Method and device for preparing micro-nano composite periodic structure with femtosecond laser beam

A micro-nano composite, periodic structure technology, applied in the fields of laser nano-processing and holographic lithography, can solve the problems of lack of flexibility, monotonous periodic structure patterns, etc., and achieve the effect of improving diversity and enriching patterns

Inactive Publication Date: 2011-11-30
SHANGHAI DIANJI UNIV
View PDF2 Cites 29 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, the pattern of the periodic structure obtained by laser

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Method and device for preparing micro-nano composite periodic structure with femtosecond laser beam
  • Method and device for preparing micro-nano composite periodic structure with femtosecond laser beam
  • Method and device for preparing micro-nano composite periodic structure with femtosecond laser beam

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0042] The specific implementations of the method and device for preparing a micro-nano composite periodic structure by a femtosecond laser beam of the present invention will be described in detail below with reference to the accompanying drawings.

[0043] See attached figure 1 , The femtosecond laser beam is generated by the femtosecond laser light source 1, through the electronic shutter 2 through the first half-wave plate 3 and the first Glan prism 4 to adjust the energy and polarization direction, and then through the first total mirror 5 reflected to the first After the beam splitter 6 is divided into two beams A and D, the energy ratio of the two beams is 1:2. The reflected light beam A is reflected by the second total mirror 7 to the first time delay optical path system 8, and the emitted light is reflected by the third total mirror 9 and irradiated on the sample 24 through the second half-wave plate 10 and the first converging lens 11 . The transmitted light beam D is r...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

PropertyMeasurementUnit
Wavelengthaaaaaaaaaa
Login to view more

Abstract

The invention discloses a method and device for preparing a micro-nano composite periodic structure with femtosecond laser beams, combining multi-beam interference technology and femtosecond laser-induced nanostructures, and developing a polarization adjustment method, using the same interference device to combine femtosecond laser The beam is divided into three beams, and by simply rotating the angle of the half-wave plate to adjust the polarization state of the three beams, a wide variety of micro-nano composite periodic structures can be prepared, which greatly enriches the patterns of surface nano-periodic structures and improves the diversity of laser interferometry. , providing new technical means for the research of laser nanoprocessing and material modification.

Description

Technical field [0001] The invention relates to the technology of laser nano processing and holographic lithography, in particular to a method and device for preparing a micro-nano composite periodic structure by a femtosecond laser beam. Background technique [0002] In recent years, people have used colloidal ordered self-assembly, laser direct writing and laser interference techniques to prepare two-dimensional and three-dimensional periodic structures. Among them, laser interference technology has been widely used due to its simple process and low cost. Laser interference technology is to imprint the intensity distribution pattern produced by the coherence of multiple laser beams on photosensitive materials to prepare regular periodic structures. By changing the number of beams and the arrangement of beams, regular two-dimensional and three-dimensional periodic structures can be prepared. Since 2002, certain semiconductors and dielectrics have been irradiated with femtosecon...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
IPC IPC(8): B81C1/00G02B27/28
Inventor 贾鑫贾天卿熊平新
Owner SHANGHAI DIANJI UNIV
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap