2298 results about "Helium gas" patented technology

The invention relates to a purification device system and method for oxygen, nitrogen and crude neon and helium, based on a non-low-temperature gas purification technology, hydrogen removal of crude neon and helium is coupled with regeneration of a nitrogen deoxidizing adsorbent, purification of nitrogen is coupled with a regeneration process of removing carbon dioxide and water from oxygen, and linkage purification and impurity removal of oxygen, nitrogen and crude neon and helium can be carried out. Therefore, efficient purification of nitrogen, oxygen and crude neon and helium is achieved.

The invention discloses a process system for separating and purifying helium from helium-containing natural gas, which comprises a pretreatment system, a membrane separation system, a VPSA decarburization system, a TSA refined removal system, a first pressurization system, a primary membrane separation system, a second pressurization system, a secondary membrane separation system, a third pressurization system, a PSA purification system and an alloy dehydrogenation system which are sequentially connected step by step through pipelines, the fourth pressurization system is arranged between the PSA purification system and the TSA refined removal system; the impermeable gas discharged by the membrane separation system is fed into a natural gas pipeline network; low-pressure desorbed gas discharged by the VPSA decarburization system and desorbed gas discharged by the TSA fine desorption system are used for being fed into a fuel pipe network; and impermeable gas discharged by the first-stage membrane separation system and desorbed gas discharged by the PSA purification system are used for refluxing to the TSA fine removal system. According to the process system, helium can be directly separated and purified from the helium-containing natural gas which is exploited from a gas field and pretreated, the helium recovery rate is high, the process flow is simple, and the energy consumption is low.

A feed gas including neon, nitrogen, and helium is cooled in a heat exchange system to a first temperature to produce a two-phase mixture that is introduced into a first phase separator and separated into a nitrogen-rich liquid and a first gaseous crude neon stream. The pressure is reduced in at least a portion of the nitrogen-rich liquid, which is vaporized in the heat exchange system to generate a portion of the refrigeration therein. The first gaseous crude neon stream is introduced into a first adsorber that removes impurities such as nitrogen. The gaseous crude neon stream is further cooled to a second temperature. A portion of the cooling duty may come from the heat exchange system and another portion may come from a cryocooler to produce a two-phase stream. The two-phase stream is separated in a second phase separator into a crude helium vapor stream and a crude neon liquid stream with the latter being introduced into a distillation column to produce a vent stream containing a helium impurity and a pure liquid neon product. The pure liquid neon product is vaporized in the heat exchange system to generate refrigeration and produce the pure gaseous neon product.

The invention discloses a temperature swing adsorption helium low-temperature purification system which comprises a vacuum cold box, and a first-stage dividing wall heat exchanger, a liquid cold medium Dewar, a high-temperature area adsorption unit, a second-stage dividing wall heat exchanger, a cold head heat exchanger and a low-temperature area adsorption unit are sequentially connected in the vacuum cold box in the gas transmission direction. Wherein the input end of the first-stage dividing wall heat exchanger is connected with the outside through a pipeline, and is used for introducing crude helium; the high-temperature area adsorption unit is used for adsorbing impurity gas with the boiling point temperature being greater than or equal to 77K in the crude helium, and the low-temperature area adsorption unit is used for adsorbing impurity gas with the boiling point temperature being 20K-30K in the crude helium, so that high-purity helium is obtained. According to the invention, not only can high-flow high-component impurity gas with the boiling point of 77K or above be treated, but also high-flow high-component impurity gas with the boiling point of 30K or below can be treated, and high-flow multi-component high-concentration industrial production working conditions can be better matched by adopting physical adsorption of the high-temperature and low-temperature region adsorbents.

