High-temperature ceramic pressure sensor for pressure test in high temperature environment and processing method thereof

Abstract

The invention relates to the field of a pressure sensor, particularly a high-temperature ceramic pressure sensor for a pressure test in a high temperature environment and a processing method of the high-temperature ceramic pressure sensor. The effective pressure test can be implemented in a special high temperature environment for a long time. The high-temperature ceramic pressure sensor comprises a pressure sensing ceramic element, wherein a closed chamber is arranged inside the pressure sensing ceramic element; the upper and lower planes of the pressure sensing ceramic element are respectively provided with an electrode layer and a planar spiral inductor; the two electrode layers form a capacitor; and the capacitor is connected in series with the two planar spiral inductors to form an LC loop. The processing steps are as follows: a, curtain coating; b, punching; c, stacking and filling; d, laminating and thermal cutting; e, high-temperature sintering; f, printing and low-temperature sintering; and g, cavity sealing. The sensor and the method disclosed by the invention can design and realize a concrete structure of sensitive elements of the sensor at a totally new angle; the structure is ingenious and reasonable; and a passive wireless high-temperature ceramic pressure sensor for the detection in a noncontact wireless manner based on an LC resonance theory is realized, so that the pressure test can be performed for a long time at a high temperature higher than 300 DEG C.

Description

technical field [0001] The invention relates to the field of pressure sensors, in particular to a high-temperature ceramic pressure sensor for pressure testing in a high-temperature environment and a processing method thereof. Background technique [0002] Some special environments in aerospace and other fields are high-temperature environments, and the ambient temperature exceeds the working temperature range of the existing test device (the ambient temperature range given by the extreme value to make the sensor work normally), so the existing test device There are certain limitations in application in aerospace and other fields. Existing test devices can only be used in environments where the temperature change is within the working temperature range, and cannot be used in special high-temperature environments. For example, in the pressure test at a high temperature environment above 500°C, the existing pressure sensors are generally made of silicon materials, and such pre...

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Problems solved by technology

[0002] Some special environments in aerospace and other fields are high-temperature environments, and the ambient temperature exceeds the working temperature range of the existing test device (the ambient temperature range given by the extreme value to make the sensor work normally), so the existing test device There are certain limitations in application in aerospace and other fields. Existing test devices can only be used in environments where the temperature change is within the working temperature range, and cannot be used in special high-temperature environments.

For example, in the pressure test at a high temperature environment above 500°C, the existing pressure sensors are generally made of silicon materials, and such pressure sensors generally can only work in the range of 100~200°C. The reasons are: 1. The silicon material itself at high temperatures Electrical and mechanical properties will change. When the working temperature of silicon devices is >150°C, the electrical properties are unstable; when it is >500°C, the mechanical properties are unstable; when it is >600°C, semiconductor impurities diffuse and irreversible electrical parameters drift

2. The metal leads used for the electrical connection in the sensor are good heat conductors. The heat transfer of the leads will cause the temperature of the power supply and the signal circuit to rise. In the aerospace field, the missile-borne flight cannot dissipate heat to the environment. The system fails rapidly, which also illustrates the limitations of metal leads at high temperatures

[0003] At present, some researchers improve the existing pressure sensors by adding protective measures, or multiple isolations, or adding air pressure guide tubes. It has been verified by experiments that most of the improved pressure sensors can only operate at around 300°C. However, the introduction of heat-proof and heat-insulating structures increases the volume of the device, and the introduction of the air pressure guide tube causes the distortion of the test signal, which directly affects the test results; It can work in the range of ~500℃, but its working time can't be too long

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