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Method and device for preparing micro-nano composite periodic structure with femtosecond laser beam

A micro-nano composite, periodic structure technology, applied in the fields of laser nano-processing and holographic lithography, can solve the problems of lack of flexibility, monotonous periodic structure patterns, etc., and achieve the effect of improving diversity and enriching patterns

Inactive Publication Date: 2011-11-30
SHANGHAI DIANJI UNIV
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  • Abstract
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  • Application Information

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Problems solved by technology

Therefore, the pattern of the periodic structure obtained by laser interferometry in the prior art is monotonous and lacks flexibility.

Method used

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  • Method and device for preparing micro-nano composite periodic structure with femtosecond laser beam
  • Method and device for preparing micro-nano composite periodic structure with femtosecond laser beam
  • Method and device for preparing micro-nano composite periodic structure with femtosecond laser beam

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Embodiment Construction

[0042] The specific implementations of the method and device for preparing a micro-nano composite periodic structure by a femtosecond laser beam of the present invention will be described in detail below with reference to the accompanying drawings.

[0043] See attached figure 1 , The femtosecond laser beam is generated by the femtosecond laser light source 1, through the electronic shutter 2 through the first half-wave plate 3 and the first Glan prism 4 to adjust the energy and polarization direction, and then through the first total mirror 5 reflected to the first After the beam splitter 6 is divided into two beams A and D, the energy ratio of the two beams is 1:2. The reflected light beam A is reflected by the second total mirror 7 to the first time delay optical path system 8, and the emitted light is reflected by the third total mirror 9 and irradiated on the sample 24 through the second half-wave plate 10 and the first converging lens 11 . The transmitted light beam D is r...

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Abstract

The invention discloses a method and device for preparing a micro-nano composite periodic structure with femtosecond laser beams, combining multi-beam interference technology and femtosecond laser-induced nanostructures, and developing a polarization adjustment method, using the same interference device to combine femtosecond laser The beam is divided into three beams, and by simply rotating the angle of the half-wave plate to adjust the polarization state of the three beams, a wide variety of micro-nano composite periodic structures can be prepared, which greatly enriches the patterns of surface nano-periodic structures and improves the diversity of laser interferometry. , providing new technical means for the research of laser nanoprocessing and material modification.

Description

Technical field [0001] The invention relates to the technology of laser nano processing and holographic lithography, in particular to a method and device for preparing a micro-nano composite periodic structure by a femtosecond laser beam. Background technique [0002] In recent years, people have used colloidal ordered self-assembly, laser direct writing and laser interference techniques to prepare two-dimensional and three-dimensional periodic structures. Among them, laser interference technology has been widely used due to its simple process and low cost. Laser interference technology is to imprint the intensity distribution pattern produced by the coherence of multiple laser beams on photosensitive materials to prepare regular periodic structures. By changing the number of beams and the arrangement of beams, regular two-dimensional and three-dimensional periodic structures can be prepared. Since 2002, certain semiconductors and dielectrics have been irradiated with femtosecon...

Claims

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Application Information

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IPC IPC(8): B81C1/00G02B27/28
Inventor 贾鑫贾天卿熊平新
Owner SHANGHAI DIANJI UNIV
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