The invention discloses an environment-friendly outdoor ring main unit, which belongs to the technical field of ring main units, and comprises a plurality of cabinet bodies, an environment-friendly gas cabinet, a sleeving frame and a peripheral detection plugging mechanism, wherein the peripheral detection plugging mechanism comprises a screw rod, a driving motor, a sleeving block, a sleeving rectangular plate, two plugging air bags, a connecting pipe, a circulating fan and a circulating pipe, and is also provided with a top detection plugging mechanism; and one side of the circulating pipe is also provided with a supplementing assembly. Through the peripheral detection plugging mechanism, the device has the advantages that the peripheral gas leakage part of the environment-friendly gas cabinet is automatically detected in time, long-time leakage of helium in the environment-friendly gas cabinet is avoided, waste of helium resources is greatly reduced, and the environmental protection property of the outdoor ring main unit is greatly improved, so that the problem that the gas leakage part is difficult to automatically detect in time is solved; the automatic replacement of the protective gas is realized, and the problems of resource waste caused by long-time leakage of the protective gas and poor environmental protection property of the ring main unit are avoided.

The invention discloses a low-exploration-degree helium favorable area optimization evaluation method based on unit partition, and belongs to the technical field of helium exploration and evaluation. The method comprises the following steps: firstly, systematic carding and analysis are performed on comprehensive geological data of a research area, and helium reservoir forming conditions of the research area are preliminarily evaluated; then determining a potential target stratum where helium exists, and judging the source of helium; then, the main enrichment type of helium in the research area is determined, and a specific helium resource evaluation unit is reasonably divided according to the main enrichment type; on the basis, the helium resource quantity in the unit range is calculated, so that the helium storage potential and the exploitation value of the region are scientifically evaluated. And finally, comprehensively applying qualitative and quantitative evaluation methods, determining the range of the helium favorable area, and determining the resource quantity of the helium favorable area in the area. The method provided by the invention provides powerful technical support for helium resource exploration and development in a low-exploration-degree region.

The invention belongs to the technical field of welding seam detection, and particularly relates to a welding seam detection device for a magnetic levitation traffic low-vacuum pipeline, which is characterized in that a helium mass spectrum leakage detection structure is arranged on the outer side of the vacuum pipeline, a helium inflation structure is arranged on the inner side of the vacuum pipeline, and a rolling structure is arranged at the bottom end of the vacuum pipeline and comprises a third base; supports are symmetrically fixed to the two sides of the top face of the third base, V-shaped frames are hinged to each support in a bilateral symmetry mode, rollers are connected between the ends of the two V-shaped frames, the two ends of a rotating shaft of each roller penetrate through the two V-shaped frames respectively and are rotationally connected with the contact positions of the two V-shaped frames, one end of each roller penetrates through the corresponding V-shaped frame and is fixedly provided with a first gear, and protective covers are fixed to the end faces of the V-shaped frames; a gear motor is fixedly installed on the outer end face of the protective cover, an output shaft of the gear motor penetrates through the protective cover to fix a second gear, the second gear is meshed with the first gear, and the two rolling structures are arranged in a mirror symmetry mode. The device does not need to lay a leak detection tool around a welding seam, facilitates leak detection, improves leak detection efficiency, and improves leak detection accuracy.

The invention discloses a device and a method for testing the negative carbon amount in the whole process of sealing carbon dioxide by a filling body. The device comprises a filling body sealing carbonization subsystem, a high-pressure gas injection subsystem, a triaxial stress loading subsystem, a constant-temperature control subsystem, a data acquisition subsystem and a vacuumizing subsystem. The stress loading subsystem and the constant temperature control subsystem are used for simulating real filling and sealing conditions, helium and carbon dioxide are injected through the high-pressure gas injection subsystem, and the high-pressure gas injection subsystem is used for measuring the free space volume of the reaction kettle and the negative carbon amount and permeability of a filling body. According to the invention, the problem that the sealing capacity and the sealing efficiency are difficult to accurately measure in the existing simulation test for sealing carbon dioxide by the filling body is solved, and the whole-process simulation test for sealing carbon dioxide by the filling body under triaxial stress loading, temperature control and gas injection pressure control can be realized; the negative carbon amount and the permeability of the filling body in the whole sealing process can be accurately tested, and experimental support is provided for research of a carbon dioxide sealing mechanism of the filling body and technical field application thereof.

The present invention includes a novel illuminated ornamental display, and in particular a helium-free balloon coupled with an a externally mounted lighting assembly. In this preferred embodiment, the helium-free balloon and lighting assembly provide the appearance of a holiday ornament, and in particular a hanging Christmas tree ball ornament.

