Macro/micro two-dimensional displacement platform

A technology of two-dimensional displacement and displacement, which is applied in the field of precision engineering, can solve problems such as the increase of the overall volume of the platform, the unfavorable precise positioning of the platform, and the reduction of the overall rigidity of the platform, and achieve the effect of simple structure of the platform, no need for lubrication, and no mechanical friction

Inactive Publication Date: 2012-06-13
江苏久日数控机床有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

But these two modes will produce stack error and coupling error respectively, which is not conducive to the precise positioning of the platform and the feedback compensation of the error
At the same time, these two modes will also increase the overall volume of the platform and complicate the structure
The inner and outer nesti

Method used

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  • Macro/micro two-dimensional displacement platform
  • Macro/micro two-dimensional displacement platform
  • Macro/micro two-dimensional displacement platform

Examples

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Embodiment Construction

[0016] invented workbenches such as image 3 As shown, including micro-motion platform 1, micro-motion platform reset spring 2, micro-motion platform baffle 3, macro-motion platform reset upper spring 4, macro-motion platform rear baffle 5, macro-motion platform 6, macro-motion platform X-direction guide Steel ball 7, cross slider 8, base body 9, macro-moving platform reset lower spring 10, base body rear baffle plate 11, X direction hydraulic oil power source 12, joint and oil pipe 13, hydraulic micro-driver 14, Y direction hydraulic oil power source 15. X-direction adjusting bolt 16, hemispherical bushing 17, Y-direction micrometer 18, substrate front baffle clamp 19, substrate front baffle 20, macro-motion platform front baffle clamp 21, macro-motion platform front baffle 22 , X-direction micrometer 23, macro-moving platform Y-direction steel ball 24, Y-direction adjusting bolt 25.

[0017] The macro-motion platform 6 is connected to the cross slider 8 through th...

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PUM

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Abstract

The invention relates to a macro/micro two-dimensional displacement platform, which comprises a macro-motion platform, a micro-motion platform and a hydraulic driver. The micro-motion platform is fixed onto the macro-motion platform guided by a cross slider, and a steel ball is matched with a V-shaped block for adjustment. The macro/micro two-dimensional displacement platform is simple in structure, free of traditional guide rail side backlash, fine in stability and convenient in adjustment. The micro-motion platform provided with a right-angle flexible hinge mechanism is in cross layout, free of stacking and coupling errors, small in volume and fine in linearity. The hydraulic driver has the advantages of high rigidity, fine linearity, stable performance, convenience in machining and the like. The macro/micro two-dimensional displacement platform solves the contradiction between large stroke and high positioning precision, is small in overall size, high in positioning precision and fine in linearity, and can be used for the field of precision machining, error compensation and precision measurement.

Description

technical field [0001] The invention belongs to the technical field of precision engineering, and particularly refers to a two-dimensional displacement table capable of obtaining large stroke and high-precision displacement, which is used for precision machining and measurement. Background technique [0002] High-precision and high-resolution precision displacement devices occupy an extremely important position in the field of modern cutting-edge industrial production and scientific research. It is a key link that directly affects the level of precision, ultra-precision machining and precision measurement. Existing large-stroke driving devices mostly adopt the scheme of rotary servo motor drive plus precision ball screw drive or linear motor direct drive, but the positioning accuracy of the displacement device using this scheme is generally limited to the micron level, and the precision is not high; The micro-displacement platform represented by piezoelectric cerami...

Claims

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Application Information

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IPC IPC(8): B23Q1/25B23Q1/26G01D11/00
Inventor 王树林李尊栋陈文华徐宇蓝沈春根
Owner 江苏久日数控机床有限公司
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