The invention relates to a surface
plasma resonance (SPR) phase measuring device for measuring the thickness of a nanometer
metal film. The SPR phase measuring device comprises a
laser, a collimation lens, a first
polarizer, a
prism-type SPR sensor, a plane reflector, an interference
system, a second
polarizer, a couple charged device (CCD) camera and a computer 10, wherein the
laser, the collimation lens and the first
polarizer stay on the same
optical axis, and the second polarizer and the
CCD camera are placed on the same
optical axis; the
laser emitted by the laser enters the
prism-type SPR sensor after passing through the collimation lens and the first polarizer, after being reflected through the plane reflector to the interference
system, the reflection light passes through the second polarizer, an interference image is received by the
CCD camera, and then the obtained interference image is recorded by the computer. The SPR phase measuring device has the beneficial effects that the structure is simple, convenience in operation can be realized, the error caused by a light path is inhibited by adopting a
laser interference-based SPR
phase modulation method and adopting the same light path to measure a
coating area and a non-
coating area of the
prism-type SPR sensor in the measuring process, and high
measurement precision can be realized.