The invention provides a high-temperature superconducting rotor local hot spot eliminating device for circulating cold helium, and relates to the technical field of superconducting synchronous phase modifiers, the high-temperature superconducting rotor local hot spot eliminating device comprises a supporting sleeve, six sets of superconducting coil assemblies are uniformly installed in the circumferential direction of the supporting sleeve, and each set of superconducting coil assembly comprises a step core block fixedly connected to the surface of the supporting sleeve. Three double-layer superconducting wire plates are uniformly arranged on two sides of the stepped core block, and each double-layer superconducting wire plate is fixedly connected with a runway type superconducting coil. The annular guide rail driving mechanism drives the driving wheel to rotate and cooperates with the driven wheel to drive the transmission belt to rotate, that is, the transmission belt drives the movable cold guide plate to rotate along the runway type sliding rail and move to the local hot spot generation position to exchange heat with the movable cold guide plate. According to the invention, the purpose of cooling local hot spots is achieved, and the problems of local temperature rise and local quenching of the magnet are avoided.

The invention belongs to the technical field of aviation electric propulsion, and relates to a hydrogen fuel cell superconducting hybrid electric propulsion system based on hydrogen and helium heat exchange cooling, which is suitable for megawatt level branch aircrafts and comprises a liquid hydrogen storage tank, a hydrogen and helium heat exchanger, a hydrogen fuel cell, a lithium battery, an inverter, a superconducting motor, a propeller and other core components. The liquid hydrogen storage tank vaporizes liquid hydrogen through the micro-channel plate type hydrogen-helium heat exchanger and stably supplies the vaporized liquid hydrogen to the hydrogen fuel cell to generate electric energy; helium is used for a low-temperature cooling loop and cooling key assemblies such as a superconducting motor, a low-temperature inverter, a superconducting cable and a hydrogen fuel cell, and it is ensured that the key assemblies stably operate at the optimal working temperature. The hydrogen fuel cell and the lithium battery cooperatively provide electric energy for the superconducting electric propulsion system, the integrated energy management controller dynamically adjusts the output power of the fuel cell and the lithium battery by adopting a state machine strategy, and accurate monitoring and optimal distribution of working parameters of all components are achieved. The optimal heat balance and power output are ensured to be realized in different flight stages such as takeoff, cruise and landing; according to the hydrogen fuel cell hybrid electric propulsion system based on hydrogen and helium heat exchange cooling, the power generation efficiency and the operation stability of the hydrogen fuel cell are remarkably improved, the overall energy conversion efficiency is improved, and the high-power and high-efficiency power extraction requirements of megawatt aircrafts are fully met.

The invention relates to an air conditioner pipeline air tightness detection device, and belongs to the technical field of air tightness detection.The air conditioner pipeline air tightness detection device comprises a detection box, a lifting plate is arranged above the detection box in a lifting mode, and lifting electric telescopic rods for driving the lifting plate to do lifting motion are fixedly arranged on the two sides of the detection box; a helium detector is arranged on the upper side of the lifting plate, a suspension support is arranged on the lower side of the lifting plate, a plurality of automobile air conditioner pipelines are arranged on the suspension support, a first sealing mechanism is arranged on one side of the detection box, and a second sealing mechanism is arranged on the other side of the detection box. The first sealing mechanism is used for sealing one ends of the multiple automobile air conditioner pipelines, the second sealing mechanism is used for sealing the other ends of the multiple automobile air conditioner pipelines, helium is pumped in, the multiple automobile air conditioner pipelines can be detected at a time, air leakage parts are marked, and the detection precision and efficiency can be improved.

The invention relates to the technical field of coal bed gas resource exploration, in particular to a coal rock methane adsorption quantity correction method based on a coal macromolecular model, which comprises the following steps: characterizing coal rock physicochemical properties; constructing a three-dimensional coal macromolecular model by utilizing molecular dynamics simulation, and verifying the coal macromolecular model; detecting the free space volume of the model by adopting a molecular probe method; performing a volumetric method coal rock methane adsorption test; determining the free space volume change under the series of test pressures through helium; and replacing the coal rock free space volume measured by helium with the coal rock free space volume measured based on a methane probe in molecular simulation so as to correct the methane adsorption isotherm. The method solves the problem that accurate determination and dynamic change of the free space volume are not considered in an existing volumetric method isothermal adsorption test.

