The invention discloses a large-aperture
diffraction structure
direct writing online calibration and error suppression
system, which relates to the technical field of
diffraction structure
direct writing and comprises an error detection module, a compensation generation module, a dynamic execution module and a
closed loop feedback module. The error detection module is provided with a workpiece carrying table and a
wavefront sensor, obtains a residual
light field, separates a tilt term, an out-of-focus term, an
astigmatism term and a
coma term caused by
mechanical vibration of the carrying table through Zernike polynomial
decomposition, and generates an error source
feature vector. The compensation generation module generates geometric correction and an aberration compensation matrix through a reverse
optical path tracing
algorithm; the dynamic execution module feeds the correction amount and the compensation matrix back to the carrying table and the transmission-type
spatial light modulator respectively, and pre-modulation and
wavefront pre-shaping are completed; and the closed-loop feedback module scans the morphology through the
confocal detection array and compares the morphology to generate an error
distribution diagram for closed-loop input. According to the
system, accurate error
traceability and two-way synchronous pre-compensation are realized, and
direct writing errors are effectively inhibited.