Cascading coarse-fine data coupling optical scanning device

Abstract

The invention relates to a cascading coarse-fine data coupling optical scanning device. The cascading coarse-fine data coupling optical scanning device is formed by a rotation double-prism system and an orthogonal deflection optical panel system in the direction of an optical axis; the rotation double-prism system adopts two rotation stepping motors to respectively drive two wedge-shaped prisms to rotate surrounding a Z axis to achieve coarse scanning; the orthogonal deflection optical panel system adopts the two rotation stepping motors to respectively drive two optical panels to deflect surrounding a Y axis and a Z axis; displacement translation of light beams within local ranges through the displacement translation of refraction light beams and an exquisite scanning requirement is satisfied; two sets of prim systems of the rotation double-prism system are both formed by a base, a rotation stepping motor, an encoder, a wedge-shaped prism, an optical frame, a worm gear, a worm and a mirror bracket; the orthogonal deflection optical panel system is formed by a second base, a third mirror bracket, a third rotation stepping motor, a first plane mirror, a third mirror frame, a third encoder, a fourth encoder, a fourth mirror frame, a second plane mirror, a fourth rotation stepping motor and a fourth mirror frame. According to the cascading coarse-fine data coupling optical scanning device, the light beam propagation direction is easy to control and control is convenient.

Description

technical field [0001] The invention relates to an optical scanning system, in particular to a high-precision optical scanning device integrating a rotating double prism and an orthogonally deflecting optical flat plate. Background technique [0002] As a typical beam scanning device, the rotating biprism has the characteristics of compact structure, small moment of inertia, and good dynamic performance. It can be widely used in laser communication, microstructure processing, biomedicine, military weapons and other fields. High-precision positioning of the beam can be achieved by rotating the double prism. The prior technology (Yun Maojin and other patents, patent number: 200310108487.7) mentioned that when the rotating double prism is used in the field of laser communication, the accuracy can reach the milliradian level. Due to the installation error of the prism during installation, such as the tilt of the prism or the tilt of the bearing, the scanning tracking accuracy i...

AI Technical Summary

Problems solved by technology

[0004] In order to solve the problem of laser coarse-fine coupling tracking and scanning, the previous technology (Li Anhu et al. patent, patent number: 201210439061.9) mentioned a cascaded prism coarse-fine coupling scanning device, but the structure of the device is complex, and the device is used to adjust the beam Pointing, unable to meet the beam translation requirements in the local range

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