The invention discloses a treatment method for helium holes of an electrostatic chuck, and belongs to the technical field of electrostatic chucks, and the treatment method comprises the following steps: S1, pretreating a gas passage opening and the surface of a substrate: cleaning the helium holes and fine cracks of the substrate, and roughening the surface of the substrate; s2, a ceramic piece is glued to the helium hole opening, wherein the ceramic piece and the side wall of the helium hole opening are tightly attached and bonded together through an adhesive; s3, filling the helium hole ceramic piece with insulating glue: filling holes, cracks and other fine interfaces; s4, grinding the insulation paste filling part to be flush with the surface of the substrate so as to keep the overall flatness; s5, performing meltallizing on the surface of the substrate by using a meltallizing process to obtain the meltallizing coating, uniformly covering the insulating glue filling layer with the meltallizing coating, and forming good combination with the substrate; and S6, grinding and polishing: after the meltallizing coating is completed, grinding or polishing the meltallizing coating to ensure that the surface of the meltallizing coating is smooth.

The invention provides an oriented ultrathin FER zeolite molecular sieve membrane as well as a preparation method and application thereof. The preparation method comprises the following steps: firstly, synthesizing a monodisperse FER zeolite nanosheet with a high length-depth ratio through a hydrothermal method; preparing a seed crystal liquid, and coating the surface of a porous carrier with the seed crystal liquid to form an oriented seed crystal layer; and carrying out hydrothermal epitaxial growth in a secondary growth solution. Through innovative design of seed crystal synthesis and epitaxial growth, the FER zeolite membrane prepared by the method has a structure with high alpha-axis preferred orientation, submicron controllable thickness, compactness and no defect. The membrane can be used for accurately screening gas molecules with small size difference by utilizing six-membered ring pore channels uniformly arranged along an a axis. When helium and methane or carbon dioxide are separated, the membrane shows permeation flux and separation selectivity far superior to those in the prior art, provides a brand new technical approach for efficient and low-energy-consumption recovery of helium and other high-value gases in the industry, and has great industrial application value.

The present invention relates to a heat exchanger rupture experimental system and method for a fusion reactor helium-cooled blanket cooling system. The heat exchanger rupture experimental system for a fusion reactor helium-cooled blanket cooling system comprises: a first circuit for conveying helium; a second circuit for conveying water; a simulated rupture pipe, one end of which is connected to the first circuit and the other end of which is connected to the second circuit, and a valve is provided on the simulated rupture pipe; and a steam-water collection device, which is provided on the helium conveying pipe. By providing the heat exchanger rupture experimental system for a fusion reactor helium-cooled blanket cooling system, the effects of a heat exchanger rupture accident on the pressure and temperature of the secondary water circuit, as well as the mechanism and possible effects of secondary water entering the helium circuit through the rupture, can be conveniently studied through simulated tests.

The helium extraction system is used for extracting helium in BOG and comprises a low-temperature rectification device, a catalytic dehydrogenation device, a drying device and a pressure swing adsorption device which are sequentially connected through a pipeline. The low-temperature rectification device can rectify and concentrate helium in BOG, the catalytic dehydrogenation device can catalytically oxidize hydrogen in the BOG and remove the hydrogen in the BOG, the drying device can remove moisture in the BOG, and the pressure swing adsorption device is a normal-temperature pressure swing adsorption device and can separate and purify the helium in the BOG; the low-temperature rectification device comprises a first compressor, a heat exchanger, a rectification tower, a condensation evaporator, a gas-liquid separator and a second compressor, the inlet end of the first compressor can be connected with a BOG gas source, and the first compressor, the rectification tower, the condensation evaporator and the gas-liquid separator are sequentially connected through pipelines; a connecting pipeline between the first compressor and the BOG gas source and a connecting pipeline between the first compressor and the rectifying tower respectively form a circulation loop through the heat exchanger, the second compressor and the condensation evaporator; according to the extraction system, the number of dynamic equipment and static equipment in an existing device for extracting helium from BOG is reduced, the input cost is reduced, and the energy consumption and the operation difficulty are reduced.

