Double-closed-loop control circuit of micromechanical gyroscope

A closed-loop control circuit and micro-machined gyroscope technology, applied in the direction of automatic power control, electrical components, steering sensing equipment, etc., can solve the problem of not considering the driving mode of the micro-machined gyroscope, affecting signal detection, etc., to achieve easy control and suppression. The effect of noise floor, improved linearity and stability

Active Publication Date: 2012-08-01
NORTHWESTERN POLYTECHNICAL UNIV
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  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

However, this system does not consider the influence of the frequency and amplitude stability of the micro-mechanical gyroscope driving mode on the performance; at the same time, due to the parasitic capacitance generated by some processing techniques during the micro-machining process, the driving signal in the driving mode

Method used

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  • Double-closed-loop control circuit of micromechanical gyroscope
  • Double-closed-loop control circuit of micromechanical gyroscope
  • Double-closed-loop control circuit of micromechanical gyroscope

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Embodiment 1

[0020] The micromachined gyro dual closed-loop control circuit proposed in this embodiment includes a self-excited oscillation closed-loop circuit in the drive mode and a 6-order continuous band-pass ΣΔM closed-loop control circuit in the detection mode. In this embodiment, the micromachined gyroscope drives and detects The central capacitance of the modal comb is C=3.43e-13F, and the mass of the central mass is m x = m y =2×10 -6 Kg, the resonant frequency of the driving mode is f x =4.30KHz, the resonant frequency f of the detection mode x =4.33KHz, bandwidth BW=50Hz.

[0021] refer to Figure 5 , the self-excited oscillation closed-loop control circuit of the driving mode in this embodiment is: the frequency is f 1 = 2MHz high frequency carrier V carry (t)=5sin(2πf 1 t) load on the central mass of the micromechanical gyroscope 1, and load the initial drive signal Vdc+Vac and Vdc-Vac on the drive feedback electrode, Vdc=5V, where ω x =2πf x , f x =4.30KHz; make t...

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Abstract

The invention discloses a double-closed-loop control circuit of a micromechanical gyroscope and belongs to the field of guide or control devices based on a Coriolis effect. The circuit is used for closed-loop control of driving and detection modes of the micromechanical gyroscope. A simplified self-oscillation closed-loop control circuit based on automatic gain control (AGC) is employed for the driving mode of the circuit, and the frequency stability and amplitude stability of the micromechanical gyroscope in the driving mode can be effectively improved; and a six-order continuous band-pass Sigma Delta M closed-loop control circuit for the detection mode has six-order noise reshaping capacity, and the signal to noise ratio (SNR), linearity and zero-bias stability of a system detection signal can be improved. The double-closed-loop control circuit of the micromechanical gyroscope is easy to control and simple, the accuracy of a system is improved, the SNR of the system is high, and the system is self-adaptively adjusted and high in stability.

Description

technical field [0001] The invention relates to a circuit respectively used for closed-loop control of a micromechanical gyroscope drive mode and a detection mode, and belongs to the field of guidance or control devices utilizing the Coriolis effect. Background technique [0002] For micromechanical gyroscopes, the closed-loop driving mode of the driving mode can effectively improve the stability of the driving mode vibration, and the vibration frequency f x and amplitude a x Locked at a certain value; Yang Bo et al. from Southeast University proposed a decoupled closed-loop drive scheme in the paper "Research on an Improved High-precision Silicon Micro Gyroscope Closed-loop Drive Scheme", and its principle block diagram refers to figure 1 . The driving direction of micromachined gyroscope 1 outputs displacement signal x(t)=a x · sin(ω x t+φ), where ω x =2πf x ; After the pre-detector 2 outputs the voltage signal u(t), it is divided into two circuits: the amplitude cont...

Claims

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Application Information

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IPC IPC(8): G01C19/56H03L7/099
Inventor 常洪龙陈方谢建兵苑伟政
Owner NORTHWESTERN POLYTECHNICAL UNIV
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