X-ray analysis apparatus and x-ray analysis method
An analysis equipment, X-ray technology, applied in the direction of analyzing materials, using wave/particle radiation, using apertures/collimators, etc., can solve problems such as difficult quantitative analysis, unstable X-ray intensity, etc., to achieve stable The effect of quantitative analysis
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[0033] Below, refer to Figure 1 to Figure 3 The X-ray analysis apparatus and X-ray analysis method of the first embodiment of the present invention will be explained.
[0034] The X-ray analysis equipment of this embodiment is an energy dispersive fluorescence X-ray analysis equipment, and as Figure 1 to Figure 3 As shown, it includes: a sample stage 2 for fixing the sample 1; an X-ray tubular bulb (radiation source) 3, which irradiates the primary X-ray (radiation line) to the sample 1; a primary X-ray adjustment mechanism (radiation line adjustment mechanism) 4, The intensity of primary X-rays can be adjusted; X-ray detector 5 detects characteristic X-rays and scattered X-rays radiated from sample 1, and outputs signals containing energy information of characteristic X-rays and scattered X-rays; Analyzer 6 is connected to The X-ray detector 5 analyzes the above-mentioned signals; the incident X-ray adjustment mechanism 7 is placed between the sample 1 and the X-ray detect...
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