A water hydraulic cylinder impact leakage detection test bench based on helium detection, the test bench comprising a test bench body, a water hydraulic cylinder (12), a helium cylinder (14), a sealed container (16) and an impact device, wherein the water hydraulic cylinder (12) is detachably mounted on the test bench body; an outlet end of the helium cylinder (14) is in communication with a rodless cavity of the water hydraulic cylinder (12), and a pressure-reducing valve (13) is mounted between the helium cylinder (14) and the water hydraulic cylinder (12); the sealed container (16) is detachably mounted in a rod cavity of the water hydraulic cylinder (12), and a helium mass spectrometer leak detector (15) is mounted on the sealed container (16); and the impact device is fixedly mounted on the test bench body, is connected to a piston rod of the water hydraulic cylinder (12), and is configured to provide impact power for the water hydraulic cylinder (12). The test bench uses an accumulator (6) as a pressure power source, which can provide rapid, stable and high-flow oil, thereby solving the problem of the pressure and flow of ordinary hydraulic pumps failing to meet test requirements; and compared with traditional impact generation by using hammer dropping, the test bench can precisely control the magnitude of the generated impact by means of the pressure of the accumulator (6), and is safe and reliable.

The present invention relates to the technical field of special gas purification, and specifically discloses a porous adsorption material for removing neon from helium and a preparation method thereof. The method comprises the following steps: (1) preparing a lignin raw material treated by fermentation; (2) preparing a carbon precursor; (3) placing the carbon precursor in a mixed solution containing a metal salt and a surfactant, stirring and impregnating to obtain a carbon precursor impregnated with the metal salt; (4) washing the carbon precursor impregnated with the metal salt to remove the excessively deposited metal salt, and drying to obtain a washed carbon precursor; (5) activating and creating pores in the washed carbon precursor with carbon dioxide at a high temperature to obtain a porous adsorption material for removing neon from helium. The porous carbon adsorption material prepared by the present invention using renewable natural biomass raw materials has a uniformly distributed pore structure and has a high adsorption and capture ability for neon under low-temperature conditions, and can effectively remove neon impurities in helium.

The invention belongs to the technical field of power distribution equipment, and particularly relates to a high-protection type explosion-proof power distribution device, which comprises a power distribution cabinet and a back plate arranged in the power distribution cabinet, and further comprises an inflation protection unit arranged on the side wall of the back plate and communicated with the interior of the power distribution cabinet, and the inflation protection unit is filled with helium; the air pressure regulation and control unit is arranged at the top of the power distribution cabinet and is communicated with the interior of the power distribution cabinet; and the two voltage reduction units are arranged at the bottom of the power distribution cabinet and are communicated with the interior of the power distribution cabinet. The positive pressure design is adopted, explosion-proof protection is carried out on the power distribution cabinet, the air pressure stability of the positive pressure gas in the power distribution cabinet can be kept, the explosion-proof effect is good, meanwhile, the positive pressure gas can be used for cooling the power distribution cabinet, and personnel are automatically reminded to maintain the power distribution cabinet based on the power distribution power of the power distribution cabinet.

The invention provides a neon removal system for producing high-purity helium, and particularly relates to the technical field of gas purification, and the neon removal system for producing the high-purity helium comprises a circulation unit and a purification unit, wherein the circulating unit comprises a compressor, an oil filtering device, a first heat exchanger, a second heat exchanger, a first adsorber group, a third heat exchanger, an expansion machine and a fourth heat exchanger; the circulating unit further comprises a liquid nitrogen source, a pipeline of the liquid nitrogen source is connected with one inlet of the second heat exchanger, and the liquid nitrogen source is connected to the outside from an outlet of the second heat exchanger; the purification unit comprises a first heat exchanger, a second heat exchanger, a third heat exchanger and a second adsorber group, through pre-cooling of the liquid nitrogen source and expansion of the expansion machine, the raw material helium is cooled to 20 K, then freezing condensation separation is conducted through the second adsorber group in the 20 K temperature zone, and high-purity helium which is lower in neon content and meets the requirement can be obtained.

