X-ray analysis apparatus and x-ray analysis method

Abstract

In an X-ray analysis apparatus and an X-ray analysis method, a quantitative analysis is stably performed by stably behaving an X-ray source. There are possessed an X-ray tubular bulb irradiating a primary X-ray to a sample, a primary X-ray adjustment mechanism capable of adjusting an intensity of the primary X-ray, an X-ray detector detecting a characteristic X-ray radiated from the sample, thereby outputting a signal including energy informations of the characteristic X-ray and a scattered X-ray, an analyzer analyzing the above signal, and an incident X-ray adjustment mechanism disposed between the sample and the X-ray detector, and capable of adjusting a total intensity of the characteristic X-ray and the scattered x-ray, which are entered to the X-ray detector.

Description

technical field [0001] The present invention relates to an X-ray analysis apparatus and an X-ray analysis method suitable for use in, for example, energy dispersive fluorescence X-ray analysis and the like. Background technique [0002] In fluorescent X-ray analysis, by irradiating X-rays emitted from an X-ray source to a sample and detecting fluorescent X-rays, which are characteristic X-rays irradiated from a sample, by an X-ray detector, thereby from The energy of the fluorescent X-rays can be used to obtain an energy spectrum, thereby performing qualitative or quantitative analysis on the sample. This fluorescent X-ray analysis is widely used in process / quality control because it can quickly analyze a sample without destroying the sample. In recent years, efforts have been made to improve the accuracy / sensitivity and trace measurement thus becomes possible, making it desirable to develop an analysis technique particularly for detection of harmful substances contained in...

AI Technical Summary

Problems solved by technology

In this case, the tube current does not reach the normal working range of the X-ray tube, the intensity of the X-rays generated by the X-ray tube becomes unstable, and because the intensity of the detected X-rays becomes unstable Stable, there is a disadvantage that it is difficult to carry out quantitative analysis

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