Macro/micro two-dimensional displacement platform

Abstract

The invention relates to a macro / micro two-dimensional displacement platform, which comprises a macro-motion platform, a micro-motion platform and a hydraulic driver. The micro-motion platform is fixed onto the macro-motion platform guided by a cross slider, and a steel ball is matched with a V-shaped block for adjustment. The macro / micro two-dimensional displacement platform is simple in structure, free of traditional guide rail side backlash, fine in stability and convenient in adjustment. The micro-motion platform provided with a right-angle flexible hinge mechanism is in cross layout, free of stacking and coupling errors, small in volume and fine in linearity. The hydraulic driver has the advantages of high rigidity, fine linearity, stable performance, convenience in machining and the like. The macro / micro two-dimensional displacement platform solves the contradiction between large stroke and high positioning precision, is small in overall size, high in positioning precision and fine in linearity, and can be used for the field of precision machining, error compensation and precision measurement.

Description

technical field [0001] The invention belongs to the technical field of precision engineering, and particularly refers to a two-dimensional displacement table capable of obtaining large stroke and high-precision displacement, which is used for precision machining and measurement. Background technique [0002] High-precision and high-resolution precision displacement devices occupy an extremely important position in the field of modern cutting-edge industrial production and scientific research. It is a key link that directly affects the level of precision, ultra-precision machining and precision measurement. Existing large-stroke driving devices mostly adopt the scheme of rotary servo motor drive plus precision ball screw drive or linear motor direct drive, but the positioning accuracy of the displacement device using this scheme is generally limited to the micron level, and the precision is not high; The micro-displacement platform represented by piezoelectric cerami...

AI Technical Summary

Problems solved by technology

But these two modes will produce stack error and coupling error respectively, which is not conducive to the precise positioning of the platform and the feedback compensation of the error

At the same time, these two modes will also increase the overall volume of the platform and complicate the structure

The inner and outer nesting mode will also reduce the overall stiffness of the platform, which is not conducive to the stability of the system

At the same time, as a common driving element of the micro-displacement platform, the piezoelectric ceramic driver also has problems such as small output force, high driving voltage, and hysteresis nonlinearity.

Images