X-ray analysis apparatus and x-ray analysis method

An analysis equipment, X-ray technology, applied in the direction of analyzing materials, using wave/particle radiation for material analysis, irradiation devices, etc., can solve the problems of difficult quantitative analysis, unstable X-ray intensity, etc., and achieve the effect of stable quantitative analysis

Inactive Publication Date: 2008-07-30
HITACHI HIGH TECH SCI CORP
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Problems solved by technology

In this case, the tube current does not reach the normal working range of the X-ray tube, the intensity of the X-rays generated by the X-ray tube becomes unstable, and because the intensity of the detected X-rays becomes unstable Stable, there is a disadvantage that it is difficult to carry out quantitative analysis

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  • X-ray analysis apparatus and x-ray analysis method
  • X-ray analysis apparatus and x-ray analysis method
  • X-ray analysis apparatus and x-ray analysis method

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Embodiment Construction

[0033] Next, an X-ray analysis apparatus and an X-ray analysis method according to a first embodiment of the present invention are explained with reference to FIGS. 1 to 3 .

[0034] The X-ray analysis equipment of the present embodiment is energy dispersive fluorescence X-ray analysis equipment, and as shown in Figure 1 to Figure 3, comprises: the sample table 2 of fixing sample 1; X-ray tubular bulb (radiation source) 3, primary X-rays (radiation) irradiate the sample 1; the primary X-ray adjustment mechanism (radiation adjustment mechanism) 4 can adjust the intensity of the primary X-ray; the X-ray detector 5 detects the characteristic X-rays and scattered X-rays radiated from the sample 1 ray, and output signals that contain the energy information of characteristic X-rays and scattered X-rays; Analyzer 6 is connected to X-ray detector 5 and analyzes the above-mentioned signals; Incident X-ray adjustment mechanism 7 is placed on sample 1 and X-ray detector 5 and can adjust ...

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Abstract

In an X-ray analysis apparatus and an X-ray analysis method, a quantitative analysis is stably performed by stably behaving an X-ray source. There are possessed an X-ray tubular bulb irradiating a primary X-ray to a sample, a primary X-ray adjustment mechanism capable of adjusting an intensity of the primary X-ray, an X-ray detector detecting a characteristic X-ray radiated from the sample, thereby outputting a signal including energy informations of the characteristic X-ray and a scattered X-ray, an analyzer analyzing the above signal, and an incident X-ray adjustment mechanism disposed between the sample and the X-ray detector, and capable of adjusting a total intensity of the characteristic X-ray and the scattered x-ray, which are entered to the X-ray detector.

Description

technical field [0001] The present invention relates to an X-ray analysis apparatus and an X-ray analysis method suitable for use in, for example, energy dispersive fluorescence X-ray analysis and the like. Background technique [0002] In fluorescent X-ray analysis, by irradiating X-rays emitted from an X-ray source to a sample and detecting fluorescent X-rays, which are characteristic X-rays irradiated from a sample, by an X-ray detector, thereby from The energy of the fluorescent X-rays can be used to obtain an energy spectrum, thereby performing qualitative or quantitative analysis on the sample. This fluorescent X-ray analysis is widely used in process / quality control because it can quickly analyze a sample without destroying the sample. In recent years, efforts have been made to improve the accuracy / sensitivity and trace measurement thus becomes possible, making it desirable to develop an analysis technique particularly for detection of harmful substances contained in...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N23/223G21K3/00G21K5/02
Inventor 深井隆行的场吉毅长谷川清
Owner HITACHI HIGH TECH SCI CORP
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