Piezoelectric-static compound micro machine vibration energy collector and manufacture method thereof

Abstract

The invention relates to a piezoelectric-static composite micro machine vibration energy collector and a manufacture method of the collector, and relates to an energy collecting device. The piezoelectric-static composite micro machine vibration energy collector comprises a chip main body and a chip external circuit, wherein the chip main body is of a three-layer laminated structure, and the chip main body comprises an upper glass piece device, an SOI (Silicon On Insulator) piece device, a lower glass piece device, a piezoelectric ceramic wafer device, a piezoelectric ceramic wafer electrode and a variable capacitance plate electrode. The chip external circuit is provided with a rectification circuit, a filter capacitor, a first switch, a second switch and an energy storage capacitor, or is provided with a rectification circuit, a filter capacitor, a first switch, a second switch and an energy storage capacitor and a variable capacitance plate starting power supply. The manufacture method comprises the following steps of: manufacturing the lower glass piece device; manufacturing the SOI piece device; manufacturing the upper glass piece device; assembling; and connecting the chip external circuit. According to the collector and the manufacture method, the process is simple, the defects of poorer device stability and performance and the like caused by,manufacturing a PZT (Piezoelectric Transducer) by using the traditional sol gel can be overcome, and wide band and high efficiency collection of energy can be realized.

Description

technical field [0001] The invention relates to an energy harvesting device, in particular to a piezoelectric-electrostatic composite micromechanical vibration energy harvester (chip type) and a manufacturing method thereof. Background technique [0002] With the expansion of sensor network functions, more and more micro-sensing systems are placed in special environments (such as the seabed, inside building walls, inside the human body, unattended places such as mountains or islands, etc.), At this time, the replacement of conventional batteries becomes extremely inconvenient, even impossible. Therefore, the lack of small size, high energy density, and long-life power supply has become a "bottleneck" restricting the practical application of micro-sensing systems. In order to solve this "bottleneck" problem, researchers have proposed the concept of "environmental energy harvesting", that is, collecting natural environmental energy (such as light energy, heat energy, electrom...

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Problems solved by technology

[0005] The purpose of the present invention is to provide a piezoelectric device with a relatively simple preparation process, which can overcome the disadvantages of poor device stability and performance caused by the traditional sol-gel preparation of PZT, and at the same time realize broadband and high-efficiency collection of energy. - Electrostatic composite micromechanical vibration energy harvester (chip type) and its manufacturing method

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