The invention relates to a preparation method of
gallium arsenide thin-film multijunction stacked solar cells. The preparation method is characterized by including the steps of firstly, allowing for reverse growth of an epitaxial layer to prepare a GaAs three-junction
solar cell; secondly, bonding the
cell prepared in the step 1 to a
Si substrate; thirdly, stripping a Ge substrate; fourthly, adhering a low-cost substrate; and fifthly, stripping the
Si substrate. The preparation method allows for epitaxial growth of a top
cell and an
intermediate cell prior to growth of a bottom
cell, and accordingly the lattice subjected to epitaxial growth firstly is guaranteed to match with perfect epitaxial growth of the top cell and the
intermediate cell;
doping uniformity and film reliability in large-area epitaxial thin films are increased, and
photoelectric conversion efficiency is further improved; by the use of the low-cost support substrate lower than Ge in
specific weight, the weight of the cells is reduced, the
power ratio of the solar cells is increased, the cost of the cells is reduced effectively, and application prospect of the III-V compound solar cells is improved greatly.