The application discloses a chemical mechanical
polishing liquid and a
polishing method for soft
magnetic alloy. The
polishing liquid is composed of the following
raw material components in percentage by weight: 1.3wt%-1.8wt% of a chelating agent, 10wt%-13wt% of
abrasive, 7wt%-9wt% of a pH buffer, 3wt%-3.5wt% of a
corrosion inhibitor, 11wt%-13wt% of an
oxidizing agent and the balance of deionized water. The
abrasive is acidic silica
sol, the
oxidizing agent is
hydrogen peroxide, the
corrosion inhibitor is at least one of
glycine,
polyaspartic acid,
glutamic acid and
chitosan, the pH of the polishing liquid is 3-5, and the pH buffer is a
citric acid-
sodium citrate buffer. The polishing method comprises the following steps:
grinding the soft
magnetic alloy; performing chemical mechanical polishing rough polishing on the ground soft
magnetic alloy by using a rough polishing
slurry; performing chemical mechanical polishing fine polishing on the rough polished soft magnetic
alloy by using the polishing liquid, so that the soft magnetic
alloy with a smooth and flat surface is obtained. The polishing liquid is green, environment-friendly and
pollution-free, and the surface of the soft magnetic
alloy after polishing is smooth and flat.