Silicon piezoresistance type wind velocity and wind direction sensor based on micro-electromechanical technology

Abstract

The invention discloses a silicon piezoresistive wind speed and direction sensor based on the microelectronic mechanical technology, which consists of an insulating substrate and four wind speed measuring units which are same and are distributed symmetrically, and detects the components of wind speed in the two orthogonal directions respectively; each wind speed measuring unit consists of an electrode, a mechanical anchor point, a silicon piezoresistive beam, a silicon support beam and a silicon cantilever beam; when the wind blows the surface, the cantilever beam is taken as a wind-sensing element and is pressed by a force of airflow vertical to the cantilever beam so as to generate deformation and acts on the silicon piezoresistive beam by an axial stress mode through a microlever structure consisting of the silicon piezoresistive beam, the silicon support beam and the silicon cantilever beam, thus causing the change of the value of silicon piezoresistive; the wind speed and the wind direction are detected by detecting the change of piezoresistance of each wind speed measuring unit; two-dimension wind speed and the measurement of wind direction are realized by differential detection; the piezoresistive wind speed and direction sensor has simple manufacture, high sensitivity and better anti-interference performance.

Description

technical field [0001] The invention belongs to the technical field of microelectronic machinery, and relates to a wind speed and wind direction sensor. Background technique [0002] Wind speed and direction sensors based on micro-electro-mechanical technology (MEMS) technology are mainly divided into two categories: thermal and mechanical. Compared with traditional anemometers, it has the advantages of small size, low cost, and easy mass production. It plays an important role in many fields such as meteorology and environmental monitoring. [0003] Silicon thermal anemometers are based on the principle of heat conduction, including heat loss type and calorimetric type. There are many disadvantages, such as the insulation between the heater and the fluid, the energy consumption of the heater, and the long response time of the sensor. [0004] The mechanical anemometer uses the mechanical force of the fluid on the sensing element to reflect the magnitude of the wind speed, w...

AI Technical Summary

Problems solved by technology

The commonly used mechanical anemometer adopts a silicon cantilever structure, and the piezoresistor is made by diffusion or ion implantation at its root, which can only detect the wind speed in one direction. Two anemometers are needed to determine the wind direction, which increases the difficulty of packaging.

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