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X-ray analysis apparatus and x-ray analysis method

An analysis equipment, X-ray technology, applied in the direction of analyzing materials, using wave/particle radiation, using apertures/collimators, etc., can solve problems such as difficult quantitative analysis, unstable X-ray intensity, etc., to achieve stable The effect of quantitative analysis

Inactive Publication Date: 2012-06-20
HITACHI HIGH TECH SCI CORP
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Problems solved by technology

In this case, the tube current does not reach the normal working range of the X-ray tube, the intensity of the X-rays generated by the X-ray tube becomes unstable, and because the intensity of the detected X-rays becomes unstable Stable, there is a disadvantage that it is difficult to carry out quantitative analysis

Method used

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  • X-ray analysis apparatus and x-ray analysis method
  • X-ray analysis apparatus and x-ray analysis method
  • X-ray analysis apparatus and x-ray analysis method

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Embodiment Construction

[0033] Below, refer to Figure 1 to Figure 3 The X-ray analysis apparatus and X-ray analysis method of the first embodiment of the present invention will be explained.

[0034] The X-ray analysis equipment of this embodiment is an energy dispersive fluorescence X-ray analysis equipment, and as Figure 1 to Figure 3 As shown, it includes: a sample stage 2 for fixing the sample 1; an X-ray tubular bulb (radiation source) 3, which irradiates the primary X-ray (radiation line) to the sample 1; a primary X-ray adjustment mechanism (radiation line adjustment mechanism) 4, The intensity of primary X-rays can be adjusted; X-ray detector 5 detects characteristic X-rays and scattered X-rays radiated from sample 1, and outputs signals containing energy information of characteristic X-rays and scattered X-rays; Analyzer 6 is connected to The X-ray detector 5 analyzes the above-mentioned signals; the incident X-ray adjustment mechanism 7 is placed between the sample 1 and the X-ray detect...

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Abstract

In an X-ray analysis apparatus and an X-ray analysis method, a quantitative analysis is stably performed by stably behaving an X-ray source. There are possessed an X-ray tubular bulb irradiating a primary X-ray to a sample, a primary X-ray adjustment mechanism capable of adjusting an intensity of the primary X-ray, an X-ray detector detecting a characteristic X-ray radiated from the sample, thereby outputting a signal including energy informations of the characteristic X-ray and a scattered X-ray, an analyzer analyzing the above signal, and an incident X-ray adjustment mechanism disposed between the sample and the X-ray detector, and capable of adjusting a total intensity of the characteristic X-ray and the scattered x-ray, which are entered to the X-ray detector.

Description

technical field [0001] The present invention relates to an X-ray analysis apparatus and an X-ray analysis method suitable for use in, for example, energy dispersive fluorescence X-ray analysis and the like. Background technique [0002] In fluorescent X-ray analysis, by irradiating X-rays emitted from an X-ray source to a sample and detecting fluorescent X-rays, which are characteristic X-rays irradiated from a sample, by an X-ray detector, thereby from The energy of the fluorescent X-rays can be used to obtain an energy spectrum, thereby performing qualitative or quantitative analysis on the sample. This fluorescent X-ray analysis is widely used in process / quality control because it can quickly analyze a sample without destroying the sample. In recent years, efforts have been made to improve the accuracy / sensitivity and trace measurement thus becomes possible, making it desirable to develop an analysis technique particularly for detection of harmful substances contained in...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N23/223G21K1/02
Inventor 深井隆行的场吉毅长谷川清
Owner HITACHI HIGH TECH SCI CORP
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