Large-diameter detachable piezoelectric deforming reflection mirror

A deformable mirror, large-caliber technology, applied in the direction of piezoelectric devices/electrostrictive devices, piezoelectric effect/electrostrictive or magnetostrictive motors, electrical components, etc., to shorten the manufacturing cycle, easy replacement, maintenance convenient effect

Inactive Publication Date: 2009-08-12
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The technical problem to be solved by the present invention is: to overcome the deficiencies of the prior art; to provide a large-diameter detachable piezoelectric deformation mirror, which can meet the requirements of: easy replacement of the driver, good maintainability; adjustable original surface shape;

Method used

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  • Large-diameter detachable piezoelectric deforming reflection mirror
  • Large-diameter detachable piezoelectric deforming reflection mirror
  • Large-diameter detachable piezoelectric deforming reflection mirror

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Experimental program
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Embodiment Construction

[0020] The present invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0021] The structural diagram of a large-diameter detachable piezoelectric deformable mirror in this embodiment is as follows figure 2 As shown; there is an elastic piece 2 with pre-tightening force between the mirror 1 and the piezoelectric driver 4, and the mirror 1 and the elastic piece 2 can be connected mechanically or glued together; the elastic piece 2 and the base 3 use screws Connection; one end of the piezoelectric actuator 4 is bonded with a metal ball head in a spherical shape, the other end is a plane, one end of the plane is bonded to the precision thread adjustment mechanism 5, and one end of the spherical surface is in contact with the elastic sheet 2 but has no mechanical connection or adhesive connection; precision thread The adjustment structure 5 is used to adjust the pre-tightening force between the elastic sheet 2 and t...

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PUM

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Abstract

The invention relates to a large-caliber demountable piezoelectric deformable mirror, which comprises a mirror surface, a pedestal and a piezoelectric actuator, and is characterized in that an elastic sheet is clamped between the mirror surface and the piezoelectric actuator, and the piezoelectric actuator is tightly supported against the elastic sheet without mechanical and gluing connections. The mirror also comprises a precise screw thread adjusting structure for adjusting the pretightening force or the distorting lens surface shape between the elastic sheet and the piezoelectric actuator. The piezoelectric actuator is not connected with the mirror surface directly, the piezoelectric actuator is easy to replace, and the deformable mirror is convenient to maintain; the optical processing of the mirror surface and membrane plating can be performed when the actuator is processed to shorten the manufacturing cycle of the deformable mirror; and the piezoelectric actuator is applicable to the deformable mirrors with large calibers, large die opening and high requirement on maintainability.

Description

technical field [0001] The invention belongs to the technical field of wavefront correctors for adaptive optics systems, and relates to a large-diameter detachable piezoelectric deformable reflector, which is derived from a separate piezoelectric stack deformable reflector, and is suitable for large-diameter, large-pole spacing, and maintainable Deformable mirrors with high performance requirements. Background technique [0002] The deformable mirror is one of the core devices of the adaptive optics system. Its main function is to generate the required surface shape of the system in real time and control to correct the distorted wavefront. attached figure 1 It is a schematic structural diagram of a classic separated piezoelectric stack deformable mirror. The mirror surface 1, the driver 2, and the base 3 are glued together. It has a compact structure, high rigidity, and good stability. It is suitable for deformable mirrors with a high density of driver units. Because of it...

Claims

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Application Information

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IPC IPC(8): G02B26/06G02B26/08H01L41/09H02N2/00
Inventor 张小军官春林姜文汉饶长辉邓建明许鸿叶青秀牟进博
Owner INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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