Spatial resolution pressure intensity measurement system and method based on vacuum holographic optical tweezers

A space resolution and measurement system technology, applied in vacuum gauges, measuring devices, measuring fluid pressure, etc., can solve problems that are difficult to achieve and achieve good measurement accuracy

Active Publication Date: 2021-06-01
ZHEJIANG UNIV +1
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  • Abstract
  • Description
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  • Application Information

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Problems solved by technology

[0006] Traditional pressure measurement methods are difficult to measure the pressu

Method used

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  • Spatial resolution pressure intensity measurement system and method based on vacuum holographic optical tweezers
  • Spatial resolution pressure intensity measurement system and method based on vacuum holographic optical tweezers
  • Spatial resolution pressure intensity measurement system and method based on vacuum holographic optical tweezers

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Embodiment Construction

[0057] Below in conjunction with accompanying drawing and embodiment the present invention will be further described:

[0058] The vacuum holographic optical tweezers space-resolved pressure measurement system includes vacuum chamber VC, micro-nano particles MS, optical tweezers device and feedback cooling device, driving electric field device E, spatial light modulator SLM, polarization control and detection device and residual gas analyzer RGA; The driving electric field device E includes six electrodes, the polarization control and detection device includes a polarization control device and a polarization detection device, the polarization control device uses a first polarization beam splitter PBS1, and the polarization detection device includes a second polarization beam splitter PBS2 and a first photodiode PD1 , the first photodiode PD1 is used to detect optical signals, the optical tweezers device includes the first convex lens L1 and the second convex lens L2; ​​the opti...

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Abstract

The invention discloses a spatial resolution pressure measurement system and method based on vacuum holographic optical tweezers. The system comprises a vacuum cavity, micro-nano particles, an optical tweezers device, a feedback cooling device, a driving electric field device, a spatial light modulator, a polarization control and detection device and a residual gas analyzer, laser is emitted from a laser source, enters a first polarizing beam splitter through the first beam splitter to be transmitted, is reflected and modulated by the spatial light modulator and is transmitted and converged by a first convex lens to form captured light, and captured light irradiates the micro-nano particles to form a light trap capturing area; the captured light passes through the micro-nano particles, is transmitted and converged by a second convex lens and then enters a second polarizing beam splitter to be reflected and transmitted, and a light beam reflected by the second polarizing beam splitter enters a first photodiode; and six electrodes are arranged around the light trap capture region. According to the invention, the control flexibility of the holographic optical tweezers is utilized, and the local detection means of the micro-nano particles is combined, so that the pressure distribution measurement of the micro-nano scale spatial resolution under high vacuum can be realized.

Description

technical field [0001] The invention relates to an instrument and method for measuring the spatial distribution of micro-nano-scale local pressure, belonging to the technical field of precision measurement, in particular to a space-resolution pressure measurement system and method based on vacuum holographic optical tweezers. Background technique [0002] A vacuum gauge is an instrument that measures vacuum or pressure. There are a wide range of applications in scientific research and industrial fields. Traditional vacuum measurement methods include ionization vacuum gauges, capacitive film vacuum gauges, magnetic levitation rotor vacuum gauges, etc., and their principles and calibration methods are different. For example, the ionization vacuum gauge ionizes the gas molecules by strengthening the electric field, and then measures the conductivity. The electrical conductivity depends on the density of the ionized gas molecules around, so that the pressure can be deduced; th...

Claims

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Application Information

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IPC IPC(8): G01L21/00
CPCG01L21/00
Inventor 胡慧珠陈铭陈杏藩高晓文李楠刘承
Owner ZHEJIANG UNIV
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