The invention discloses an inverted 2K liquid-helium-free low-temperature probe station based on a GM refrigerating machine. The inverted 2K liquid-helium-free low-temperature probe station comprises a 2K plate, a vacuum cavity, a refrigerating system and a heat insulation assembly. The refrigerating system comprises a GM refrigerating machine, a thermal switch and a helium circulating system, and the GM refrigerating machine adopts a two-stage GM refrigerating machine, is inverted and extends into the vacuum cavity; the helium circulation system comprises a superflow helium pool installed at the bottom of the 2K plate, the helium circulation system takes away the cooling capacity of the refrigerating machine through circulation helium, the temperature is further reduced through throttling cooling and evacuation pressure reduction, and a 2K low-temperature environment is achieved at the 2K plate. The thermal switch provides cooling capacity for the 2K plate during initial operation so as to realize cooling; the heat insulation assembly comprises multiple stages of heat radiation screens and is used for reducing radiation heat leakage to the vacuum cavity. The 2K plate layout with the 2K plate temperature lower than 2K and the upward direction can be provided, and extra refrigerating working media such as liquid helium are not consumed.

The utility model belongs to the technical field of ultralow-vibration low-temperature refrigeration, and particularly relates to a dry-type ultralow-vibration closed-cycle low-temperature liquefaction system which comprises a liquefier part, the liquefier part is connected with a low-temperature thermostat part through a low-loss liquid conveying pipe part, and the low-temperature thermostat part is connected with the liquefier part through a circulation gas circuit part. According to the dry-type ultralow-vibration closed-cycle low-temperature liquefaction system, a first-stage cold head and a second-stage cold head in a refrigerating machine are arranged to reach 40K and 4K respectively, due to the air pressure difference, high-purity helium entering the first-stage cold head for heat exchange can be subjected to heat exchange to reach 40K, then enters a second-stage cold head heat exchanger to be subjected to heat exchange to reach 3K, and then passes through a low-temperature needle valve, so that the temperature of a low-temperature thermostat is reduced to be between 2 and 3k, and therefore the heat exchange efficiency is improved. Helium subjected to heat exchange is pumped away through the circulating pump for circulation, the low-loss liquid conveying pipe is fixed, and vibration transmitted by the liquefier part can be filtered.

The invention relates to a device and a process for purifying impurity gas in a disilane product synthesized from silane. The device comprises a gas inlet system, an adsorption system and a rectification system, the adsorption system comprises a first adsorption tower and a first vacuum pump for desorbing the first adsorption tower, and the first adsorption tower is communicated with the gas inlet system; the rectification system comprises a first rectification tower and a second rectification tower; the first rectification tower is communicated with the first adsorption tower through a first vacuum pump; the second rectifying tower is communicated with the first rectifying tower; the process comprises the following steps: adsorbing sample gas by a first adsorption tower; feeding gas into a first rectifying tower through a first vacuum pump; the first rectifying tower bottom material enters a second rectifying tower; a product disilane gas is obtained from the top of the second rectifying tower. According to the invention, high-content hydrogen, argon, helium and other light components in the product gas are adsorbed, and are primarily separated from silane, disilane, trisilane and the like. And compared with a gas-liquid separation mode only adopting condensation, the energy consumption and the disilane product loss in the purification process can be obviously reduced.

A substrate-processing method is provided for filling a recess formed in a surface of a substrate with a silicon nitride film. The substrate-processing method includes: a) repeating a cycle that includes i) supplying a silicon precursor gas to form an adsorption layer on the substrate, ii) supplying a nitrogen-containing gas to cause nitriding of the adsorption layer, and iii) supplying a helium-containing gas and generating helium plasma in a processing chamber to expose the substrate to the helium plasma, thereby forming an adsorption inhibition region on the substrate; and b) changing conditions for generating the helium plasma according to an increase in a number of the cycles repeated.

