X-ray analysis apparatus and x-ray analysis method

An analysis equipment, X-ray technology, applied in the direction of analyzing materials, using wave/particle radiation for material analysis, irradiation devices, etc., can solve the problems of difficult quantitative analysis, unstable X-ray intensity, etc., and achieve the effect of stable quantitative analysis
CN101231256AInactive Publication Date: 2008-07-30HITACHI HIGH TECH SCI CORP
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Patent Information

Authority / Receiving Office
CN Β· China
Patent Type
Applications(China)
Current Assignee / Owner
HITACHI HIGH TECH SCI CORP
Publication Date
2008-07-30
Estimated Expiration
Not applicable Β· inactive patent

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Abstract

In an X-ray analysis apparatus and an X-ray analysis method, a quantitative analysis is stably performed by stably behaving an X-ray source. There are possessed an X-ray tubular bulb irradiating a primary X-ray to a sample, a primary X-ray adjustment mechanism capable of adjusting an intensity of the primary X-ray, an X-ray detector detecting a characteristic X-ray radiated from the sample, thereby outputting a signal including energy informations of the characteristic X-ray and a scattered X-ray, an analyzer analyzing the above signal, and an incident X-ray adjustment mechanism disposed between the sample and the X-ray detector, and capable of adjusting a total intensity of the characteristic X-ray and the scattered x-ray, which are entered to the X-ray detector.
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Description

technical field

[0001] The present invention relates to an X-ray analysis apparatus and an X-ray analysis method suitable for use in, for example, energy dispersive fluorescence X-ray analysis and the like. Background technique

[0002] In fluorescent X-ray analysis, by irradiating X-rays emitted from an X-ray source to a sample and detecting fluorescent X-rays, which are characteristic X-rays irradiated from a sample, by an X-ray detector, thereby from The energy of the fluorescent X-rays can be used to obtain an energy spectrum, thereby performing qualitative or quantitative analysis on the sample. This fluorescent X-ray analysis is widely used in process / quality control because it can quickly analyze a sample without destroying the sample. In recent years, efforts have been made to improve the accuracy / sensitivity and trace measurement thus becomes possible, making it desirable to develop an analysis technique particularly for detection of harmful substances contained in...

Claims

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