Large-diameter detachable piezoelectric deforming reflection mirror

Abstract

The invention relates to a large-caliber demountable piezoelectric deformable mirror, which comprises a mirror surface, a pedestal and a piezoelectric actuator, and is characterized in that an elastic sheet is clamped between the mirror surface and the piezoelectric actuator, and the piezoelectric actuator is tightly supported against the elastic sheet without mechanical and gluing connections. The mirror also comprises a precise screw thread adjusting structure for adjusting the pretightening force or the distorting lens surface shape between the elastic sheet and the piezoelectric actuator. The piezoelectric actuator is not connected with the mirror surface directly, the piezoelectric actuator is easy to replace, and the deformable mirror is convenient to maintain; the optical processing of the mirror surface and membrane plating can be performed when the actuator is processed to shorten the manufacturing cycle of the deformable mirror; and the piezoelectric actuator is applicable to the deformable mirrors with large calibers, large die opening and high requirement on maintainability.

Description

technical field [0001] The invention belongs to the technical field of wavefront correctors for adaptive optics systems, and relates to a large-diameter detachable piezoelectric deformable reflector, which is derived from a separate piezoelectric stack deformable reflector, and is suitable for large-diameter, large-pole spacing, and maintainable Deformable mirrors with high performance requirements. Background technique [0002] The deformable mirror is one of the core devices of the adaptive optics system. Its main function is to generate the required surface shape of the system in real time and control to correct the distorted wavefront. attached figure 1 It is a schematic structural diagram of a classic separated piezoelectric stack deformable mirror. The mirror surface 1, the driver 2, and the base 3 are glued together. It has a compact structure, high rigidity, and good stability. It is suitable for deformable mirrors with a high density of driver units. Because of it...

AI Technical Summary

Problems solved by technology

[0004] The technical problem to be solved by the present invention is: to overcome the deficiencies of the prior art; to provide a large-diameter detachable piezoelectric deformation mirror, which can meet the requirements of: easy replacement of the driver, good maintainability; adjustable original surface shape; The value index and the deformation index can be designed separately; the independent coating of the mirror surface can not be limited by the Curie temperature point of piezoelectric ceramics; the driver can be processed in parallel with the mirror surface, shortening the manufacturing cycle and other requirements

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