Vertical comb drive actuated deformable mirror device and method

Abstract

A deformable mirror includes a vertical comb actuator having a reflective surface attached thereto. The vertical comb drive includes stationary elements interspersed with moving elements. When a potential difference is provided between these elements, the moving elements are pulled downward, thereby deforming the reflective surface. The vertical comb drive typically includes a plurality of actuators, which are individually electrically addressed. Each actuator may be an array of interspersed elements or a cavity and corresponding tooth. Springs support the moving elements and bias the reflective surface in an original position. The vertical comb drive provides a large stroke and substantially linear voltage-versus-displacement curve throughout the stroke.

Description

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS[0002] This application claims priority under 35 U.S.C. .sctn.119(e) of provisional application U.S. Ser. No. 60 / 041,725 filed on Mar. 27, 1997 which is hereby incorporated by reference in its entirety.[0004] 1. Field of the Invention[0005] The present invention relates to adaptive optics. More particularly, it relates to the use of a vertical comb drive to actuate the deformable mirror in an adaptive optical system.[0006] 2. Description of Related Art[0007] Atmospheric turbulence has frustrated astronomers ever since telescopes were invented. Atmospheric turbulence introduces aberrations on the wavefront of visible light, causing stars to twinkle and distant objects to shimmer. Atmospheric turbulence also limits the resolution of microscopes, endoscopes, and other optical imaging systems.[0008] Adaptive optics systems can be used to measure and compensate for rapidly fluctuating wavefront complex, expensive, unreliable and difficult to ...

AI Technical Summary

Problems solved by technology

Atmospheric turbulence has frustrated astronomers ever since telescopes were invented.

Atmospheric turbulence introduces aberrations on the wavefront of visible light, causing stars to twinkle and distant objects to shimmer.

Atmospheric turbulence also limits the resolution of microscopes, endoscopes, and other optical imaging systems.

Adaptive optics systems can be used to measure and compensate for rapidly fluctuating wavefront complex, expensive, unreliable and difficult to maintain, thus putting them out of reach of amateur astronomers or commercial users.

Current adaptive Optics systems are also very heavy and operate at relatively slow speed making them unsuitable for airborne applications where the fluctuating wavefront distortions move past the aperture at a much faster rate than stationary systems.

The primary obstacles to wider use of adaptive optics systems are cost, complexity, and reliability.

Current laser communications have limited range due to atmospheric distortions that cause beam bending and scatter energy from the beam.

Such sectioning can be achieved with confocal imaging in principle but current CSLOs do not tap the potential of confocal imaging because the retinal image quality is too poor.

In current technology, the deformable mirror is also the most expensive component of the adaptive optical system.

However, current LCD devices suffer from limited fill factor, limited bandwidth, and inadequate dynamic range.

Bandwidth limitations will preclude the use of LCD's for airborne or missile applications.

However, current SPZT devices suffer from high current operation, significant actuator nonuniformity, relatively high power dissipation, and moderate hysteresis effect.

Moreover, these devices are relatively expensive when compared to liquid crystals or MEMS devices.

Unfortunately the current designs do not produce the vertical displacements necessary for use in an optical system.

Images