The invention belongs to the technical field of ferrophosphorus recovery, and provides a method for removing fluorine from a ferrophosphorus acid solution in a lithium iron phosphate battery recovery process. The method comprises the following steps: introducing a ferrophosphorus acid solution into a device, then introducing air, nitrogen, argon, helium and other gases which do not react with sulfuric acid, phosphoric acid, ferric ions and water, enabling water to enter a gas phase from the solution through gas-liquid contact with the ferrophosphorus acid solution, and enabling HF to enter the gas phase along with the water through hydrogen-bond interaction force between the HF and water molecules. According to the method, the total amount of fluorine in the ferrophosphorus solution is reduced, the concentration is not changed, no impurity component is introduced, and the obtained acid-containing tail gas can be recycled and enriched to obtain an HF aqueous solution or a fluoride salt aqueous solution.

The invention discloses a recovery device and method of rare gas He for CVD (chemical vapor deposition) atmosphere, and relates to the field of rare gas recovery, the recovery device of rare gas He for CVD atmosphere comprises an alkaline drying device, a primary filtering device, a helium recovery membrane group, a trace impurity removal device and a precision filtering device which are connected in sequence, the alkaline drying device is connected with a waste gas outlet of the CVD reactor, the primary filtering device is used for preliminarily filtering waste gas to remove particle dust, and an outlet of the precision filtering device is connected with the helium recovery membrane group, so that high-purity helium obtained by the precision filtering device is circularly purified. And efficient recovery and purification of the rare gas He in the CVD atmosphere are realized. By means of the circulating purification design, the helium recovery rate is increased, product losses caused by one-time treatment are effectively reduced, and therefore resource waste is reduced.

The invention belongs to the technical field of hydrogen adsorption, leakage and sequestration simulation experiments, and particularly relates to a system and a method for detecting the hydrogen adsorption, leakage and sequestration capacities of soil. The system comprises a simulation bin system, a hydrogen inlet system, a helium inlet system, a water inlet system and a gas outlet system, the simulation bin system is divided into an air simulation bin, a sample bin and a gas source bin by a pressurizing device and a supporting device, and a water vapor heating disc is arranged in the gas source bin. The hydrogen inlet system is in valve control connection with the gas source bin, the helium inlet system is in valve control connection with the air simulation bin and the gas source bin, the water inlet system is in valve control connection with the steam heating disc, and the gas outlet system is in valve control connection with the air simulation bin and the gas source bin. The method comprises eight steps, and the processes of adsorption, leakage and sealing storage of hydrogen in soil when the hydrogen leaks upwards under different air temperatures and air pressures in the nature are simulated. Therefore, the system and the method can provide theoretical and technical guidance for earth surface exploration of natural hydrogen.

The invention discloses a helium detection device and method for the airtightness of a bonding interface and a bonding microcavity, and belongs to the field of the airtightness of MEMS devices. The device comprises a sample holder, a mass spectrometer, a molecular pump, a mechanical pump and other components, helium is used as detection gas, and the helium is leaked only through a bonding interface through a customized and processed test sample and sample holder structure, so that the interference of other leaks in a non-bonding area on a test result is avoided. The testing method comprises the steps of sample introduction, vacuum pumping, helium filling, signal detection, dynamic and steady state testing and the like, the helium leak rate is monitored in real time by combining with a helium mass spectrometer, and the minimum leak detection rate is that high-sensitivity air tightness detection is ensured. According to the method, the airtightness of the bonding interface can be independently evaluated, and a reliable basis is provided for development of a novel bonding process. The method is suitable for air tightness detection and evaluation of the bonding process in MEMS device processing and manufacturing.

The invention discloses a light adsorption-desorption-resistant adsorption tower, a coating process, a helium purification system and a helium purification method, and mainly aims to solve the problem that in the prior art of natural gas helium purification, adsorption tower equipment is aged and corroded, and the purity stability of a helium product is influenced by adsorption and desorption formed by the adsorption tower. The light adsorption tower resistant to adsorption and desorption is provided, the service life of adsorption equipment is prolonged while the purity stability of a helium product is improved, and meanwhile the cost of helium purification through adsorption is reduced through the structural design of a helium purification system.