Locking control method and system of large-stroke nanometer displacement positioning macro-movement bench

Abstract

The invention relates to a locking control method of a large-travel nano-displacement and positioning macro-motion table as well as a system thereof. The method comprises the operating steps: (1) a communication interface of a computer (upper computer ) sends an instruction for controlling, firstly, a macro-positioning system is started up to drive the macro-motion table and a micro-motion worktable to move together, and the macro-positioning is finished when the detected positioning error is smaller than the switching threshold value; (2) the computer controls and locks the macro-motion worktable, and is switched to a micro-positioning system dynamically in the meanwhile; and (3) the micro-positioning system controls the micro-motion worktable to further reach the target location required by the system and complete the positioning. The system mainly comprises: the macro-motion table and the micro-motion worktable as well as corresponding driving systems; a grating feedback system; a PMAC controller; a laser interferometer calibration system; a computer system; and a vibration isolation and noise elimination device (an air floatation vibration isolation platform) and the like. The hardware structure of the existing system is configured (a piezoelectric ceramic driving device) by adopting the method as required, when the macro-motion table meets the positioning requirements and stops the movement, piezoelectric ceramics lock the table, thereby improving the positioning accuracy of the system.

Description

technical field [0001] The invention relates to a precision positioning technology, which is one of the key technologies of MEMS. Aiming at the problem of positioning stability of a macro-motion stage in the nanometer-level precision positioning technology, a large-stroke nano-displacement positioning control method and system are proposed. Background technique [0002] Nanotechnology is one of the most promising emerging disciplines in the 21st century. Its development is very rapid, and thus created high-tech groups such as nanoelectronics, nanomaterials, nanobiology, nanomechanics, nanomanufacturing, nanomicroscopy and nanometering. In a broad sense, nanoscience and technology can be defined as engineering in the 0.1-100nm scale space (molecular and atomic levels). It is the frontier of scientific and technological development in the 21st century and will lead to major breakthroughs in human understanding and transformation of the world. In October 1999, at the "Symposiu...

AI Technical Summary

Problems solved by technology

However, when the macro-motion stage completes the macro-motion, although the compensation is performed, the macro-motion stage will still have a small vibration, and its impact on the high-precision positioning system cannot be ignored

At present, compensation measures are basically taken from the inside by studying the characteristics of the macro-motion table itself, and a device that locks the outside of the macro-motion table has not yet been retrieved.

Images