The invention relates to the technical field of
MEMS sensors, and discloses an MEMS catalytic
methane sensor capable of resisting
sulfide poisoning and a preparation method of the MEMS catalytic
methane sensor. The preparation method comprises the following steps: S1, carrying out a synthetic reaction on a main body material and a modified material to obtain a
carrier material primary product; washing and
drying the primary product of the
carrier material, and carrying out heat treatment to finally obtain the
carrier material; s2, dissolving a catalyst A and a catalyst B in pure water, performing stirring treatment, then adding the carrier material prepared in the step S1, performing
ultrasonic oscillation dispersion under a
room temperature condition, firstly transferring obtained
powder into a
muffle furnace, performing heat treatment, and then transferring the
powder into a tubular furnace to prepare modified carrier
powder; s3, preparing black element
slurry, white element
slurry and catalyst
slurry; and S4, preparing the MEMS catalytic
methane element. The
sulfide poisoning resistant MEMS catalytic methane sensor prepared by the invention is suitable for a plurality of fields of
coal mines, industry, civil use and the like, has wide applicability, and can better improve the low-temperature
combustion and
sulfide poisoning resistance of methane.