Surface plasma resonance (SPR) phase measuring device for measuring thickness of nanometer metal film

Abstract

The invention relates to a surface plasma resonance (SPR) phase measuring device for measuring the thickness of a nanometer metal film. The SPR phase measuring device comprises a laser, a collimation lens, a first polarizer, a prism-type SPR sensor, a plane reflector, an interference system, a second polarizer, a couple charged device (CCD) camera and a computer 10, wherein the laser, the collimation lens and the first polarizer stay on the same optical axis, and the second polarizer and the CCD camera are placed on the same optical axis; the laser emitted by the laser enters the prism-type SPR sensor after passing through the collimation lens and the first polarizer, after being reflected through the plane reflector to the interference system, the reflection light passes through the second polarizer, an interference image is received by the CCD camera, and then the obtained interference image is recorded by the computer. The SPR phase measuring device has the beneficial effects that the structure is simple, convenience in operation can be realized, the error caused by a light path is inhibited by adopting a laser interference-based SPR phase modulation method and adopting the same light path to measure a coating area and a non-coating area of the prism-type SPR sensor in the measuring process, and high measurement precision can be realized.

Description

technical field [0001] The invention relates to a measuring device for the thickness of a metal thin film, in particular to an SPR phase measuring device for measuring the thickness of a nanoscale metal thin film. Background technique [0002] At present, the commonly used methods for detecting film thickness mainly include: interferometry, high-precision microscope measurement, ellipsometry, probe measurement, capacitance micrometry, X-ray diffraction, etc. The main methods for measuring the thickness of nano-scale metal films are mainly high-precision microscope measurement method and probe measurement method. Among them, the high-precision microscope measurement method mainly uses scanning tunneling microscope (STM) and atomic force microscope (AFM) to determine the thickness of the metal film by measuring the step height of the film base or measuring the cross-section of the film sample; the probe measurement method is to use The step meter conducts contact scanning on ...

AI Technical Summary

Problems solved by technology

However, the high-precision microscope has a complex structure, is expensive, and is not easy to operate. The contact measurement of the step instrument will cause damage to the thin film sample and destroy the integrity of the sample.

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