Multifunction three-dimensional displacement and topography laser interferometry system
A laser interference and measurement system technology, applied in the direction of measuring devices, optical devices, instruments, etc., can solve the problems of few application occasions, and achieve the effects of convenient imaging, precise phase shift adjustment, and high degree of automation
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[0018] figure 1 It is a schematic diagram of the principle structure of the multifunctional three-dimensional displacement and shape laser interferometry system provided by the present invention. The device includes a laser 1, an optical coupler 2, an image acquisition and shooting system 3, a three-dimensional interference optical path system 4, a six-dimensional support adjustment system 5, a light splitting switch 6, a loading device table 7 for placing a test piece, and a computer 8. The three-dimensional The interference optical path system includes a field lens 18, a collimating mirror 20, a dichroic prism 21 and an imaging lens 22; the light splitting coupler divides the light emitted by the laser into a reference light and an object light, and the reference light passes through the collimating mirror 20, and then passes through the The dichroic prism 21 is incident on the field lens 18, and reaches the image acquisition camera system 3 through the imaging lens 22. The ...
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