle loss list into a beam source file of a Monte Carlo radiation transport program, configuring Monte Carlo parameters, including deflection plate materials, boundaries, particle types and energy spectra, performing particle transport simulation, and obtaining a three-dimensional energy deposition matrix on the electrostatic deflection plate element. The application realizes high-resolution heat source reconstruction, can reduce the calculation error of the peak temperature rise of the deflection plate, and can feed back the temperature field solving result to optimize the particle source, thereby providing a reliable basis for the thermal structure design and cooling optimization of the electrostatic deflection plate.

Disclosed in the present application is a substrate processing device, which comprises a chamber, a fluid supply unit, a fluid supply line, a plurality of hardware terminals, a fluid discharge line, a measurement system and a first sampling line, wherein the chamber is configured to process substrates; the fluid supply unit is configured to supply fluid to the chamber; the fluid supply line connects the fluid supply unit and the chamber and delivers the fluid to the chamber; the plurality of hardware terminals are arranged on the fluid supply line; the fluid discharge line is configured to discharge processed fluid in the chamber; the first sampling line is connected to the fluid discharge line and outlets of the plurality of hardware terminals in an on-off manner, respectively; and the measurement system is configured to measure particle parameters of the fluid in the first sampling line. When the measurement system first measures, via the first sampling line, that the particle parameters of the fluid in the fluid discharge line fail to meet the specifications, the measurement system then measures, via the first sampling line, whether the particle parameters of fluid from the outlets of the corresponding hardware terminals meet the specifications. The present application can measure particle parameters and check particle sources.

The present application relates to PM 2.5 The technical field of pollution, specifically relates to a kind of PM 2.5 Particle source analysis method based on machine learning.The present application provides a kind of PM 2.5 Particle source analysis method based on machine learning, based on PM 2.5 Chemical component mass concentration data acquisition difficulty, establish the relationship between chemical component mass concentration data, meteorological data, atmospheric pollutant emission data and source contribution rate data, build PMF source analysis simulation model to PM 2.5 Particle source analysis.The PMF source analysis simulation model provided by the present application can realize the rapid and effective source analysis analysis of PM 2.5 ;And it is not related to the use of short equipment, applicable to the PM 2.5 Supervision and monitoring of most areas.

The invention relates to the field of tumor treatment in-vitro experiments, in particular to a particle source placement position self-adaptive sampling method based on 10 norm regularization. According to the method, 10 norm regularization is introduced, and adaptive sampling is carried out in a candidate placement position set, so that an I particle optimal placement subset meeting specific dose distribution requirements is identified. In order to effectively deal with the inherent binary Boolean constraint problem of the model, a semi-continuous relaxation technology is adopted to relax a feasible region into a form containing a continuous interval, an iterative convex relaxation strategy is designed to decouple particle position variables and irradiation time variables and optimize the variables at the same time, and efficient numerical solution is carried out in combination with an alternating direction multiplier method. Through a systematic optimization strategy, a particle configuration scheme with more uniform dose distribution and better cost effectiveness is provided for an in-vitro irradiation experiment, so that the reliability and clinical transformation potential of mechanism research are improved.

The invention provides a single event upset evaluation method, device and equipment for a three-dimensional stacked microsystem, and relates to the technical field of space environment effects. The method comprises the following steps: constructing a three-dimensional geometric model according to design parameters of the three-dimensional stacked microsystem; determining a target particle source according to a target deployment environment of the three-dimensional stacked microsystem; inputting the three-dimensional geometric model and the target particle source into a preset simulation tool, and simulating the charge quantity collected in each sensitive body; and based on a comparison result of the charge quantity and a preset critical charge quantity, identifying a single event upset event of the sensitive body, and based on statistical information of the upset event, determining a single event upset evaluation result of the three-dimensional stacked microsystem. According to the method, the target particle source is determined through the target deployment environment, simulation is carried out based on the target particle source and the three-dimensional model, the charge quantity collected in each sensitive body is simulated so as to accurately identify the upset event, and the accuracy and the actual reference value of a single event upset evaluation result can be ensured.

The application discloses a control method and device of an ionization chamber, which calibrates the positioning distance of a measuring device when the measuring device is in a connection state, carries out leakage measurement on the ionization chamber in the calibrated measuring device, and ensures that the ionization chamber meets the measurement standard. Under the condition that the ionization chamber meets the measurement standard, the ionization chamber is controlled to automatically measure the particle source water absorbing dose through an automatic measurement program.

The invention relates to a particle beam device (1) having a particle source (11), an extraction aperture (13), an anode aperture (14) and a beam tube (23). A driver system of the particle beam device (1) is configured to apply an extraction aperture potential (φExt) to the extraction aperture (13), an anode aperture potential (φA) to the anode aperture (14) which can be variably set, and a beam tube potential (φL) to the beam tube (23). A controller of the particle beam device (1) is configured to control the driver system such that a voltage between the extraction aperture (13) and the anode aperture (14) can be variably set, and thus an intensity of a current of the particle beam (3) passing through an aperture (14') of the anode aperture (14) can be variably set.

To provide a charged particle beam device capable of achieving more appropriate position adjustment of a charged particle source.SOLUTION: The charged particle beam apparatus includes a charged particle source support member 106 that directly or indirectly supports a charged particle source 103, and a moving mechanism 107 that moves the charged particle source support member 106, and the moving mechanism 107 has a first function of moving the charged particle source support member 106 in an X direction, a Y direction, and a Z direction and a second function of moving the charged particle source support member 106 in the Z direction from the outside of a vacuum chamber 101 separately from the first function, where the Z direction is a traveling direction of charged particles emitted from the charged particle source 103, the X direction is a direction orthogonal to the Z direction, and the Y direction is a direction orthogonal to the Z direction and the X direction.SELECTED DRAWING: Figure 1