Optical waveguide sensor and preparation methods thereof

Abstract

The invention discloses an optical waveguide sensor and preparation methods thereof. The optical waveguide sensor comprises a structure as follows: an optical waveguide substrate medium consists of heat resisting optical materials and is provided with linear optical waveguides, and in which an optical grating structure is arranged in the linear optical waveguides. The invention further discloses many preparation methods of the structure. Another waveguide sensor comprises a structure as follows: the optical waveguide substrate medium consists of heat resisting optical materials and is provided with linear optical waveguides, and an optical grating structure is further arranged on the surface of the optical waveguide substrate. The invention further discloses many preparation methods of the structure. Because the optical waveguide apparatus has a simple module structure or a structure with few modules, the optical grating on the optical waveguide channel only has a harmonic module or few modules. When the environment temperature is changed, the refractive index of the optical waveguide material and the period of the optical waveguide grating can be changed, therefore, the change of temperature can be measured by measuring the change of wavelength of harmonic wave of the optical grating in the optical waveguide channel on the optical waveguide substrate. Due to the adoption of the laser technology and microelectronic production process, a plurality of optical waveguide grating sensing apparatuses can be further produced on a same substrate with low production cost and high efficiency.

Description

technical field [0001] The invention belongs to the technical field of optical fiber sensing, and more specifically relates to an optical waveguide sensor and a manufacturing method thereof. Background technique [0002] Fiber Bragg grating is a good sensor for measuring physical quantities such as temperature and stress. When physical quantities such as temperature and stress change, the response of the grating in the optical fiber to the optical frequency also changes. By measuring the response change of the optical frequency of the fiber grating, the change of physical quantities such as temperature and stress can be measured. Fiber grating sensors have good characteristics, such as distributed, high sensitivity, anti-electromagnetic interference, and can work in harsh environments. [0003] The conventional fiber grating production method is to use ultraviolet light, two beams of light to interfere, or one beam of light to pass through a phase mask to generate two beams...

AI Technical Summary

Problems solved by technology

[0010] In order to solve the problem that the multiple peaks produced by Bragg gratings on the multimode sapphire optical fiber are not easy to distinguish, and the high cost and low efficiency of high temperature optical fiber sensors made by other methods, the present invention provides a new type of optical waveguide sensor and its production method

Images