Dosimetry using optical emission spectroscopy/residual gas analyzer in conjunction with ion current

Abstract

The present invention generally provides methods and apparatus for controlling ion dosage in real time during plasma processes. In one embodiment, ion dosages may be controlled using in-situ measurement of the plasma from a mass distribution sensor combined with in-situ measurement from an RF probe.

Description

CROSS-REFERENCE TO RELATED APPLICATIONS[0001]This application is a divisional application of co-pending U.S. patent application Ser. No. 11 / 681,313 (Attorney Docket No. 9615P1), filed Mar. 2, 2007, which is a continuation-in-part of co-pending U.S. patent application Ser. No. 10 / 971,772 (Attorney Docket No. 9615), filed Oct. 23, 2004, which is herein incorporated by reference.BACKGROUND OF THE INVENTION[0002]1. Field of the Invention[0003]Embodiments of the present invention generally relate to method and apparatus for processing a substrate. Particularly, embodiments of the present invention relate to methods and apparatus for monitoring dosages of one or more species during plasma processing of semiconductor substrates.[0004]2. Description of the Related Art[0005]It is important to control ion dosage during plasma processes, such as plasma enhanced chemical vapor deposition (PECVD) process, high density plasma chemical vapor deposition (HDPCVD) process, plasma immersion ion implan...

AI Technical Summary

Problems solved by technology

In contrast, plasma immersion ion implantation reactors present a difficult problem in dosimetry.

Typically, the atomic weight of the ions incident on the substrate cannot be precisely determined because such a reactor employs a precursor gas containing the desired ion implantation species as well as other species.

As a result, determining the boron dose from a measured current is difficult.

Another difficulty in implementing dosimetry in a plasma immersion ion implantation reactor is that the plasma ions impact the entire substrate continuously, so that it is difficult to effect a direct measurement above the substrate of the total ion current to the substrate.

Plasma immersion ion implantation reactors employing D.C. (or pulsed D.C.) plasma source power are susceptible to drift in the plasma ion current due to deposition of material on internal reactor components from the plasma.

One problem with such an arrangement is that the current measurement cannot distinguish between different atomic species, and therefore cannot provide an accurate measurement of the species of interest (e.g., boron).

Another problem is that the transmission of the measured current from the current sensor inside the cathode interior to an external controller or processor can be distorted by the noisy electromagnetic environment of the plasma reactor.

Another problem is that the orifice in the cathode constitutes an intrusion upon the ideal plasma environment, because the orifice can distort the electric field in the vicinity of the substrate periphery.

Furthermore, plasma passing through the orifice can cause problems by either sputtering the orifice surfaces or by depositing on the orifice interior surfaces, requiring the periodic cleaning of the orifice interior.

Moreover, real-time dose measurement in such a reactor is difficult.

However, a real-time does control is more and more in need as the feature size becomes smaller and smaller in the semiconductor devices.

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